Rotary Actuator

[mm] Size Note 1) Port size A B C D (g6) DD (h9) F H J K With auto switch Without auto switch U W BA BB BC S SB SC SD SE S 50 Rc1/8 62 48 46 15 25 2.5 36 M8 x 1.25 depth 8 5 156 (189) 1.5 5 14.5 33 144 (177) 98 17 17 8.5 6 63 Rc1/8 76 60 57 17 30 2.5 41 M10 x 1.5 depth 12 5 175 (213.5) 1.5 5 21.5 33 163 (201.5) 117 19.5 20 10 7 80 Rc1/4 92 72 70 20 35 3 50 M12 x 1.75 depth 13 5 199 (243)

CM2

46 41 77 25 37.5 50 75 100 125 90 102 115 140 165 12.5 54 67 79 92 117 142 167 190 With Rod Boot With Air Cushion Built-in One-touch Fittings Symbol Q P N1 WB G ZZ Bore size (mm) WA Bore size (mm) Stroke Bore size (mm) 20 20 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 21.5 6 8.5 8 13 17.5 20 25 25 158 171 183 196 221 246 271 24.5 6 10.5 8 13 17.5 25 32 32 162 175

Metal Seal/Rubber Seal Series VQ Body Ported

185.5 6 97.5 117.5 175 185.5 5 87 107 162.5 173 4 76.5 96.5 150 60.5 3 66 86 137.5 148 2 55.5 75.5 125 135.5 L1 L2 L3 L4 34.5 54.5 112.5 123 Dimensions: Side Entry Connector [-PS] n L 1 137.5 148 16 15 287.5 298 14 275 285.5 13 262.5 273 12 262.5 273 10 237.5 248 11 250 260.5 9 225 235.5 8 212.5 223 7 200 210.5 6 200 210.5 5 187.5 198 3 162.5 173 2 150 160.5 4 175 185.5 L3 L4 137.5 148 How

One-touch Fittings

Nipple/Plug etc. 175 B Metric Size One-touch Fittings KQ2 Series Applicable Tubing: Metric Size, Connection Thread: R, Rc Dimensions Round Type Male Connector: KQ2H (Face seal) Connection thread R Model H (Width across flats) D L A M Effective area [mm2] Min. port size Applicable tubing O.D.

Base Mounted Metal Seal/Rubber Seal Series VQ

185.5 110.9 119.9 175 185.5 121.6 130.6 187.5 198 132.3 141.3 200 210.5 143 152 212.5 223 153.7 162.7 225 235.5 164.4 173.4 237.5 248 175.1 184.1 250 260.5 185.8 194.8 250 260.5 196.5 205.5 262.5 273 207.2 216.2 275 285.5 Dimensions: Side Entry Connector [-FS] n 1 2 3 4 5 6 7 8 9 12 13 14 15 16 10 11 L L3 L4 137.5 148 150 160.5 150 160.5 162.5 173 175 185.5 187.5 198 200 210.5 212.5 223

0.4

.: 3.2 : 4 : 6 Thread size: M5 11.5 58.1 Dimensions Formula: L1 = 11.5n + 120.5 n: Stations (Maximum 16 stations) L n 1 132 162.5 173 2 143.5 175 185.5 3 155 175 185.5 4 166.5 187.5 198 5 178 200 210.5 6 189.5 212.5 223 7 201 225 235.5 8 212.5 237.5 248 9 224 250 260.5 10 235.5 262.5 273 11 247 275 285.5 12 258.5 287.5 298 13 270 300 310.5 14 281.5 312.5 323 15 293 312.5 323 16 304.5 325

LJ1H

Refer to page 100 for part numbers. 69 70 Non-standard Motor High Rigidity Direct Acting Guide Series LJ1H10 Motor Output Rolled Ball Screw 100W 12mm/8mm lead Vertical Mount How to Order Stroke 2 LJ1H10 F K W X10 G NH 1 Cable entry direction Top entry Motor specification Power supply voltage Cable entry direction Switch Left entry Matsushita Electric Industrial Co., Ltd.

MXQ

12 16 20 25 6 mm 8 mm 12 mm 16 mm 20 mm 25 mm 8-5-10 11 Air Slide Table Series MXQ Shock Absorber Specifications Table Accuracy RB0805 RB0806 RB1007 RB1411 RB1412 Shock absorber model MXQ8 MXQ12 MXQ16 MXQ20 MXQ25 Applicable slide table B C Radial clearance 19.6 14.7 5.88 0.98 2.94 Max. energy absorption (J) 12 11 7 5 6 Stroke absorption (mm) 50 to 500 Max. collision speed (mm/s) M 45 45 70

90

10 20 30 40 50 60 70 80 90 100 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Supply pressure [MPa] 100 Suction flow (Port exhaust) Vacuum pressure [kPa] Vacuum pressure [kPa] 80 Vacuum pressure Suction flow (Silencer exhaust) 60 Air consumption 40 20 Port exhaust Silencer exhaust 0 0 20 40 60 80 Suction flow [L/min (ANR)] ZK215 Flow-rate Characteristics Exhaust Characteristics

Vacuum Unit

Ejector Exhaust Characteristics/Flow Rate Characteristics (Representative value) ZK212 Exhaust Characteristics Flow Rate Characteristics 100 100 100 Vacuum pressure [kPa] 80 Suction flow (Port exhaust) 90 90 60 80 80 40 Vacuum pressure 70 70 Port exhaust 20 Suction flow [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow [L/min (ANR)] Air consumption [L/min (ANR)] Silencer exhaust/Complex

SQ1000/2000

Rubber seal 9.0 SQ2430 (0.65) 44 or less 34 or less 180 Metal seal 11.7 Exhaust center SQ2431 (0.7) 44 or less 34 or less 175 Rubber seal 12.6 SQ2530 (0.45) 44 or less 34 or less 180 Metal seal 8.1 Pressure center SQ2531 (0.5) 44 or less 34 or less 175 Rubber seal 9.0 Dual 3 port valve A B C SQ2 31 Rubber seal (0.5) 44 or less 34 or less 155 9.0 Note 1) Values for the top ported cylinder

VFS

2 Detent assembly VF4000-12A Refer to How to Order Pilot Valve Assembly on page 3-8-70. Pilot valve assembly !

Table of Contents - Tubing

I.D. 427 TU0425-100-X3 TU0604-100-X3 TU0805-100-X3 TU1065-100-X3 TU1208-100-X3 4 6 8 10 12 2.5 4 5 6.5 8 285 Max. operating pressure 142 0 4 32 70 105 140 10Clean Series Operating temperature F Only available in 20m rolls.

2-Color Display Digital Flow Switch Series PFM

/min 30% 70% 40% 60% 8% 92% 1.0 to 52.5 l/min 1.0 to 50.0 l/min 20.0 mA 5.00 V 0 to 52.5 l/min 10% 90% PFM750 20% 80% 1.0 to 42.0 l/min 1.0 to 40.0 l/min 16.8 mA 4.20 V 0 to 42.0 l/min 30% 70% 40% 60% 8% 92% 2 to 105 l/min 2 to 100 l/min 20.0 mA 5.00 V 0 to 105 l/min 10% 90% PFM711 2 to 95 l/min 2 to 90 l/min 18.4 mA 4.60 V 0 to 95 l/min 20% 80% 30% 70% 2 to 84 l/min 2 to 80 l/min 16.8 mA

Air Slide Table Series MXQ

Lr=40 mm MXQ6-30 0.03 0.015 0.05 MXQ6-10 MXQ6-20 MXQ6-30 MXQ6-50 MXQ6-40 MXQ6-10 MXQ6-20 MXQ6-30 MXQ6-50 MXQ6-40 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXQ6-30 MXQ6-50 MXQ6-50 0.04 MXQ6-20 0.02 0.010 MXQ6-20 MXQ6-40 0.03 MXQ6-40 0.02 MXQ6-10 0.01 0.005 MXQ6-10 0.01 0 0 10 20 30 40 80 120 0 10 20 30 Load (N) Load (N) Load (N) 8 8 8 Lr=70

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

100 300 500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

ZP

Thin Flat/Thin Flat with Ribs Deep A B Y Model Model A B C D E F Y G H G H I: M5 x 0.8 I: M6 x 1 ZPR10UT 10 11 1 ZPR10D 10 16 12 18 16 25 33.9 50 71 76 7 15 24 32.9 49 20 25 70 75 6 ZPR16D ZPR13UT 13 14 1.5 ZPR16UT 16 17 Applicable Tubing ZPR10CT 10 11 0.8 Applicable tubing O.D.

Compact Hydraulic Cylinder Series CH
KGB

CHKGB Bore size Rod end thread type Auto switch Quantity XC63 Stroke Intermediate stroke Applicable tube For 75mm stroke For 100mm stroke Strokes 55, 60, 65, 70 80, 85, 90, 95 Dimensions CHKGB--XC63 B A 55, 60, 65, 70 80, 85, 90, 95 Stroke Bore size (mm) A B A B 32 141 131 40 150 140 175 165 50 156 145 181 170 63 165 152 190 177 80 180 163 205 188 100 207 181 232 206 Note) Dimensions other

CP95

170 45 12 10 90 110 70 40 50 12 5.5 190 185 50 63 50 25 12 170 16 20 190 40 80 9 90 70 16 10 100 120 80 50 63 14 6.5 215 210 63 80 63 30 16 190 16 20 210 50 100 12 110 90 16 12 126 153 100 60 100 120 75 35 16 205 14 20 140 25 230 110 60 20 75 16 6.5 230 220 71 14.5 150 178 120 6-13-18 18 18 Series CP95 ISO/VDMA Cylinder: Non rotating Type Double Acting w/ End of Stroke Cushioning Minimum

CP95

32 45 12 5.5 175 170 45 12 10 90 110 40 50 12 5.5 190 185 50 63 50 25 12 170 16 20 190 40 80 9 90 70 80 16 10 100 120 50 63 14 6.5 215 210 63 80 63 30 16 190 16 20 210 50 100 12 110 90 100 16 12 126 153 60 100 120 75 35 16 205 14 20 140 25 230 110 60 120 20 75 16 6.5 230 220 71 14.5 150 178 6-13-10 10 Series CP95 ISO/VDMA Cylinder: Standard Type Double Acting w/ End of Stroke Cushioning