Slider Type Ball Screw Drive/11-LEFS Series

Horizontal Vertical LC3F2 20 20 Duty ratio: 50% Duty ratio: 50% Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] 17500 17500 Duty ratio: 75% Duty ratio: 75% 15000 15000 Duty ratio: 100% Duty ratio: 100% 12500 12500 10 10 7500 7500 5000 5000 2500 2500 0 0 0 10 20 30 40 0 5 10 15 20 Work load [kg] Work load [kg] 49 LEFS Series AC Servo Motor Clean Room Specication Work LoadAcceleration

LJ1H

1 Single Axis Electric Actuator High Rigidity Direct Acting Guide Series LJ1H Series LJ1H LJ1 LG1 LC1 LX LC6D/LC6C Switches Lead screw lead mm Mounting orientation Series Page Model Motor type Guide type Ground ball screw Rolled ball screw Slide screw 12 10 20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

M14 x 1.5 30 17 66 50 11 52 176 10 53 88.5 M16 x 1.5 25 9 73 73 53 20 50 28 17 17 M10 x 1.5 20 12 22 30 19 73 63 11 55 194 10 60 95 M18 x 1.5 28 8 80 80 60 22.4 55 30 17 17 M10 x 1.5 22 12 25 30 21 80 80 13 65 212 12 75 115 M22 x 1.5 32 8 100 100 75 28 65 32 22 20 M12 x 1.75 26 14 29 35 26 90 100 13 80 234 14 90 139 M27 x 2 38 6.5 118 118 90 35.5 80 35 27 19 M12 x 1.75 27 14 34 35 34 100

Programless controller Step motor (servo 24 VDC)

Refer to the table below for the speed and the acceleration LEP6J LEP6K LEP10 (L)J LEP10 (L)K Speed [mm/s] Acceleration Speed Acceleration Speed [mm/s] Acceleration Speed Acceleration [mm/s2] [mm/s] [mm/s2] [mm/s2] [mm/s] [mm/s2] 0 20 200 10 200 20 200 10 200 1 30 300 15 300 30 300 15 300 2 40 400 20 400 40 400 20 400 3 50 500 30 500 50 500 30 500 4 60 600 40 600 75 600 40 600 5 70 700 50

Cylinder with Lock Series MNB

40 20 14 15.5 19 to 600 32 75 18 104.5 58.5 63 1/4 12 45 17.5 35 27 11 75 134.5 56.5 14 20 40 20 14 16.5 23 to 600 32 90 18 119.5 68 80 1/4 18 45 22 40 32 13 95 169 72 22 30 60 25 20 19 33 to 750 37 102 22 150 81 100 1/4 20 55 25 40 41 16 114 189 89 22 30 60 30 20 19 37.5 to 750 37 116 26 170 96 Bore size (mm) N S U V T P J MM GR GE GF K L Q RR H VA W Z ZZ 32 27 154 13 6.5 34 1/8 10.5 M6

smcmaintenancepartslist

75, 100 Fiber 65 x L250 1, 5, 10, 20 5, 10, 20, 40 74, 105 65 x L250 Micromesh Refer to pages 256 and 257 for the replacement element type.

Low Profile Slide Table Series MXF

Number of auto switches Bore size/ Stroke (mm) Nil S n 2 pcs. 1 pc. n pcs. 8 12 16 20 10, 20, 30 20, 30, 50 30, 50, 75 30, 50, 75, 100 Auto switch Nil Without auto switch (Built-in magnet) For the applicable auto switch model, refer to the table below.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

(For details, refer to pages 20 and 21.)

Aluminum High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

Modular F.R.L. Units

40 20 30 27 22 5.4 8.4 40 2.3 28 104.9 AFM30-A/AFD30-A 1/4, 3/8 53 115.1 14 26.7 30 50 26.7 41 35 23 6.5 13 53 2.3 30 156.8 AFM40-A/AFD40-A 1/4, 3/8, 1/2 70 147.1 18 35.5 38.4 75 35.5 50 52 26 8.5 12.5 70 2.3 35 186.9 AFM40-06-A/AFD40-06-A 3/4 75 149.1 20 35.5 38.4 75 35.5 50 52 25 8.5 12.5 70 2.3 34 188.9 Model Semi-standard specifications With barb fitting With drain guide Metal bowl

CY1

CY1L15, 20, 25, 32, 40 (mm) A B d C D FA FB G H HG HI J JK L EA EB GP HA HB HO HP HS HT LD Model CY1L15 CY1L20 CY1L25 CY1L32 CY1L40 7.5 9.5 12 5 16.6 3 6 6.5 40 16 14 M6 x 1.0 9.5 75 6 13 65 6.5 4 38 39 25 16 5.6 9.5 9.5 16 5.2 21.6 8.5 46 18 16 M6 x 1.0 10 86 80 9 10 44 45 31 20 5.6 9.5 11 16 6.5 26.4 4 7 8.5 54 23 21 M8 x 1.25 10 86 8 14 90 9 18 52 53 39 20 7 10.5 14 20 8 33.6 5 7 9.5

Electric Actuator

35% to 85% 5 to 20 60% to 95% Lead 16: LEY32A 112 Force [lbf] 21 to 50 60% to 85% 21 to 50 80% to 95% 90 1 to 4 20% to 65% 1 to 4 40% to 95% 67.4 LEY25lA LEY25l 5 to 20 35% to 65% 5 to 20 60% to 95% 45 21 to 35 50% to 65% 21 to 35 80% to 95% 22.5 1 to 4 20% to 85% 030 40 50 60 70 80 90 LEY32l 5 to 20 35% to 85% Set value of pushing force [%] 21 to 30 60% to 85% Max. 85% Note) For the vertical

39

, 75 , 90 , 105 A photograph shows handle unit L.

Guide Cylinder Series MGG

Excellent wear resistance and heavy load capacity Ball bushing High precision and smooth operation Long strokes available 100 up to 1300mm max. 80 up to 1200mm max. 63 up to 1100mm max. 50 up to 1000mm max. 40 up to 800mm max. 32 up to 600mm max. 25 up to 500mm max. 20 up to 400mm max. 20: 75 to 200mm 25 to 100: 75 to 300mm Simple adjustment of extension stroke The extension stroke can be

0.4

This allows for viable connections to take place without necessarily specifying whether the manifold station is double, single, or mixed wiring. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring Dual 3-port valves, 4 positions VQC1000/2000 (Rubber seal only) Model A side B side JIS symbol Two

5 Port Solenoid Valve

mmm J kit: PC wiring compatible flat ribbon cable 325 20 Max. 16 stations T kit:Terminal block box 660 20 Max. 20 stations 455 Note 4) L kit: Lead wire 20 Max. 24 stations M kit: Circular connector 390 20 Max. 24 stations M5 thread C2 (2) C3 (3.2) C4 (4) N1 (1/8") N3 (5/32") C kit: Connector 115 20 Max. 20 stations SS0755-mCmC (Manifold pitch: 8.5) Rc1/8 S kit: Serial transmission (EX510)

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

(Different surfaces) 25 20 1 pc. 25 20 2 pcs. (Same surface) 70 75 D-Y7BAL 2 pcs.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(different sides) 20 20 Hysteresis specifications are given as a guide, it is not a guaranteed range. (Tolerance 30%) Hysteresis may fluctuate due to the operating environment. 2 pcs. (same side) 65 60 D-Y59/Y69/Y7P/Y7PV 1 or 2 pcs. (different sides) 20 20 2 pcs. (same side) 65 70 Solid state switch D-Y7W/Y7WV 20 25 1 or 2 pcs. (different sides) 75 70 2 pcs.

Hydraulic Cylinders

Standard Strokes Bore sizes (mm) Standard strokes (mm) 20, 25 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 32 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75 40, 50, 63, 80, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Made to Order Hydraulic Fluid Compatibility Manufacture of Intermediate Stroke Cylinders Pages 10 to 12 Intermediate strokes in 5mm increments can be manufactured by installing spacers

High Power Cylinder Series RHC

Stroke ZZ + Stroke (mm) Bore size (mm) Stroke range (mm) 50 H1 I 11 JC 58 K 75 LD 7 H 11 GA 80 FA 16 EA 23 D 62 C 20 B 53 A 70 E 0 Effective thread length 32 250 to 1000 35 50 0.042 0 250 to 1000 11 72 75 7 11 80 16 23 58 20 60 80 35 32 63 55 0.074 0 250 to 1000 13 89 78 10 13 90 20 23 61 25 75 95 40 37 80 65 0.074 0 250 to 1000 16 110 80 10 13 95 20 25 63 30 90 116 40 37 100 80 0.074 Bore