MU

80 80 ZZ 116 130 142 173 185 Z 108 120 132 159 169 RR 8 10 10 14 16 Q 125 142 159 191 207 L 17 22 27 32 38 CDH10 CX 9 11 13 16 16 CZ 18 22 26 32 32 Model MUC25, MUD25 MUC32, MUD32 MUC40, MUD40 MUC50, MUD50 MUC63, MUD63 ZZ + Stroke 8 10 10 14 14 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 Clevis pin and snap ring are shipped together with double clevis style. 7-8-7 8 Plate Cylinder Double

MU

80 80 ZZ 116 130 142 173 185 Z 108 120 132 159 169 RR 8 10 10 14 16 Q 125 142 159 191 207 L 17 22 27 32 38 CDH10 CX 9 11 13 16 16 CZ 18 22 26 32 32 Model MUC25, MUD25 MUC32, MUD32 MUC40, MUD40 MUC50, MUD50 MUC63, MUD63 8 10 10 14 14 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 A clevis pin and snap ring are packed with the double clevis style.

MU

80 80 ZZ 116 130 142 173 185 Z 108 120 132 159 169 RR 8 10 10 14 16 Q 125 142 159 191 207 L 17 22 27 32 38 CDH10 CX 9 11 13 16 16 CZ 18 22 26 32 32 Model MUC25, MUD25 MUC32, MUD32 MUC40, MUD40 MUC50, MUD50 MUC63, MUD63 ZZ + Stroke 8 10 10 14 14 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 Clevis pin and snap ring are shipped together with double clevis style. 7-8-7 8 Plate Cylinder Double

Membrane Air Dryer

Outlet air flow rate 150 L/min [ANR] [Series IDG175 L/min [ANR] Confirmation of compressed Step 1 air supply capacity Inlet Air Temperature Correction Factor for Outlet Air Flow Rate Review operating conditions.

EX120/121/122

(39.7) 30.9 M3 Ground terminal Before mounting connector (accessory) EX180-SDN1, SDN2 Communication connector Power supply connector (For solenoid valve) 42.3 30.9 77 80 93.3 (39.7) M3 Ground terminal Before mounting connector (accessory) 1660 Integrated Type/ For Input/Output Series EX240 VQ2000/4000 VQC4000 r q w e No.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SQ1131 20 or less 0.19 0.20 0.80 0.19 0.20 0.79 15 or less Rubber seal 80 2 position 3 position 4 position SQ1230 0.14 0.11 0.63 0.14 0.10 0.62 15 or less Metal seal 80 Double (Latching) SQ1231 0.19 0.20 0.80 0.19 0.20 0.79 20 or less Rubber seal 80 Double (Double solenoid) SQ1230D 13 or less 0.14 0.11 0.63 0.14 0.10 0.62 10 or less Metal seal 95 SQ1231D 20 or less 0.19 0.20 0.80 0.19

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y A Connection thread S 10 94 60 23 20 132 70 51 30 142 80 40 178 90 77 50 188 100 E D C B 10 49 32.9 24 P 10 8 M5 x 04 06 2.5 Applicable tubing O.D.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

bracket mounting position 80, 100 300, 350, 400, 450, 500, 600, 700 Change of tie-rod length Types with auto switch have different minimum strokes.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

or less 3 Exhaust center 1.87 (1.82) VFR540 VFR541 3 80 or less 1.87 (1.82) VFR551 Pressure center VFR550 3 80 or less Note 1) [ ]: Denotes the normal position.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

SV 44 185 24.5 24.5 181 175 EB EA B RATE 165 MODEL SV (SI No.EX124U-SMJ1) LERR.

IZx-OMT0049

50 to 1300 50 to 2000 50 to 2000 0.5 100 to 175 50 to 1300 50 to 2000 50 to 2000 1 300 to 500 300 to 1500 400 to 2000 600 to 2000 100 to 175 50 to 1300 50 to 2000 50 to 2000 3 300 to 400 300 to 1500 350 to 2000 500 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 5 300 to 400 300 to 1500 300 to 2000 400 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 8 300 to 350 300 to 1400 250 to

Stroke Reading Cylinder and Counter

LEFT RIGHT 35.5 A : B : C : D : t : 10 sec or more required 80 4 56 DOWN 2.5 sec or more required SEL.

Lubrication Equipment

Mounting orientation is Upper direction Model Port size Rc(PT) 63 63 80 85 90 100 B C A INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 1/4 141 164.5 170 180 230 251 15 15 15 20 22 22 3/8 1/4, 1/2 3/8, 3/4 3/4, Bracket dimensions Model Port size B C D E A 1 F 345 419.2 K 57 49.6 J 14 14 H 95 120 G 32.5 0 1 1 1 1 2 4, 1 2, 1 175 250 175 250 87.5 125 460 613 135 209 4, 3 ALD600

Cylinder with Turntable ø63, ø80, ø100 Series MGT

Port thread type 80 80 mm Rc Nil 100 100 mm Table position detector hardware TN NPT Position detector arms Switch bracket Positioning angle Symbol TF G Table unit/ Auto switch a b c d 10 11 12 13 14 15 20 23 25 180 c Nil Without auto switch (Built-in magnet) Stroke (mm) 90 Refer to Standard Stroke on page 452.

MLGP

1/4 M5 x 0.8 CLS Holding force (Maximum static load) (N) 157 245 402 629 982 1559 2513 3927 W Standard Stroke CLQ Bore size (mm) Standard stroke (mm) MLGP 20, 25 32 to 80 100 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 RLQ Manufacture of Intermediate Stroke MLU Spacer installation

NCQ8

Mounting bolt C D Mounting Bolt Size for NCDQ8B056 to 250(With Auto Switch) (Inch) Model C D Bolt size Model C D Bolt size NCDQ8B056-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCDQ8B075-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCDQ8B106-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCDQ8B150-025 037 050 062 075 087 100 125 150 175 200 250

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

stroke end) and its mounting height Operating range Auto switch mounting brackets/Part no. 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250 300, 350, 400, 450, 500, 600, 700 80: 1400 100: 1500 Note 1) Intermediate strokes not listed above are produced upon receipt of order.

Cylinder with Lock Double Acting, Single Rod ø40, ø50, ø63, ø80, ø100 Series CNA2

25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 50, 63 1200 80: 1400 100: 1500 80, 100 Note 1) Intermediate strokes other than the above are produced upon receipt of order.

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

100 Standard Stroke Table Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kits 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit No. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1

Microspeed Cylinder

100 6, 10 15, 20 25, 32 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20 25, 32 12, 16 20, 25 32, 40 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 20, 25 32, 40 50, 63 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Rubber bumper (basic cylinder section) Shock absorber (optional for CX2) No