Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

40 32 5 40 CQM 5 4 3 25 32 CQ2 25 20 1 2 20 RQ 0.5 1 0 10 20 30 40 50 60 70 80 90 100 50 100 200 500 300 MU Maximum speed (mm/s) Stroke St (mm) D-X 20W (Mounting orientation: Horizontal) Data 7-6-151

CNA

50 MLU 50 40 30 50 40 30 40 ML1C 20 20 [Example] D10 10 5 4 3 5 4 3 -X 202 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 80 500 400 300 500 400 300 63 100 100 80 50 40 80 200 200 63 63 100 100 Load weight: m (kg) Load weight: m (kg) 50 50 50 40 30 50 40 30 40 40 20

CNA

(3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 1000 1000 CLQ 100 500 400 300 500 400 300 80 MLGP 100 63 200 200 50 40 80 RLQ Load weight: m (kg) Load weight: m (kg) 100 100 63 50 MLU 50 40 30 50 40 30 40 ML1C 20 20 [Example] D10 10 5 4 3 5 4 3 -X 202 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P

0.4

This allows for viable connections to take place without necessarily specifying whether the manifold station is double, single, or mixed wiring. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM.

VEX1

AN300-03 AN400-04 AN400-04 AN500-06 AN600-10 AN600-10 AN700-12 AN800-14 AN900-20 VEX3 23 4 03 04 VEX35004 06 10 VEX37010 12 VEX39014 20 1959 Series VEX3 How to Order Electrical entry (Only with solenoid) Body size Port size Symbol Body size Electrical entry Port size Port 3 (R) 1 (P), 2 (A) 01 02 02 03 04 04 06 10 10 12 14 20 Body size G Grommet, Lead wire length 300 mm H Grommet, Lead wire

C95

m (kg) 63 32 50 40 50 40 30 50 40 30 32 20 20 [Example] 10 10 5 4 3 5 4 3 2 2 1 100 300 400 500 1000 1 100 200 300 400 500 1000 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 80 500 400 300 500 400 300 63 100 80 50 40 200 200 63 100 100 Load weight: m (kg) Load weight: m (kg) 32 50 40 50 40 30 50 40 30 32 20 20 10 10 5 4 3 5 4 3

Table of Contents

: 0.4 MPa Supply pressure: 0.4 MPa 100 90 100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 70 70 ZF 60 60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.

Basic Type/Direct Mount Type

Standard stroke 6 10 15 20 25 32 40 50 63 6mm 10mm 15mm Port thread type 20mm Bore size 6, 10, 15 Type M thread Rc NPT G Symbol 25mm 32mm Nil 20, 25, 32, 40 40mm TN TF 50, 63 50mm 63mm Standard Stroke Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) 300 6 50, 100, 150, 200 500 10 15 20 50, 100, 150, 200, 250, 300 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 1000 1500 100

MY1

500 400 300 200 200 100 1 2 3 4 5 10 20 30 100 2 3 4 5 10 20 30 0.5 40 50 100 Load mass (kg) Load mass (kg) 40 Horizontal collision: P = 0.5 MPa 20 Horizontal collision: P = 0.5 MPa 2000 1500 2000 1500 Collision speed (mm/s) Collision speed (mm/s) L unit 1000 1000 Air cushion 500 400 300 500 400 300 L unit Air cushion 200 200 100 1 2 3 4 5 10 20 30 1002 3 4 5 10 20 50 Caution 40 50 Load

VDW

VCL Standard Option t 1 Body Brass (C37) Stainless steel VCS 2 Tube assembly Stainless steel 3 Coil assembly VCW y 4 Armature assembly FKM, EPDM Stainless steel, PPS, NBR 5 O-ring (Body) FKM, EPDM NBR 6 Return spring Stainless steel q 7 Cover SPCE 8 Clip Stainless steel 245 Series VDW10/20/30 Dimensions VDW11-l G W VDW21-l G W 22 20 Lead wire l Approx. 300 Lead wire l Approx. 300 20

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

3.5 to 7 Approx. 300 (Lead wire length) 60.9 28.1 [35.1] 53.4 Max. 10 74.6 42.1 12.7 M8 x 1 32.6 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 65.5 [67.7] 75.5 55.7 [57.9] 64.6 57.2 50.7 34.7 8 9 8 9 8 9 8 9 14.5 3 14.5 3 14.5 3 14.5 3 20 20 20 20 23 23 23 23 27 Refer to the page 68 for dimensions with connector cable. 19 Series SYJ500 Base Mounted (With Sub-plate) [ ] for AC Grommet

MGG

50 93 M12 x 1.75 depth 21 34 6.5 9 10 7 150, 200, 250 14 depth 10 19 21 22 150 45 50 M10 x 1.5 depth 20 182 194 37 120 170 11 55 103 M14 x 2 depth 25 38 7 11 12 7 300 17 depth 12 For long strokes Bore size (mm) Stroke range (mm) Bore size (mm) PG PL W X XA Y Z R Y K L M N O Q R S V T U 20 25 32 40 250 to 400 350 to 500 350 to 600 350 to 800 30.5 74 52 30 3 152 194 14 160 20 25 32 40 80 106

Air Cylinder Series CA2

to 500 30 27 60 22 44 16 32 10 15 8 M8 x 1.25 6 14 40 +0.070 0 -0.1 -0.3 12 18 Up to 600 20 to 600 35 32 70 27 52 20 40 10 17 11 M8 x 1.25 7 18 50 +0.070 0 -0.1 -0.3 16 25 Up to 600 20 to 600 35 32 85 27 64 20 40 10 17 11 M10 x 1.25 7 18 63 +0.084 0 -0.1 -0.3 20 31.5 Up to 750 20 to 750 40 37 102 32 78 25 52 14 21 13 M12 x 1.75 10 22 80 +0.084 0 -0.1 -0.3 25 35.5 100 Up to 750 20 to 750

CNA

MXS 50 50 50 40 40 40 80 80 80 100 100 63 63 63 MXQ Load weight m(kg) Load weight m(kg) 50 50 50 40 40 40 50 40 30 50 40 30 MXF 20 20 [Example] MXW 10 10 MXP 5 4 3 5 4 3 MG 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 MGP Max. speed V(mm/s) Max. speed V(mm/s) MGQ Graph m Graph v 0.5MPa P 0.5MPa P MGG 1000 1000 100 100 100 80 80 80 MGC 500 400 300 500 400 300 63 63 63

CA2

to 500 30 27 60 22 44 16 32 10 15 8 M8 x 1.25 6 14 40 +0.070 0 0.1 0.3 12 18.0 up to 600 20 to 600 35 32 70 27 52 20 40 10 17 11 M8 x 1.25 7 18 50 +0.070 0 0.1 0.3 16 25.0 up to 600 20 to 600 35 32 85 27 64 20 40 10 17 11 M10 x 1.25 7 18 63 +0.084 0 0.1 0.3 20 31.5 102 13 up to 750 20 to 750 40 37 32 78 25 52 14 21 M12 x 1.75 10 22 80 +0.084 0 0.1 0.3 25 35.5 100 up to 750 20 to 750 40 37

Ionizer

10 5 5 0 0 500 1500 2000 0 0 100 200 300 400 500 600 1000 Distance (mm) Distance (mm) Air purge: Yes Supply pressure: 0.1 MPa (7 L/min (ANR) per nozzle) Air purge: Yes Supply pressure: 0.05 MPa (3.5 L/min (ANR) per nozzle) 45 25 40 35 20 Discharge time (s) Discharge time (s) 60 Hz 30 15 25 1 Hz/60 Hz 20 1 Hz 10 15 Sensing DC Sensing DC 10 5 5 00 500 1000 1500 2000 00 500 1000 1500 2000 Distance

Table of Contents

Flow rate range Output for display unit Note 1) + analog output (1 to 5 V) Output for display unit Note 1) + analog output (4 to 20 mA) 3/8 1/2 3/4 1 2 11 13 19 Port size (inch) 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min Note 1) Output for the display units of PF2D 300/301 04 20 40 PF2D504 PF2D520 PF2D540 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-

CQ2

, 63/10 to 50 2.3-70 MU Axial piping (Centralized piping) 12, 16, 20, 25 32, 40, 50, 63, 80, 100 12, 16/5 to 30 20, 25/5 to 50 32, 40/5 to 100 50 to 100/10 to 100 Double acting Single rod CQP2 2.3-82 Spring 12, 16, 20 25, 32, 40 50 Single acting 12 to 40/5, 10 50/10, 20 2.3-90 return/extend CQP2 Large bore size Single rod CQ2 125, 140 160 2.3-100 10 to 300 Double acting Double rod CQ2W 125

240

300 Note 4) 10 to 150 20 to 300 Note 4) Compact 10 to 150 20 to 300 Note 4) Pushing speed [mm/s] Note 5) 10 20 10 20 Acceleration/Deceleration [mm/s2] 3000 Backlash [mm] 0.2 or less Positioning repeatability [mm] 0.05 Lost motion [mm] Note 7) 0.2 or less Impact/Vibration resistance [m/s2] Note 8) 50/20 Actuation type Slide screw Guide type Sliding bushing Max. operating frequency [c.p.m

LEF-OM006xx

300 400 500 600 V(mm/s) 0 0 100 200 300 400 500 600 V (mm/s) LEFS 16 LEFS 25 LEFS 32 50 12 20 W(kg) W(kg) 10 W(kg) W(kg) W(kg) W(kg) 6 40 6 15 8 30 8 6 8 10 5 5 20 4 5 12 10 16 10 12 16 10 2 0 0 0 0 100 200 300 400 500 600 V (mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) -9- (1)(DC24V) LEFS40 (mm) 1) 200, 300, (400), 500, (600) (700), 800, (900),