Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

MSQB20 (Basic type) MSQB2A (Basic type) 100 MRQ Displacement m Displacement m 80 250 D60 20MSQA2A (High precision type) 10 20 30 40 190 200 40 MSQA20 (High precision type) 20 0 10 20 30 40 50 12 10 8 6 4 2 0 Load N Load N MSQ30 MSQ3A MSQB30 (Basic type) 300 MSQB3A (Basic type) 100 250 Displacement m Displacement m 80 200 60 MSQA3A (High precision type) 50 130 150 40 MSQA30 (High precision

XLA Series

H 5 Initial power/ Power 100 VAC 800/180 1200/300 1600/400 200 VAC 3200/180 4800/300 6400/400 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for the size 16 models.

XLA- ∗ -F7NJ ∗ - ∗ Series

H 5 Initial power/ Power consumption (W) 100 VAC 800/180 1200/300 1600/400 200 VAC 3200/180 4800/300 6400/400 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for the size 16 models. 200V The heaters are PTC thermistor type design.

XLF Series

H 5 Initial power/ Power consumption (W) 100 VAC 800/180 1200/300 1600/400 200 VAC 3200/180 4800/300 6400/400 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for the size 16 models. 200V The heaters are PTC thermistor type design.

MHZ

435 760 1370 27 55 115 240 430 760 1370 4 4 6 10 14 22 30 4 4 6 10 14 22 30 4 4 6 10 14 22 30 6 10 16 20 25 32 40 6 10 16 20 25 32 40 6 10 16 20 25 32 40 32, 40 Double acting Normally closed Normally open Single acting 3.7 13 38 57 83 161 267 JIS Symbol Double acting Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.

MHZ

435 760 1370 27 55 115 240 430 760 1370 4 4 6 10 14 22 30 4 4 6 10 14 22 30 4 4 6 10 14 22 30 6 10 16 20 25 32 40 6 10 16 20 25 32 40 6 10 16 20 25 32 40 32, 40 Double acting Normally closed Normally open Single acting 3.7 13 38 57 83 161 267 JIS Symbol Double acting Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.

VT307

Refer to the figure below. 5 6 24 VDC 12 VDC S VQZ 50 60 7 240 VAC, Hz With light/surge voltage suppressor (Except grommet type) Z 9 Other VZ Option As for the case of rated voltage [Others (9)], please contact SMC.

4

0 3 Series VT307 Dimensions Grommet: VT307-G1 Manual override (Non-locking) 2 x 4.5 (For mounting) (42) (33) 54.5 18.6 (17.2) (14.5) (4.5) (4.5) (28) (37) G: 300 H: 600 (Lead wire length) 40.3 13.5 47.2 10.3 3 13 2 1 1/4", 1/8" (Piping port) 16.5 16.7 25.6 (3.2) 33.2 29.5 25 M4 x 0.7 thread depth 7 (Mounting screw) Note) There is also VT307-H1 (lead wire length: 600 mm).

High Vacuum L Type Valve

H 5 Initial power/ Power 100 VAC 800/180 1200/300 1600/400 200 VAC 3200/180 4800/300 6400/400 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for the size 16 models.

XLG Series

H 5 Initial power/ Power consumption (W) 100 VAC 800/180 1200/300 1600/400 200 VAC 3200/180 4800/300 6400/400 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for the size 16 models. The heaters are PTC thermistor type design.

Ionizer Series IZS31

Bar type Bar length Sensor Emitter cartridge type/Emitter material Bar length 300 mm 380 mm 620 mm 780 mm 1100 mm 1260 mm 1500 mm 1900 mm 2300 mm Symbol 300 380 620 780 1100 1260 1500 1900 2300 Without sensor Autobalance sensor [Body-mounting type] Nil E F G Symbol Nil C S J K Emitter cartridge type Emitter material With feedback sensor Autobalance sensor [High-precision type] Tungsten Silicon

CKZ2N

point (mm) 340 14.0 320 45 13.0 300 60 75 90 105 120 135 12.0 280 260 11.0 240 10.0 220 9.0 200 8.0 180 7.0 160 140 0 5 10 15 20 25 30 3540 45 50 55 60 6570 75 80 85 90 95100 105 110115 120125 130 135 2 4 6 8 10 12 14 16 18 20 22 24 26 28 30 6.0 0 Load capacity (N) Load capacity (pounds) 6 Series CKZ2N Dimensions Pivot point with square flats Nh9 Release point RC (Left arm) RA (Dual arm)

Compact and Low Profile Design Rodless Cylinder Series MY2H/HT, MY2C, MY3A/3B, CY1F

length (Z) Height(H) Up to 36% reduction MY3A With rubber bumper Height (H) MY1B MY3A/3B MY3B With air cushion Height(H) (mm) Series 16 25 40 63 MY3A MY3B MY1B 27 37 54 84 MY1B With air cushion 37 54 84 116 Up to 53% reduction Max. 53% Weight Overall length(Z+Stroke) Z dimension Weight (kg) (mm) Series 16 25 40 63 Series 16 25 40 63 MY3A MY3B MY1B 0.34 0.87 2.95 8.26 MY3A MY3B MY1B 110 150 240

Made to Order Specifications:

Drain Series AFF Size Series AM, AMD, AMH Size 150 Series AFF Size Series AM, AMD, AMG, AMH Size Port size A B Connection A B 239 252 258 284 290 2B 80 1/4 , 3/8 1/8 , 1/4 , 3/8 450 550 650 850 256 260 300 300 349 380 496.5 11B 22B 37B 75B 240 3/4B, FF , 10K 1B, FF , 10K 1 B, FF , 10K 2B, FF , 10K 80 250 4B 1/2 1 2 3/8 , 1/2 3/4 1/2 , 3/4 1 3/4 , 1 1 , 1 1 , 2 80 8B 350 80 305 312 339 80

VQ5000

L n Dimensions 11 527 547 L1 L2 10 486 506 9 445 465 8 404 424 7 363 383 6 322 342 5 281 301 4 240 260 3 199 219 2 158 178 12 568 588 2-6-17 Base Mounted 18 Series VQ5000 Kit (Individual terminal block kit) T1 Manifold Specifications When the junction cover on the manifold is opened, terminal box is installed in the manifold block.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(Including insulator) 1.27 mm Min. bending radius (Fixed) 40 mm 240 Other Accessories CTerminal Plug This is used in place of an input unit manifold (input unit/input block). (If a terminal plug is not used, the GW units COM LED will not light up.)

VT317

VQ VKF Surge voltage suppressor mounting part (For G) VQZ VZ VS VFN Surge voltage suppressor Electrical entry G Grommet, 300 mm lead wire H Grommet, 600 mm lead wire C Conduit JIS Symbol T Conduit terminal D DIN terminal Rated voltage 50 60 1 2 3 100 VAC, Hz 200 VAC, Hz 110 VAC, Hz 220 VAC, Hz 50 60 50 60 4 50 60 5 6 24 VDC 12 VDC 7 240 VAC, Hz 50 60 9 Other Option Manifold Accessory

DOC1020530

Set the total current capacity to 300 mA. 300 mA is the value applicable when all I/O signals are used. The current capacity can be decreased by reducing the number of I/O points. The illustration of the 24 V DC power supply is divided between input signal and output signal for convenience. However, they can be configured by one. 11.

IDX-OM-W010

80 275 498 300 80 230 32 15 31 42 283 355 270 485 568 IDF Series 6-3 Dimentions 6 3 IDX-OM-W010 Air Dryer 6 References IDF15E1 603 54 41 300 Ventilation air outlet 16 1 C R Compressed inlet R 1 C Compressed air outlet Switch with lamp Evaporation thermometer 87 Drain separator Ventilation direction Ventilation 578 direction Terminal block [200VAC specification] 396 Drain tube (O.D.10, length

IDX-OM-W017

270 31 42 80 230 32 15 240 80 IDFA8E IDFA11E IDFA15E1 Rc1 300 603 578 41 54 396 87 258 43 15 270 101 380 314 16 IDFA Series 6-3 6 3 IDX-OM-W017 6 6-4 IDFA3E / 4E / 6E / 8E IDFA11E C R GFGI R C R GFGI R L N PE L N PE TB TB ILS ILS V V V V EVD EVD PTC OLR PTC OLR PE CM PE CM PE FM1 PRS PE FM1 PRS P P PE FM2 PE FM2 FM2DFA6E/8E IDFA6E/8EFM2 IDFA15E1 N L C R GFCI For Option R CM FM1 FM2