Contents 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc. CA2Y50-PS Note 1) Intermediate strokes not listed above are also available. Consult SMC for strokes outside the above ranges. Note 2) As the stroke increases, more sliding resistance may result due to the deflection of the piston rod and other factors.
100 Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.
100 Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.
AL Model Port size A B C D M N P R B B E F G H J K L M5 X 0.8 38.5 50 70.5 70.5 88 88 108 108 108 16 23 26 26 33 36 40 40 40 105 147.5 4.5 5.5 7 7 9 9 12 12 12 50 80 80 80 105 105 105 105 105 91 140 181 181 238 253 300 310 315 5 5 7 7 7 7 10 10 10 7.5 8.5 11 11 13 13 16 16 16 25.5 38 38 38 41 40.5 48 48 48 84.5 124.5 153 153 188 189.5 268 282 282 26 56.8 60.8 60.8 65.5 69.5 75.5 75.5 78 25
70 60 50 40 30 20 10 0 100 200 300 400 500 30 25 Work load: W [kg] Work load: W [kg] 3000 mm/s2 20 15 3000 mm/s2 10 5000 mm/s2 5 10 mm/s2 0 50 100 150 200 250 300 350 450 400 0 0 Speed: V [mm/s] Speed: V [mm/s] EQFS32HC/Ball Screw Drive Horizontal/Lead 4 Vertical/Lead 4 100 90 80 70 60 50 40 30 20 10 0 20 40 60 80 100 120 50 45 40 35 30 25 20 15 10 5 0 140 20 40 60 80 100 120 3000 mm/s2
80 80 ZZ 116 130 142 173 185 Z 108 120 132 159 169 RR 8 10 10 14 16 Q 125 142 159 191 207 L 17 22 27 32 38 CDH10 CX 9 11 13 16 16 CZ 18 22 26 32 32 Model MUC25, MUD25 MUC32, MUD32 MUC40, MUD40 MUC50, MUD50 MUC63, MUD63 ZZ + Stroke 8 10 10 14 14 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 Clevis pin and snap ring are shipped together with double clevis style. 7-8-7 8 Plate Cylinder Double
80 80 ZZ 116 130 142 173 185 Z 108 120 132 159 169 RR 8 10 10 14 16 Q 125 142 159 191 207 L 17 22 27 32 38 CDH10 CX 9 11 13 16 16 CZ 18 22 26 32 32 Model MUC25, MUD25 MUC32, MUD32 MUC40, MUD40 MUC50, MUD50 MUC63, MUD63 8 10 10 14 14 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 A clevis pin and snap ring are packed with the double clevis style.
80 80 ZZ 116 130 142 173 185 Z 108 120 132 159 169 RR 8 10 10 14 16 Q 125 142 159 191 207 L 17 22 27 32 38 CDH10 CX 9 11 13 16 16 CZ 18 22 26 32 32 Model MUC25, MUD25 MUC32, MUD32 MUC40, MUD40 MUC50, MUD50 MUC63, MUD63 ZZ + Stroke 8 10 10 14 14 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 Clevis pin and snap ring are shipped together with double clevis style. 7-8-7 8 Plate Cylinder Double
(39.7) 30.9 M3 Ground terminal Before mounting connector (accessory) EX180-SDN1, SDN2 Communication connector Power supply connector (For solenoid valve) 42.3 30.9 77 80 93.3 (39.7) M3 Ground terminal Before mounting connector (accessory) 1660 Integrated Type/ For Input/Output Series EX240 VQ2000/4000 VQC4000 r q w e No.
SQ1131 20 or less 0.19 0.20 0.80 0.19 0.20 0.79 15 or less Rubber seal 80 2 position 3 position 4 position SQ1230 0.14 0.11 0.63 0.14 0.10 0.62 15 or less Metal seal 80 Double (Latching) SQ1231 0.19 0.20 0.80 0.19 0.20 0.79 20 or less Rubber seal 80 Double (Double solenoid) SQ1230D 13 or less 0.14 0.11 0.63 0.14 0.10 0.62 10 or less Metal seal 95 SQ1231D 20 or less 0.19 0.20 0.80 0.19
Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y A Connection thread S 10 94 60 23 20 132 70 51 30 142 80 40 178 90 77 50 188 100 E D C B 10 49 32.9 24 P 10 8 M5 x 04 06 2.5 Applicable tubing O.D.
bracket mounting position 80, 100 300, 350, 400, 450, 500, 600, 700 Change of tie-rod length Types with auto switch have different minimum strokes.
or less 3 Exhaust center 1.87 (1.82) VFR540 VFR541 3 80 or less 1.87 (1.82) VFR551 Pressure center VFR550 3 80 or less Note 1) [ ]: Denotes the normal position.
SV 44 185 24.5 24.5 181 175 EB EA B RATE 165 MODEL SV (SI No.EX124U-SMJ1) LERR.
50 to 1300 50 to 2000 50 to 2000 0.5 100 to 175 50 to 1300 50 to 2000 50 to 2000 1 300 to 500 300 to 1500 400 to 2000 600 to 2000 100 to 175 50 to 1300 50 to 2000 50 to 2000 3 300 to 400 300 to 1500 350 to 2000 500 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 5 300 to 400 300 to 1500 300 to 2000 400 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 8 300 to 350 300 to 1400 250 to
LEFT RIGHT 35.5 A : B : C : D : t : 10 sec or more required 80 4 56 DOWN 2.5 sec or more required SEL.
Mounting orientation is Upper direction Model Port size Rc(PT) 63 63 80 85 90 100 B C A INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 1/4 141 164.5 170 180 230 251 15 15 15 20 22 22 3/8 1/4, 1/2 3/8, 3/4 3/4, Bracket dimensions Model Port size B C D E A 1 F 345 419.2 K 57 49.6 J 14 14 H 95 120 G 32.5 0 1 1 1 1 2 4, 1 2, 1 175 250 175 250 87.5 125 460 613 135 209 4, 3 ALD600
Port thread type 80 80 mm Rc Nil 100 100 mm Table position detector hardware TN NPT Position detector arms Switch bracket Positioning angle Symbol TF G Table unit/ Auto switch a b c d 10 11 12 13 14 15 20 23 25 180 c Nil Without auto switch (Built-in magnet) Stroke (mm) 90 Refer to Standard Stroke on page 452.
1/4 M5 x 0.8 CLS Holding force (Maximum static load) (N) 157 245 402 629 982 1559 2513 3927 W Standard Stroke CLQ Bore size (mm) Standard stroke (mm) MLGP 20, 25 32 to 80 100 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 RLQ Manufacture of Intermediate Stroke MLU Spacer installation