CG5-S

(mm) Bore size (mm) WA WB WH W ZZ 20 22 16 23 30 118 25 22 16 25 30 123 32 22 16 28.5 25 125 40 22 16 33 20 143 50 25 18 40.5 20 167 63 25 18 47.5 20 167 80 30 22 60.5 20 201 100 31 22 71 20 202 10 Series CG5-S Dimensions R V Axial foot type (L)/CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT M X Y X Y 8-J 4-LD C 0.1 LS + Stroke LX

CJ5-S

-X Bore size (mm) W WA WB WH ZZ 2020 30 22 16 23 118 25 30 22 16 25 123 Data 32 25 22 16 28.5 125 40 20 22 16 33 143 50 20 25 18 40.5 167 63 20 25 18 47.5 167 80 20 30 22 60.5 201 100 20 31 22 71 202 10-14-13 14 Series CG5-S Dimensions R V Axial foot style (L): CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT X Y X Y M 8-J 4-LD C 0.1

CJ5-S

-X Bore size (mm) W WA WB WH ZZ 2020 30 22 16 23 118 25 30 22 16 25 123 Data 32 25 22 16 28.5 125 40 20 22 16 33 143 50 20 25 18 40.5 167 63 20 25 18 47.5 167 80 20 30 22 60.5 201 100 20 31 22 71 202 10-14-13 14 Series CG5-S Dimensions R V Axial foot style (L): CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT X Y X Y M 8-J 4-LD C 0.1

SMC Pneumatic Clean Series

<18> 20 20 GA 19 17 17 13 B1 6 5.5 5.5 5 K 44 35.5 29 24 NA 9 7 7 7 RA 26 20 16.5 14 C 130 121 119 114 ZZ 14 10 8 6 KA 78 79 77 77 S 16 12 10 8 D 25 18 14 12 E 2 2 2 2 F 40 32 25 20 30 22 22 18 23 0<23> 0 0 10 0 0 0 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M14 x 1.5 M6 x 1 depth 12 12 12 1/4 1/4 3/8 1/2 58 58 27 27 32 41 14<12> 14<12> 10 10 10 10 23 20 20 20 11 11 58 72 20<17> 20<17> 16 16 71

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

23 15 23 15 23 15 23 15 48 48 48 48 12 12 12 12 20 20 20 20 54.5 54.5 54.5 54.5 57.6 Refer to page 646 for dimensions with connector cable. 631 Series 10-SYJ700 Manifold Specifications [Option] Directional Control Valves Air Grippers Modular F.

Environment

Level Range> Without Load 800 Lead 4: LEY32C Model Pushing speed [mm/s] Pushing force (Setting input value) Model Pushing speed [mm/s] Pushing force (Setting input value) 700 Lead 8: LEY32B 1 to 4 20% to 65% 1 to 4 40% to 95% 600 LEY25 LEY25A 5 to 20 35% to 65% 5 to 20 60% to 95% Lead 16: LEY32A 500 21 to 35 50% to 65% 21 to 35 80% to 95% Force [N] 1 to 4 20% to 85% 400 LEY32 5 to 20 35%

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

20 ZZ + 2 Stroke S + Stroke (mm) A AL Bore size Stroke range Standard Long B1 C D E F GA H H1 I J K KA MM NA P RA S 1 2 ZZ 20 20 20 13 14 14 20 20 2 2 2 2 2 2 3 3 12 14 18 25 30 32 40 50 8 10 12 16 20 20 25 30 14 16.5 20 26 32 38 50 60 13 17 17 19 27 27 32 41 0 0 0 10 10 10 10 10 26 31 38 47 58 72 89 110 15.5 19.5 19.5 27 32 32 37 37 93 93 95 87 102 102 122 122 5 6 6 8 11 11 13 16 6 8 10

SMC

Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Standard type Nil PNote 1) Axial piping type Note 1) The combination of axial piping type and both ends adjusters or retraction end adjusteris not

3

Applicable bore size/ Stroke Max. operating pressure 1.0 MPa Bore size 20 25 32 40 50 63 Stroke Specifications 10, 20 Bore size (mm) 63 Operating pressure range 0.1 to 1.0 MPa Specifications other than the above are the same as the standard. 20, 50 Construction/ Dimensions Dimensions (The outline dimensions shown are when the rod is retracted.)

V

T Y P E F L AT W I T H R I B I: M6X1 I: M5X0.8 Y Model A B C D E F G H H Flat Flat with rib G ZPR10 U C 10 12 12 21 29.9 46 20 67 72 3 1.7 25 ZPR13 U C 13 15 12 21 29.9 46 20 67 72 3 1.8 25 ZPR16 U C 16 18 12.5 21.5 30.4 46.5 20 67.5 72 3.5 1.2 25 D E E P T Y P E I: M6X1 I: M5X0.8 Model A B C D E F Y G H H G ZPR10D 10 12 15 24 32.9 49 20 70 75 6 25 ZPR16D 16 18 16 25 33.9 50 20 71 76 7 25

Vacuum Unit

Low noise 60 ZK2A07 (Silencer exhaust) ZK2G07 (High-noise reduction silencer exhaust) 46 dB (A) 1 50 1 Nozzle size: 0.7 (Under SMCs measurement conditions) 40 Noise level [dB (A)] 30 Reduces high-frequency range from 2000 to 20 Hz. 20 10 0 200 2000 20 Frequency [Hz] Suction flow Improved by up to approx. 20% Max. suction flow [L/min (ANR)] Nozzle size Exhaust type 40 80 Approx. 20% High-noise

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Nil Standard P Note 1) Axial piping Note 1) The combination of axial piping and both ends adjusters or retraction end adjusters is not available.

VFS

VVFS2000-30A-6 15 m VVZS3000-21A-6 15 m VVFS2000-30A-7 20 m VVZS3000-21A-7 30 m VVZS3000-21A-8 20 m Option Option Cable Color List of Each Terminal No.

Table of Contents - Tubing

roll Symbol 20 100 Tube O.D.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Bore size/Stroke (mm) 6 10, 20, 30, 40, 50 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Adjuster option Nil Without adjuster Functional option AS Extension end adjuster AT Retraction end adjuster Nil Standard A Both ends adjuster P Note) Axial piping CS Extension

5 Port Solenoid Valve SY Series

port Type 20 Bar stock type Individual wiring SY3 20 SY5 20 SY7 20 P. 37 Direct piping to the main unit of a valve.

CP95

10 145 12 15 160 28 55 9 75 52 28 36 11 4.5 163 161 36 12 10 72 90 55 50 45 25 12 155 12 15 170 32 68 9 80 60 32 45 12 5.5 175 170 45 12 10 90 110 70 40 50 12 5.5 190 185 50 63 50 25 12 170 16 20 190 40 80 9 90 70 16 10 100 120 80 50 63 14 6.5 215 210 63 80 63 30 16 190 16 20 210 50 100 12 110 90 16 12 126 153 100 60 100 120 75 35 16 205 14 20 140 25 230 110 60 20 75 16 6.5 230 220 71 14.5

CP95

10 145 12 15 160 28 55 9 75 52 55 28 36 11 4.5 163 161 36 12 10 72 90 50 45 25 12 155 12 15 170 32 68 9 80 60 70 32 45 12 5.5 175 170 45 12 10 90 110 40 50 12 5.5 190 185 50 63 50 25 12 170 16 20 190 40 80 9 90 70 80 16 10 100 120 50 63 14 6.5 215 210 63 80 63 30 16 190 16 20 210 50 100 12 110 90 100 16 12 126 153 60 100 120 75 35 16 205 14 20 140 25 230 110 60 120 20 75 16 6.5 230 220 71

MXF

20 MXF8-10 0.01 0.02 0.01 MXF8-10 0 0 0 10 20 30 40 10 20 30 10 20 30 40 Load (N) Load (N) Load (N) MXF12 Lr = 30 mm 0.10 0.08 0.08 MXF12-50 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.08 MXF12-50 0.06 0.06 MXF12-30 0.06 MXF12-30 MXF12-50 MXF12-20 MXF12-30 0.04 0.04 MXF12-20 0.04 MXF12-20 0.02 0.02 0.02 20 40 60 0 0 0 20 40 60 80 20 40 60

End Lock Cylinder Series CBG1

With front lockR (mm) Bore size (mm) W P WA WB WH 20 M5 x 0.8 16 15 (16) 23 30 25 M5 x 0.8 16 15 (16) 25 30 32 Rc1/8 16 15 (16) 28.5 25 40 Rc1/8 16 15 (16) 33 20 50 Rc1/4 18 17 (18) 40.5 20 63 Rc1/4 18 17 (18) 47.5 20 80 Rc3/8 22 22 60.5 20 100 Rc1/2 22 22 71 20 Dimensions inside ( ) are for long strokes.