C95

From 0.4 MPa Graph (6) m From 0.5MPa Graph (7) F 6-12-27 Series C95N Selection Graph Graph (5) Graph (2) 0.3 MPa P < 0.4 MPa 0.3 MPa P < 0.4 MPa 1000 1000 500 400 300 500 400 300 100 80 200 200 63 100 80 100 100 50 40 100 100 Load weight: m (kg) Load weight: m (kg) 63 50 40 30 50 40 30 32 50 40 20 20 32 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 300 400 500 1000 200 Maximum

7.4

(B) port> C2: 2 One-touch fitting C4: 4 One-touch fitting N1: 1/8" One-touch fitting N3: 5/32" One-touch fitting Manual override 79.3 300 (Lead wire length) 300 (Lead wire length) 28.5 10.5 7.4 83.6 39.7 41.8 Manual override 9.2 31.5 22.9 22.8 20.4 10.5 22 8 8 3 x C2, C4, N1, N3 <1(P), 5(EA), 3(EB) port> C2: 2 One-touch fitting C4: 4 One-touch fitting N1: 1/8" One-touch fitting N3: 5/32

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

10 15 0 5 10 15 20 25 0 5 10 15 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 600 600 600 Z 400 400 400 200 200 200 Mep m 0 0 0 0 5 10 15 0 5 10 15 20 25 0 5 10 15 20 L8 Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

Secondary Batteries

push type Push-turn locking slotted type 5 (EA) 1 (P) 3 (EB) 3 position closed center (A) 4 (B) 2 Light/Surge voltage suppressor 3 U R With light/surge voltage suppressor(Non-polar type) With surge voltage suppressor(Non-polar type) 5 (EA) 1 (P) 3 (EB) 3 position exhaust center (A) 4 (B) 2 M12 waterproof connector 4 Cable length (mm) 300 500 1000 2000 5000 Symbol W1 W2 W3 W4 W7 5 (EA) 1

Electric Grippers

to 70/ 5 to 50 5 to 80/ 5 to 50 5 to 100/ 5 to 50 5 to 120/ 5 to 50 7 to 17 1.4 to 3.5 Opening and closing speed/ Pushing speed [mm/s] Note 2) Note 3) Actuator specifications Electric specifications Drive method Slide screw + Wedge cam 0.02 Repeatability [mm] Note 4) Repeated length measurement accuracy [mm] Note 5) 0.05 0.5 or less Finger backlash/dia.

High Vacuum Angle Valve

Uniform baking temperature 108 300 10.6 300 138 315 18.5 800 Common to all series.

Refrigerated Air Dryers Series IDF/IDU

VDC, 5 A Error signal ... 220 VAC, 1 A 24 VDC, 0.5 A Minimum current value: 20 V, 5 mA (AC/DC) for operating and error signals.

C95

m (kg) 63 32 50 40 50 40 30 50 40 30 32 20 20 [Example] 10 10 5 4 3 5 4 3 2 2 1 100 300 400 500 1000 1 100 200 300 400 500 1000 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 80 500 400 300 500 400 300 63 100 80 50 40 200 200 63 100 100 Load weight: m (kg) Load weight: m (kg) 32 50 40 50 40 30 50 40 30 32 20 20 10 10 5 4 3 5 4 3

Basic Type/Direct Mount Type

400 50 300 200 100 10 5 Usable range 20 30 40 50 Usable range 1 0 1 2 3 4 5 6 10 0 1 2 3 4 5 6 Distance from cylinder shaft center Lo (cm) 7 8 9 10 11 12 13 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) CY3B25 500 300 200 100 20 30 40 50 10 Usable range 5 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 Distance from cylinder shaft center Lo (cm) 1464 Model Selection CY3B/CY3R Series

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

5 !

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

From the graph, a 63 bore size is selected. 10 63 50 40 32 1 20 25 0.5 10 100 300 Eccentricity distance l (mm) 8-25-4 4 Model Selection Series MGZ/MGZR Selection Graph (4) and (5) (Vertical downward mounting) Selection Example: Horizontal Mounting Graph (4) up to 300 mm/s Graph (5) up to 500 mm/s w Selection conditions MX 120 200 80 80 Mounting: Horizontal (Chucking) Stroke: 300 mm Load center

VDW

21 27 27 Rectifier element AC type Rectifier element AC type 20 2 x 3.5 14 2 x 3.2 27 20 20.5 17 56 48 5 11 1 1 6 8 5 M5 1 (IN) port 2 (OUT) port M5, 1/8 1 (IN) port M5, 1/8 M5 2 (OUT) port 15 2 x M3 x 5 2 x M2.5 x 3.5 VDW31-l G W 36 (27.6) Lead wire l Approx. 300 30 40 SMC SMC 1 1 Rectifier element AC type 4 x 5 25 34 28 Bracket assembly part no.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

One-touch fitting Silencer 2.10-3 3 Port Solenoid Valve VQZ100/200/300 Valve Single Unit Body Ported Plug Lead Unit How to Order Valve VQZ100 VQZ 1 1 5 5 M C6 PR Series 1 VQZ100 Body width 10mm Bracket F None With bracket Configuration N.C.

LG1H

Applicable strokes: 150, 250, 350 Example) LG1H2021PA-150-F2-X2 100 5.3 8.3 400 7.7 12.0 5 to 40 (with no condensation) 200 6.1 9.6 300 6.9 10.8 mm kg kg C kg N mm/s mm Standard stroke Aluminum Stainless steel Body weight Operating temperature range Work load Rated thrust Maximum speed Performance 30 180 500 0.02 AC servomotor (100W) Incremental system Ground ball screw 15mm, 10mm lead High

Table of Contents

Vacuum pressure Suction flow rate 13-5-5 6 Series ZH Box Type (Built-in silencer): ZHB -S L One-touch connection Applicable tubing diameter B Model A 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 63 6 23 18 12.8 29 5 50 63 6 23 18 12.8 29 5 50 78 8 27.5 23 13.7 35 7 61 78 8 27.5 23 13.7 35 7 61 B C D E F G H ZH05BS-06-06 ZH05BL-06-06 ZH07BS

45

suppressor 3 3 position closed center SY With light/surge voltage suppressor 4 3 position exhaust center 5 3 position pressure center SYJ Rated voltage Electrical entry 5 24 VDC 6 12 VDC SX Grommet L plug connector M plug connector G: Lead wire length 300 mm H: Lead wire length 600 mm L: With lead wire (Length 300 mm) LN: Without lead wire LO: Without connector M: With lead wire (Length

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

From the graph, a 63 bore size is selected. 10 63 50 40 32 1 20 25 0.5 10 100 300 Eccentricity distance l (mm) 424 Non-rotating Double Power Cylinder Series MGZ Selection Graph (4) and (5) (Vertical Downward Mounting) Selection Example: Horizontal Mounting Graph (4) up to 300 mm/s Graph (5) up to 500 mm/s w Selection conditions 120 200 80 80 Mounting: Horizontal (Chucking) Stroke: 300 mm

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Piston speed mm/s Piston speed mm/s Features 6 Series MY2H Maximum Allowable Moment/Maximum Allowable Load Moment/MY2HT (Double axis) MY2HT/M3 MY2HT/M1 MY2HT/M2 300 300 300 200 200 200 100 100 100 Moment Nm Moment Nm Moment Nm 50 50 50 MY2H40 40 40 40 MY2H40 MY2H40 30 30 30 MY2H25 20 20 20 MY2H25 MY2H25 MY2H16 10 10 10 MY2H16 MY2H16 8 8 8 5 5 5 100 200 300 400500 1000 1500 100 200 300 400500

SQ1000/2000

-10A-3 (1 set) Stations 1 2 3 4 5 6 7 8 9 U side 3m SQ1000-10A-3 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 D-sub connector cable AXT100-DS25-030 Cylinder port fitting C6: 6 One-touch fitting D side Manifold base (9 stations) SS5Q13-09FD2-D F kit (D-sub connector kit) SS5Q13-09FD2-D . 1 set: F kit 9 station manifold base SQ1130-5-C6 .

Table of Contents

Centralized wiring type IISA2S-1 IISA2S-2 IISA2S-3 IISA2S-4 IISA2S-5 IISA2S-6 Individual wiring type IISA2P-1 IISA2P-2 IISA2P-3 IISA2P-4 IISA2P-5 IISA2P-6 ISA-5-1 ISA-5-2 ISA-5-3 ISA-5-4 ISA-5-5 ISA-5-6 ISA-5-7 73.0 135.5 173.0 210.5 248.0 285.5 323.0 35 35 5.5 Pressure Gauge for Air Catch Sensor Round pressure gauge Square embedded pressure gauge G36 01 Connection thread GC3 4 4 AS Nil