Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) H0 5 to 150C H4 With 100C heater H5 With 120C heater Hightemperature type * Size 16 is not applicable to H4, H5.

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) Nil XL H0 Solid state auto switch y Number of auto switches/Detecting position XLQ Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

Mechanically Jointed Rodless Cylinders

Indicator light Load voltage Pre-wired connector Applicable load Auto switch model Lead wire length (m) Electrical entry Solid state switch Type Reed switch Wiring (Output) Special function Perpendicular In-line 0.5 (Nil) 5 (Z) 1 (M) 3 (L) DC AC M9N M9P M9B M9NW M9PW M9BW M9NV M9PV M9BV M9NWV M9PWV M9BWV 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire IC circuit 5 V, 12

Wedge Cam Operation Slide Guide Series MHK2 Air Gripper/2-Finger Type ø12, ø16, ø20, ø25

(Body tapped) (Body tapped) MHR Lateral mounting MHK MHS MHC MHT (Body tapped) (Body through-hole) Interchangeable with Series MHQG2 MHY Series Variations MHW Model Option Bore size (mm) Opening/Closing stroke (mm) Finger option Carbon steel (Standard), Stainless steel Dust cover option Chloroprene rubber (Standard) Fluororubber Silicon rubber Auto switch Solid state switch D-M9N(V), D-M9P

Compact Rotary Actuator

setscrew (with urethane damper) as setscrew. 6-3 Auto switch set position B Port A Port Fig.12 Set screw Auto switch Operation range at optimum set position (Lm/2) Most sensitive position Auto switch operating range Lm Fig.13 Table 10 Reed auto switch Solid state auto switch Size Rotation A B Operation Hysteresis angle A B Operation Hysteresis angle m angle m angle 90 15 21.5 19 25.5 10 75

Rotary Table

Load voltage Auto switch model Lead wire length (m) Indicator Electrical Wiring Pre-wire Type light Special function connector Applicable load DC AC Perpendicular In-line 0.5 1 3 5 entry (Output) (Nil) (M) (L) (Z) M9NV M9N 3-wire(NPN) F8N IC 5V, 12V circuit M9PV M9P 3-wire(PNP) Solid state auto switch F8P M9BV M9B 2-wire 12V F8B Relay, Grommet Yes 24V PLC 3-wire(NPN) M9NWV M9NW IC 5V,

Low-Speed Rotary Actuator

Operation range at optimum set position (Lm/2) Most sensitive position Auto switch operating range Lm Fig.11 Table 9 Reed auto switch Solid state auto switch Size Rotation A B Operation angle A B Operation Hysteresis Hysteresis angle m angle m angle 10 90 15 21.5 63 12 19 25.5 75 3 180 18 31 22 35 15 90 18.5 27 52 9 22.5 31 69 3 180 22.5 39.5 26.5 43.5 20 90 36 48.5 41 9 40 52.5 56 4 180

10

Load voltage Auto switch model Lead wire length [m]1 Pre-wired connector Applicable load DC AC Perpendicular In-line 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Indicator light Wiring (Output) Type Special function Electrical entry M9NV M9N V V V v v IC circuit 3-wire (NPN) 5 V, 12 V 3-wire (PNP) M9PV M9P V V V v v Solid state auto switch 2-wire 12 V M9BV M9B V V V v v 3-wire (NPN) 5 V, 12 V M9NWV M9NW

240

Auto switch model Lead wire length (m) Load voltage Wiring (Output) Pre-wired connector Applicable load DC AC Indicator light Electrical entry Type Special function Perpendicular In-line 0.5 (Nil) 5 (Z) 1 (M) 3 (L) 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV1 M9N M9P M9B M9NW M9PW M9BW M9NA1 M9PA1

CU 6 6 Built-in magnet Bore size 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Port thread type Symbol Nil TN TF Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Bore size ø6, ø10, ø16, ø20, ø25 ø32 ø32 ø32 30 Standard stroke (mm) ø6, ø10, ø16 ø20, ø25, ø32 5, 1

CQM Load voltage Wiring (Output) Pre-wired connector Applicable load DC AC Auto switch model Lead wire length (m) Indicator light Electrical entry Type Special function 3 (L) Perpendicular In-line 0.5 (Nil) 5 (Z) 1 (M) MU 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire IC circuit IC circuit M9N M9P M9B M9NW M9PW M9BW M9NV M9PV M9BV M9NWV M9PWV M9BWV 5 V, 12 V Solid state

Bearing Type: M (Slide Bearing), Bore Size: Ø16 mm, Port Thread Type: Bore 16: M5 x 0.8; Bore 20-100: Rc, Stroke: 75 mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SDPC [0.5m Cord Length, M12-4 Pin Connector]

Pin Cylinders Series CJP2/CJP

15 20 25 30 35 40 33 + stroke (38 + stroke) 6 16.5 14 39.5 + stroke (44.5 + stroke) 10 19 15 43.5 + stroke (48.5 + stroke) 16 24.5 20 ( ): Dimension for built-in magnet type Single acting /Series CJP Panel mount type (CJPB4-5) Embedded type (CJPS4-5) Scale :100% Scale :100% Scale :100% Scale :100% B B C A C A Dimensions Mass Unit: mm Unit: g Bore size A Stroke (mm) Bore size (mm) B C 15 75

Parallel Style Air Gripper: Wide Type Series MHL2

Lead wire length (m) Auto switch model Electrical entry direction Load voltage Applicable load Pre-wired connector 5 (Z) Electrical entry Indicator light Wiring (Output) Special function Type 0.5 1 (M) 3 (L) (Nil) DC AC Perpendicular In-line M9N M9P M9B M9NW M9PW M9BW M9NA M9PA M9BA M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV M9PAV M9BAV 12V 3-wire (NPN) IC circuit 5V,12V 3-wire (PNP) Solid

MY1

Load voltage Wiring (Output) Lead wire length (m) 0.5 (Nil) 1 (M) 5 (Z) Auto switch model Perpendicular Indicator light Pre-wired Type Special function Electrical entry connector Applicable load DC AC 25 to 40 50, 63 16, 20 25 to 63 16, 20 In-line 3 (L) M9N M9P M9B M9NW M9PW M9BW M9NA1 M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV1 3-wire (NPN) Solid state auto switch Reed auto switch 5 V, 12 V

High Precision Stroke Reading Cylinder Non-rotating Piston Type CEP1 Series ø 12, ø 20 Note) CE-compliant: When connecting to a multi-counter (CEU5  -D, power supply voltage 24 VDC). Refer to the multi-counter operation manual for details. Note)

Cylinder Stroke Standard stroke (mm) Manufacturable stroke range 25 50 75 100 Model CEP1B12 1 to 150 CEP1B20 1 to 300 Strokes other than standard strokes are available upon request for special. Consult with SMC separately. 648 A

3 Position Cylinder Series RZQ ø32, ø40, ø50, ø63 How to Order 100 M9BW RZQ 32 200 A Mounting bracket Number of auto switches Nil A Both ends tapped 2 pcs. Bore size B S Through-hole 1 pc. 32 32 mm L n Foot style "n" pcs. 40 40 mm F Rod side flange style

NPT G Full stroke is 75 mm or less in the case of RZQB (through-hole type). Mounting Bracket Part No. Double clevis Note 2) Foot Note 1) Flange Bore size (mm) 32 40 50 63 RZQ-D032 RZQ-L032 RZQ-F032 RZQ-D040 RZQ-L040 RZQ-F040 RZQ-D050 RZQ-L050 RZQ-F050 RZQ-D063 RZQ-L063 RZQ-F063 Note 1) When ordering foot brackets, order two pieces per cylinder.

Smooth Cylinder Series CQSY ø 12, ø 16, ø 20, ø 25

Grease pack (10 g) 1 pc. 84.8 IN 25 42 59 CQSY16-PS 12 6 113 OUT 34 57 79 CQSY20-PS REA 151 IN 45 75 106 CQSY25-PS 16 8 201 OUT 60 101 141 When only grease for maintenance is necessary, please order by the following part numbers.

Compact Cylinder with Lock Double Acting, Single Rod Series CLQ ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 How to Order CLQ B F D 30 40 30 40 M9BW CDLQ D F B With auto switch With auto switch (Built-in magnet) Made to Order Mounting style Refer to page 817

MLU Standard Stroke MLGP Bore size (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Standard stroke (mm) ML1C 20, 25 32, 40, 50, 63, 80, 100 Manufacture of Intermediate Stroke Description Part no. Spacer is installed in the standard stroke body. Refer to How to Order for the standard model no. on page 816.

Air Cylinder Short Type Standard: Double Acting, Single Rod Series CM3 ø20, ø25, ø32, ø40 How to Order CM3 L 40 150 With auto switch CDM3 M9BW L 150 40 With auto switch (Built-in magnet) Number of auto switches Rod end thread Nil Mounting 2 pcs. Bo

Standard Strokes JIS Symbol Double acting, Single rod Standard stroke (mm) Note) Bore size (mm) 20 25 32 40 25, 50, 75, 100, 125, 150, 200, 250, 300 Other intermediate strokes can be manufactured upon receipt of order. Manufacture of intermediate strokes in 1 mm intervals is possible. (Spacers are not used.) Refer to pages 13 to 16 for cylinders with auto switches.