MLU

Piston rod Standard stroke (mm) Locking direction Bore size (mm) Series 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 LOCK LOCK Load direction Fulcrum FREE 25 Extension lock 32 MLU Pivot 40 Retraction lock Clearance 50 9-13-2 9-13-3 3 Series MLU Specific Product Precautions 1 Be sure to read before handling. Selection Selection Warning Allowable Load Weight 1.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

MX MTS 0 10 20 30 40 50 60 70 80 90 100 110 120 130 140 150 160 170 180 190 MY With stroke adjuster for auto switches Stroke adjuster CY 10 Three types (rubber stopper, metal stopper, shock absorber) are available.

Precision Regulator

Supply pressure: 0.3 to 1.0 MPa Set pressure: 0.2 MPa Flow rate: 0 L/min (ANR) Supply pressure: 0.5 MPa IR1000-01 IR1000-01 IR1000-01 Back pressure: 0.5 MPa 0.5 0.204 0.2 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) Set pressure (MPa) 0.4 0.202 0.15 Set point 0.3 0.200 0.1 0.2 0.198 0.05 0.1 0.196 0 40 20 80 60 100 140 120 0 50 100 200 250 150 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8

Thermo-chiller/Rack Mount Type

Output 2 Output 3 HRR HRR Variations Model Cooling capacity [W] Heating capacity [W] (50/60 Hz) Cooling method Temperature stability Power supply Circulating fluid Option (pp. 32 to 35) Optional accessories (pp. 36 to 38) International standards (50/60 Hz) 950/1100 250/300 Air-cooled refrigeration Particle filter element for replacement Single-phase 200 to 230 VAC (50/60 Hz) HRR010

IR1000/2000/3000

250 150 Flow rate l/min (ANR) Relief flow rate l/min (ANR) Supply pressure P1 MPa IR1010-01 IR1010-01 IR1010-01 Conditions: Supply pressure 0.7MPa Conditions: Back pressure 0.7MPa 0.4 0.204 0.7 Set pressure P2 MPa 0.6 Set pressure MPa Set pressure MPa 0.202 0.3 0.5 Setting point 0.4 0.200 0.2 0.3 0.198 0.2 0.1 0.1 0.196 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 0 50 100 150 200 250 300 350 1.0

MNB

Upper limit of allowable value Solenoid valve for locking mounted on the unlocking port Maximum value of stopping position dispersion from 100 measurements Spring Lock Holding Power (Maximum Static Load) 32 40 50 63 80 100 Bore size (mm) 552 {56} 882 {90} 1370 {140} 2160 {220} 3430 {350} 5390 {550} Holding power N {kgf} 2 Series MNB Bracket Part Numbers Rod Boot 32 40 50 63 MNB-L 80 100 Bore

Plate Cylinder with Lock Series MLU

Foot type Flange type Knuckle joint Clevis type Flexible mounting: Possible to mount on all surfaces except for the one with ports Bottom mounting type Side mounting type Axial surface mounting Series Variations Standard stroke (mm) Locking direction Bore size (mm) Series 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 25 Extension lock 32 MLU 40 Retraction lock 50 Features 2

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Auto switch mounting on two sides Top Work piece Side Standard with air cushion and centralized piping Series Variations Shock absorber Stroke adjusting unit Slide table Maximum available stroke (mm) Order made Standard stroke (mm) Model Guide type Bore size (mm) 50 100 150 200 250 300 350 400 450 500 550 600 Intermediate strokes Long strokes Helical insert threads Holder mounting brackets

High Vacuum Angle Valve, XL Series

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

Compact

F MXZ12 MXZ16 160 100 OUT side IN side OUT side IN side 140 0.7/ 80 0.7/ Supply pressure [MPa] Supply pressure [MPa] 120 Pressing force [N] Pressing force [N] 100 0.5/0.67 60 0.5/0.67 80 40 0.3/0.4 0.3/0.4 60 40 20 20 0 0 0 20 40 60 80 0 10 20 30 40 Allowable overhang L [mm] Allowable overhang L [mm] MXZ25 MXZ20 400 250 OUT side IN side OUT side IN side 350 0.7/ 0.7/ 200 Supply pressure [

XL

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

MXS

piping S: Stroke (mm) End lock Buffer Extension adjuster Retraction adjuster 20 30 40 50 75 100 125 150 10 MXS 6 MXS 8 MXS12 MXS16 MXS20 MXS25 100 115 155 180 80 10 5 30 13+0.15S 160 190 235 285 150 35 15 45 9 40 40 415 26+0.17S 340 340 400 500 340 50 30 60 20 80 90 930 690 43+0.21S 600 610 670 800 600 80 50 105 30 120 160 1800 1450 1150 55+0.21S 1020 1050 1150 1300 1000 170 100 205 71 140

AC

Model Port size A B C D M P N E F G H J K L B B 126.5 8, 1 4 1 23 26 26 33 36 140 181 181 238 253 103.5 140 150 184.5 189.5 40 53 53 70 70 56.8 60.8 60.8 65.5 69.5 30 41 41 50 50 17 25 35 37.5 40.5 50 64 64 84 89 24 35 35 40 40 5.5 7 7 9 9 8.5 11 11 13 13 22 34.2 34.2 42.2 46.2 50 70.5 70.5 88 88 5 7 7 7 7 AC2030 AC2530 AC3030 AC4030 AC4030-06 4, 1 8 3 4, 1 8 3 181 191 225.5 230.5 4, 1 8,

PF3W7x.eng

Excessive instantaneous flow The applied flow rate is above approx. 140% of maximum rated flow. Reset applied flow to a level within the display range. [F 2] Installation Use the product within the specified operating pressure and temperature range. Proof pressure could vary according to the fluid temperature.

MGP

General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part1:General requirements) ISO 10218-1992: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -(1:) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.2 MGP series 113) 3) 1 1 () 4 2 T (d=) 2 T 2 2 RSQ 400mm (mm) 3 1mm MGPM MGPL (mm) MGPS (mm) (mm) 10% 25% 140%

Air Cylinder NCQ7 Series Compact Cylinder

Ambient temperature 50-140'F (10.60'C) . Proiection structure lEC529 spec.lP67, waierproot (JlSC0920), oilproof . Sutfix L for the model with a 3lhlong lead wire. (Exampl6) D-A731 Solid. State Sutitch Specifieatians I Ro;il Mounted.

-- NCM seies

o 0.62 322 1.28 14 oaa {4) 250 u-24 0.50 .621 .621 0.25 0.93 0.38 1t-1E .251 .250 0.75 0.25 0.34 0.75 o.75 o.1a cts16 0.75 120 o.62 3.19 3.8:t 343 t06 {17-l _312 6t-21 0.50 .621 .621 0.38 1 . 1 2 0.38 5t-i E .25r .250 0.75 0.25 o.3a 3.97 o.8a o_aao.24 qi-14 o.75 1.30 0.62 334 1.25 125 t 2 5 t 1 k ) 375 \-24 o.aE .749 .749 o.11 r.32 0.50 .251 o.25 0.41 rt.4 1.06 r.06 0.25 sa-l6 0.46 r.62 0.78

asilltr

Ambient temperature 50-140'F (10.60'C) . Proiection structure lEC529 spec.lP67, waierproot (JlSC0920), oilproof . Sutfix L for the model with a 3lhlong lead wire. (Exampl6) D-A731 Solid. State Sutitch Specifieatians I Ro;il Mounted.

Table of Contents

) 70 (71) 100 110 95 22 48 4 17 29 14 38 62 (63) 124 (139) 36 1/8 140 (155) 70 (71) 100 140 125 22 48 4 23.5 29 14 38 62 (63) 124 (139) 42.5 1/8 11-4-6 72 Series CRB1 Rotary Actuator Vane Style Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type except for standard shaft type (W).

Rubber seal 5 Port Solenoid Valve Series SYJ7000

): SYJ7 20-L-01 3 4 5 M plug connector (M): SYJ7 20-M-01 3 4 5 DIN terminal (D): SYJ7 20-D-01 3 4 5 M8 connector (W0): SYJ7 20-W0-01 3 4 5 Approx. 300 (Lead wire length) 65 57.5 31.5 [38.5] Max. 10 16.1 46.2 M8 x 1 36 31.1 18.5 42.6 [49.6] Approx. 300 (Lead wire length) 64.4 [66.6] 54.6 [56.8] 74.4 73.5 63.5 56.1 69.1 49.6 62.6 46.6 33.6 141.8 [146.2] 122.2 [126.6] 35 35 35 35 161.8 160 140