15

10 15 0 5 10 15 20 25 Work load [kg] Work load [kg] Work load [kg] LZ 1500 1500 1500 LC3F2 Mey 1000 1000 1000 L5 [mm] L5 [mm] L5 [mm] m Wall Y L5 500 500 500 0 0 0 0 1 2 3 4 5 0 5 10 15 0 5 10 15 20 25 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 5 10 15 0 5 10 15 20 25 0 1 2 3 4 5 Work load

CY1

15 20 25 32 40 50 63 CY1B Basic type Non-integrated guide 6 10 15 20 25 32 40 50 63 Basic type Direct mount CY1R Magnetic rodless cylinder 6 10 15 20 25 32 40 Slide bearing type CY1S 6 10 15 20 25 32 40 Ball bushing type CY1L Integrated guide 10 15 20 High precision guide type CY1H 25 (1 shaft) 25 (2 shafts) 32 Bilateral piping Centralized piping The piping type for CY1R6 is bilateral piping

REA/REB

M1 = F x L A M2 = F x L M3 = F x L Slider Type/Slide Bearing REAS Slider Type/Ball Bushing REAL Note) Deflection: Displacement of section A when force acts on section F REBH15, 25 REBH15, 25 REBH15, 25 REBH15 REBH15 REBH25 REBH15 REBH25 0.08 0.03 REBH25 0.02 Deflection (mm) Deflection (mm) Deflection (mm) 0.06 0.02 0.04 0.01 0.01 0.02 5 10 15 20 0 25 25 5 10 15 20 0 5 10 15 20 0 25 Moment

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

CG1

20 22 25 30 35 43 11 13 15 18 20 22 18 22 26 32 10 10 10 10 20 20 5.5 5.5 6.6 6.6 9 11 11 13.5 25 30 35 40 50 60 55 65 With rod boot ZZ Bore (mm) Applicable pin part no.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

bearing type High precision guide type CY B 1 3 Guide non-integrated type Guide integrated type 6 10 15 20 25 32 40 50 63 CY R 1 3 Magnetically coupled rodless cylinder 6 10 15 20 25 32 40 CY1S 6 10 15 20 25 32 40 CY1L 10 15 20 CY1H 25 (Single axis) 25 (Double axis) 32 Bilateral piping type Centralized piping type Auto switch Shock absorber The piping type for CY1R6 is bilateral piping only

5 Port Solenoid Valve Series SY3000/5000/7000/9000

+ 25 18.5 10 0.8 16.9 13.1 10-SY3120-H-M5(-F2) G 22.5 (A, B port) M5 x 0.8 28.5[35.5] 28.5[35.5] 2 23.5 25 18.5 P 16.9 (15) EA EB M5 x 0.8 (P, EA, EB port) (For manifold gasket positioning) 2-1.5 die-cast hole 19 22.5 L plug connector (L): 10-SY3120-L-C6,N7(-F2) 1 1 C4,N3 M plug connector (M): 10-SY3120-M-C6,N7(-F2) C4,N3 M8 connector (WO): 10-SY3120-WO-C6,N7(-F2) C4,N3 1 28.5[35.5] 13.1

Combination Cylinder

CG-020-24A CG-025-24A CG-032-24A CG-040-24A 8 +0.4 +0.1 41 +0.4 +0.1 48 +0.5 +0.1 48 +0.5 +0.1 56 8 +0.036 0 CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 20 25 32 40 42 48 53 60 5.5 5.5 6.6 6.6 31 37 38.5 42.5 10 10 10 10 (29.3) (33.1) (40.4) (49.2) 25 30 35 40 5.5 5.5 6.6 6.6 10 10 10 10 36 43 50 58 20 25 32 40 10+0.036 0 10 12 14 12+0.036 0 14+0.043 0 Tube dia. (mm) Tube dia.

CL

CG-020-24A CG-025-24A CG-032-24A CG-040-24A 8 +0.4 +0.1 41 +0.4 +0.1 48 +0.5 +0.1 48 +0.5 +0.1 56 CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 8 +0.036 0 31 37 38.5 42.5 5.5 5.5 6.6 6.6 42 48 53 60 20 25 32 40 10 10 10 10 (29.3) (33.1) (40.4) (49.2) 25 30 35 40 5.5 5.5 6.6 6.6 10 10 10 10 36 43 50 58 20 25 32 40 10+0.036 0 10 12 14 12+0.036 0 14+0.043 0 Tube dia. (mm) Tube dia.

CXS

400mm/s 2 20 50 CXSM CXSL CXSM CXSL 10 Weight m (kg) Weight m (kg) 10 32 32 25 25 1 1 20 20 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Graph V = up to 800mm/s 4 Graph V = up to 600mm/s 3 6 5 3 32 2 Weight m (kg) Weight m (kg) 32 25 25 1 1 20 20 CXSM CXSL CXSM CXSL 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Graph

CQS

12 16 5, 10, 15, 20 25, 30 2.2-10 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 2.2-16 Solid state switch D-F9N, F9NV D-F9P, F9PV D-F9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Series CQSK 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 2.2-24 Series CQSlS 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45,

AC Servo Motor Driver (Network card type ）

20 40 70 100 200 Bend radius [mm] 10 7 10.

0.4

one-touch fitting C10 [3(R) EXH port] (C12 in case of branch type) C10: 10 one-touch fitting (C12: 12 one-touch fitting) R R DIN rail clamp screw 76.5 60 35 25 10 12 3 3 X 49.5 P X B B B B B B B B P12 30 1 1 A A A A A A A A 13.5 C10 [1(P) SUP port] C10: 10 one-touch fitting C10 [1(P) SUP port] (C12 in case of branch type) C4, C6, C8, [4(A), 2(B) port] 25 C10: 10 one-touch fitting (C12: 12

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

34.5 33.5 14 20 17 10 MQR 6 4 17 16 12 16 34.5 33.5 20 6 10 16 9 16 11 34.5 33.5 30.5 29.5 20 14 17 T 19.5 16 21 16 47.5 38 44.5 37 25 20 22.5 17 21 25 22.5 19.5 47.5 38 47.5 38 52.5 48.5 64 58.5 78 70 44.5 10 5 22.5 19.5 18 21 47.5 44.5 25 9 21 16 21 16 24 21 32 24 41 32 25 20 25 20 29 25 37 29 49 37 21 47.5 25 19.5 44.5 22.5 17 22.5 17 24 22.5 26.5 24 30 26.5 16 19.5 16 22 19.5 24 22 26

M-E05-1-LQ1

Metric size Inch size 6 8 10 12 19 25 1/4" 3/8" 1/2" 3/4" 1" Note) 06 08 10 12 Note) 19 Note) 25 Note) 07 11 13 Note) 19 Note) 25 Note) Common to metric size/inch size. For details, refer to the table on the left. Seat Applicable tubing size Metric size Inch size 06 (6) 07 (1/4") 19 (19) 19 (3/4") 25 (25) 25 (1") Tubing O.D.

KJ

24 27 25 24 27 10 10 27.5 20.8 4 2.5 13 15.5 1.5 19.3 3 2-applicable tubing 10 27.2 20.5 13 19.3 10 12 3 6 15.2 4 12 30.2 23.5 23 23.3 12 14 15.7 16 17 15.7 16 17 15.7 17 15.7 18.8 17 15.7 18.8 19 17.7 18.8 19 17.7 18.8 30.2 23.5 4 24.3 23 23.3 24.3 23 24.3 23 27.3 24.3 23 27.3 27.5 26.2 27.3 27.5 26.2 27.3 5 19 30.2 23.5 16.2 8 12 14 16 30.2 23.5 5 6 25 30.2 23.5 27 Connection thread 12

Electric Actuator

4 5 Work load [kg] 0 0 5 10 15 Work load [kg] 0 0 20 0 25 20 15 10 5 5 10 15 L4 Vertical Work load [kg] Work load [kg] 1,500 2,000 2,000 2,000 1,500 1,500 1,500 1,000 L5 [mm] L5 [mm] L5 [mm] L5 [mm] 1,000 1,000 1,000 500 500 500 500 Mey m 0 0 0 1 2 3 4 5 Work load [kg] 0 0 5 10 15 Work load [kg] 0 0 Work load [kg] 0 25 20 15 10 5 5 10 15 20 L5 Work load [kg] 5 Series LEF Table Accuracy A

Parallel Style Air Gripper Series MHZ

14 4 4 6 10 14 4 4 6 10 14 6 10 16 20 25 6 10 16 20 25 6 10 16 20 25 Double acting Single acting type, Normally closed Normally closed Normally open MHZ MHF Single acting 3.7 12 31 56 83 MHL Refer to pages 436 to 440 for the specifications with auto switch.

MGP

80 100 50 Load weight m (kg) Load weight m (kg) MY1 50 40 40 50 30 40 30 32 20 20 10 10 100 10 10 100 200 20 30 40 50 20 30 40 50 200 Eccentric distance l (mm) Eccentric distance l (mm) 3.17-9 Series MGP Operating Range When Used as Stopper Bore Size 12 to 25/MGPM12 to 25 (Slide Bearing) MGPM12 to 25 (Slide Bearing) 100 l @ 50mm l @ 50mm l @ 50mm u u 25 m m 50 40 20 Transported object weight

Table of Contents

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8"1/2" 2.5, 4, 6 AS121F-M3 AS131F-M3 M3 x 0.5 6, 10, 16, 20 AS121F-M5 AS131F-M5 M5 x 0.8 6, 10, 16, 20 AS121F-U10/32 AS131F-U10/32 10-32 UNF Tube swivels 360 Universal type permits 360 piping swivel. (1) 20, 25, 32 AS221F-01 AS231F-01 R 1/8 20, 25, 32,