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SpeedWork Load Graph (Guide) for Step Motor (Servo/24 VDC) LECP6, LECP1, LECPMJ Horizontal Vertical LEY25m LEY25m for acceleration/deceleration: 2000 mm/s2 80 35 Lead 3: LEY25C 70 30 Lead 3: LEY25C Horizontal work load [kg] 29 Vertical work load [kg] 50 55 60 Lead 6: LEY25B 20 40 Lead 6: LEY25B 15 Lead 12: LEY25A 30 10 20 7 10 Lead 12: LEY25A 0 0 0 300 200 400 100 500 600 0 300 200 400 100

60 3.5 2.8 2.3 1.9 1.6 1.4 1.3 70 4.4 3.8 3.2 2.8 2.3 2 1.8 80 6.5 5.2 4.2 3.6 3.1 2.7 2.4 90 8.5 6.8 5.5 4.7 4 3.5 3.1 100 11.4 8.6 7 5.8 5 4.4 3.9 110 14.2 11.2 8.8 7.2 6.2 5.4 4.9 1" ID 30 0.2 0.2 0.1 0.1 0.1 0.1 0.1 40 0.3 0.3 0.2 0.2 0.2 0.2 0.2 50 0.5 0.4 0.4 0.3 0.3 0.2 0.2 60 0.8 0.6 0.5 0.5 0.4 0.4 0.3 70 1.1 0.8 0.7 0.7 0.6 0.5 0.4 80 1.5 1.2 1 0.8 0.7 0.6 0.5 90 2 1 1.3 1.1 0.9

60 3.5 2.8 2.3 1.9 1.6 1.4 1.3 70 4.4 3.8 3.2 2.8 2.3 2 1.8 80 6.5 5.2 4.2 3.6 3.1 2.7 2.4 90 8.5 6.8 5.5 4.7 4 3.5 3.1 100 11.4 8.6 7 5.8 5 4.4 3.9 110 14.2 11.2 8.8 7.2 6.2 5.4 4.9 1" ID 30 0.2 0.2 0.1 0.1 0.1 0.1 0.1 40 0.3 0.3 0.2 0.2 0.2 0.2 0.2 50 0.5 0.4 0.4 0.3 0.3 0.2 0.2 60 0.8 0.6 0.5 0.5 0.4 0.4 0.3 70 1.1 0.8 0.7 0.7 0.6 0.5 0.4 80 1.5 1.2 1 0.8 0.7 0.6 0.5 90 2 1 1.3 1.1 0.9

M8 x 85 l x 90 l x 95 l x 100 l x 105 l x 110 l x 115 l x 120 l x 125 l x 135 l x 155 l x 175 l 85 90 95 100 105 110 115 120 125 135 155 175 C(D)55B100-10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 M4 x 50 l x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l M6 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l 50 55 60 65 70 75 80

107 22 45 90 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 26 (26.5) 66.5 (73.5) 48 64.5 62 62 50.5 103 64.5 70 111.5 30 50 94 41 13.5 17 36 25 23 M5 8 1/2 26 (26.5) 70 (77) 48 68 62 65.5 50.5 103 68 70 119 35 60 102 41 17.5 17 36 30 28.2 M5 8 3/4 Note) ( ) indicates class H. 336 Series VCL Direct Operated 2 Port Solenoid Valve For Oil How to Order Manifold How to Order Manifold Assembly Enter

52 65 77 90 115 140 165 36 18.2 40 77 90 102 115 140 165 190 12.5 25 37.5 50 75 100 125 54 67 79 92 117 142 167 46 20.2 Built-in One-touch fitting With rod boot With air cushion (mm) Symbol Bore ZZ Bore WA G N1 WB P Q Stroke 1 to 50 17.5 13 8 8.5 6 23 20 20 Bore 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 158 171 183 196 221 246 17.5 13 8 10.5 6 26 25 25 25 162 175

C6: One-touch fitting for 6 M5: M5 thread (7.5) 18 DIN rail clamp screw 0.5 U side n 5 Manual override V100 A SMC SMC SMC SMC 4 (L4) (L3) L1 2 L2 SY A 3 2 A SYJ 2 P = 16 2 A 1 VK 2 19 Stations VZ 5.5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D side 0.7 17 70

185.5 9 155 166 187.5 198 10 171 182 212.5 223 11 187 198 225 235.5 4 75 86 112.5 123 5 91 102 125 135.5 6 107 118 137.5 148 3 59 70 100 110.5 L1 L2 L3 L4 2.10-15 VQZ100/200/300 Body Ported VQZ300 VV3QZ32C Station C10: One-touch fittings for 10 C8: One-touch fittings for 8 C6: One-touch fittings for 6 n-C6, C8, C10, 02 (35) 33 (11) 2-4.5Mounting holes DIN rail clamp screw (5.5) Grommet (

Cover diameter 1.5 51.5(52.5) 300 (Lead wire) Cross section 0.23mm2 55.5(59) Indicator light Indicator light Cover dia 1.5 Cross section 0.23mm2 45(46) : AC : AC 2.10-28 VQZ100/200/300 Base Mounted Dimensions: VQZ200 Valve single unit Grommet (G): VQZ2l5(R)-lGl01 02 2-4.5 Mounting holes 4 32 19.2 Manual override Cover dia 1.6 Cross section 0.34mm2 R4 4 A 2 34 SY 15 SMC 3 R 1 P SYJ 40 300 70

Current consumption 70 mA or less Enclosure IP67 (Manifold assembly) Standards CE Marking, UL (CSA), RoHS compliant Weight 290 g Note 1) M12 (4-pin) connector can be connected. Note 2) When input signal exceeds 22 mA, the protection function activates and the input signal is interrupted.

D OUT OUT IN E 2 x A (Port size) F SMC J C H 4 x K Bracket mounting thread A C D E F G H J K Model AF30-02 to 03-X2230 AF40-02 to 04-X2230 AF40-06-X2230 AF50-06 to 10-X2230 AF60-10-X2230 57 118 Rc 1/4, 3/8 Rc 1/4, 3/8, 1/2 Rc 3/4 Rc 3/4, 1 Rc 1 M4 x 0.7 x 0.5 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 44 35 53 14 53 258 245 169 165 78 73 60 60 63 59 47 47 73 73 95 90 70 70 24 24 20 18 95 90 75 70 1056

[mm] Size Note 1) Port size A B C D (g6) DD (h9) F H J K With auto switch Without auto switch U W BA BB BC S SB SC SD SE S 50 Rc1/8 62 48 46 15 25 2.5 36 M8 x 1.25 depth 8 5 156 (189) 1.5 5 14.5 33 144 (177) 98 17 17 8.5 6 63 Rc1/8 76 60 57 17 30 2.5 41 M10 x 1.5 depth 12 5 175 (213.5) 1.5 5 21.5 33 163 (201.5) 117 19.5 20 10 7 80 Rc1/4 92 72 70 20 35 3 50 M12 x 1.75 depth 13 5 199 (243)

46 41 77 25 37.5 50 75 100 125 90 102 115 140 165 12.5 54 67 79 92 117 142 167 190 With Rod Boot With Air Cushion Built-in One-touch Fittings Symbol Q P N1 WB G ZZ Bore size (mm) WA Bore size (mm) Stroke Bore size (mm) 20 20 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 21.5 6 8.5 8 13 17.5 20 25 25 158 171 183 196 221 246 271 24.5 6 10.5 8 13 17.5 25 32 32 162 175

185.5 6 97.5 117.5 175 185.5 5 87 107 162.5 173 4 76.5 96.5 150 60.5 3 66 86 137.5 148 2 55.5 75.5 125 135.5 L1 L2 L3 L4 34.5 54.5 112.5 123 Dimensions: Side Entry Connector [-PS] n L 1 137.5 148 16 15 287.5 298 14 275 285.5 13 262.5 273 12 262.5 273 10 237.5 248 11 250 260.5 9 225 235.5 8 212.5 223 7 200 210.5 6 200 210.5 5 187.5 198 3 162.5 173 2 150 160.5 4 175 185.5 L3 L4 137.5 148 How

Nipple/Plug etc. 175 B Metric Size One-touch Fittings KQ2 Series Applicable Tubing: Metric Size, Connection Thread: R, Rc Dimensions Round Type Male Connector: KQ2H (Face seal) Connection thread R Model H (Width across flats) D L A M Effective area [mm2] Min. port size Applicable tubing O.D.

185.5 110.9 119.9 175 185.5 121.6 130.6 187.5 198 132.3 141.3 200 210.5 143 152 212.5 223 153.7 162.7 225 235.5 164.4 173.4 237.5 248 175.1 184.1 250 260.5 185.8 194.8 250 260.5 196.5 205.5 262.5 273 207.2 216.2 275 285.5 Dimensions: Side Entry Connector [-FS] n 1 2 3 4 5 6 7 8 9 12 13 14 15 16 10 11 L L3 L4 137.5 148 150 160.5 150 160.5 162.5 173 175 185.5 187.5 198 200 210.5 212.5 223

.: 3.2 : 4 : 6 Thread size: M5 11.5 58.1 Dimensions Formula: L1 = 11.5n + 120.5 n: Stations (Maximum 16 stations) L n 1 132 162.5 173 2 143.5 175 185.5 3 155 175 185.5 4 166.5 187.5 198 5 178 200 210.5 6 189.5 212.5 223 7 201 225 235.5 8 212.5 237.5 248 9 224 250 260.5 10 235.5 262.5 273 11 247 275 285.5 12 258.5 287.5 298 13 270 300 310.5 14 281.5 312.5 323 15 293 312.5 323 16 304.5 325

Refer to page 100 for part numbers. 69 70 Non-standard Motor High Rigidity Direct Acting Guide Series LJ1H10 Motor Output Rolled Ball Screw 100W 12mm/8mm lead Vertical Mount How to Order Stroke 2 LJ1H10 F K W X10 G NH 1 Cable entry direction Top entry Motor specification Power supply voltage Cable entry direction Switch Left entry Matsushita Electric Industrial Co., Ltd.

12 16 20 25 6 mm 8 mm 12 mm 16 mm 20 mm 25 mm 8-5-10 11 Air Slide Table Series MXQ Shock Absorber Specifications Table Accuracy RB0805 RB0806 RB1007 RB1411 RB1412 Shock absorber model MXQ8 MXQ12 MXQ16 MXQ20 MXQ25 Applicable slide table B C Radial clearance 19.6 14.7 5.88 0.98 2.94 Max. energy absorption (J) 12 11 7 5 6 Stroke absorption (mm) 50 to 500 Max. collision speed (mm/s) M 45 45 70

10 20 30 40 50 60 70 80 90 100 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Supply pressure [MPa] 100 Suction flow (Port exhaust) Vacuum pressure [kPa] Vacuum pressure [kPa] 80 Vacuum pressure Suction flow (Silencer exhaust) 60 Air consumption 40 20 Port exhaust Silencer exhaust 0 0 20 40 60 80 Suction flow [L/min (ANR)] ZK215 Flow-rate Characteristics Exhaust Characteristics