0.4

Linearity (77F) 0.15% F .S. Repeatability (77F) 0.6% F .S. 0.5% F .S.

ZP

G H F G H 10 13 16 H 4 tube 6 tube Model ZPYB16--A8 64 38 15 F G F G F G J K L J K L ZPYB10--A8 ZPYB10--A10 95 41 53 55.5 89.5 57 91 23 87 15.5 2.5 7 13.5 1.8 5 ZPYB15--A8 ZPYB20--A10 46 100 43 127.5 129 63 65.5 67 125 51 ZPYB25--A8 ZPYB30--A10 56 110 5 1.8 14.5 7 2.5 16.5 137.5 139 73 75.5 77 135 ZPYB40--A10 173.5 175 83 85.5 87 171 77 ZPYB50--A10 93 181 95.5 183.5 185 97 13-11-56 Series

SQ1000/2000

A 23 6 () 11 Station 8 SOL.

Metal Seal/Rubber Seal Series VQ Body Ported

Description Note q Material Note q Material Body Aluminum die-casted Body Aluminum die-casted w w Spool/Sleeve Stainless steel Spool valve Aluminum/HNBR e e Piston Piston Resin Resin r Pilot valve assembly r Pilot valve assembly Note) Note) VQ111 -F (H) (Y) Voltage 1 to 6 Voltage 1 to 6 VQ111 -F (H) (Y) Single/3 position Single/3 position VQ110L-F VQ110L-F Double (Latching) Double (Latching

smcmaintenancepartslist

AMF150C AMF-EL150 AMF-EL150-F AMF250C AMF-EL250 AMF-EL250-F AMF350C AMF-EL350 AMF-EL350-F AMF550C AMF-EL550 AMF-EL550-F AMF650 AMF-EL650 AMF850 AMF-EL850 Except option F For option F Element assembly Glass fiber, others AMF-EL450 AMF-EL450-F 4 Industrial Filters Replacement Procedure Actuators Modular F.R.L.

Tie-rod Type Hydraulic Cylinder

+ Stroke H K F T T V V 2 x Rc P 4 x J GA F GA A MA a CHM A MA a Cushion adjustment screw Air release R (max.)

CJ2

(mm) Bore 10 16 A S WW LC LZ B WA X LH GA D Y LT MM F Z LX NA H LY NN LB 16.5 16.5 14.5 15 66 4.5 4.5 32 15 5 9 7.5 4 7 1.6 M4 X 0.7 8 122 24 21 28 M8 X 1.0 23 25 M10 X 1.0 14.5 15 67 5.5 5.5 42 18 6 14 7.5 5 9 2.3 M5 X 0.8 8 123 33 21 28 1.3-50 Built-in Speed Controller: Double Acting Double Rod Series CJ2ZW Front Flange (F) CJ2ZWF Bore size Stroke CJ1 CJP CJ2 CM2 C85 CG1 MB C95 CA1 CS1

AS

Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Linearity (77F) 0.15% F .S. Repeatability (77F) 0.6% F .S. 0.5% F .S.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Without auto switch With auto switch Stroke range (mm) Bore size (mm) J K D L C E M I H P M5 x 0.8 A A B F 5.5 Q 11.5 B P F Q 5 10 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 30 23 32 40 M8 x 1.25 4.5 33 7.5 Rc 1/8 14 10.5 16 7 13 45 34 60 Rc 1/8 10.5 7.5 40 36.5 46.5 38.5 48.5 33 29.5 39.5 30.5 40.5 40 Rc 1/8 46.5 39.5 M8 x 1.25 5 8 Rc 1/8 14 11 16 7 13 52 40 69 11 8 M10 x 1.5 50 Rc 1

Air Slide Table

For details, refer to the MXQR Operation Manual. 2 7 J I 3.5 6.5 3.5 6.75 3 depth 3 +0.03 0 3 depth 3 +0.03 0 4 N x M3 x 0.5 thread depth 5 6.5 3.5 0.7 16 1 17 15 36 24 16 1 32 12 F 5 4 x M3 x 0.5 thread depth 4 10 -1 x F 2 N 12 3 x M4 x 0.7 thread depth 6 M 6 KA 14.6 7 3.8 NA x M3 x 0.5 thread depth 3.5 K 14.6 Bottom view of MXQR8-30 7 3.8 14 21.2 0.3 27 23 6 4 23 Z ZZ (NN-1) x H G H 13.5

Basic type / Direct mount type Series CY3B/CY3R

Nil L R S a b h g d c f e Operating direction Left Right Note) Plugs are installed in ports other than those indicated for the model.

JXCx-OMT0023

g) h) i) j) Ignored.

Air Cylinder Series CS1

MB1 f l CA2 h + l ZZ + l + 2 stroke (With rod boot on one side) CS1 CS2 With rod boot (Both sides) FA G G FA Width across flats KA Width across flats KA 2 x P MM MM e D e D E E d d M AL AL l + Stroke A f l N N A K f K h + l h + l + Stroke S + Stroke ZZ + 2l + 2 stroke (mm) Type Stroke range (mm) Bore size (mm) AL B C D E EA F FA G J K KA M MM N P S A With rod boot Without rod boot 1 2 1 2

Cylinder with Lock

Overall length: h + H + L8 + (2 x Stroke) [mm] f l + Stroke f l ZY + (2 x Stroke) L8 + Stroke h h + Stroke Bore size Stroke range A Bd11 BG BH1 BH2 BH3 BN BP D1 D2 E1 E2 EE G1 G2 GA GB GC GD1 GD2 GF H 32 Up to 1000 22 30 16 23 38.5 46.5 59 G1/8 12 12 46 47 G1/8 28.9 28.5 37.5 13 37.5 23.9 23.5 13 48 40 Up to 1000 24 35 16 28.5 42.5 48.5 73 G1/8 16 16 57 54 G1/4 32.6 29 59.5 14 44.5 27.6 24

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

8 40.5 M Bottom view of MXQ25-75 13228 15 31 K 8 15 31 KA 22 50 65 0.5 52.5 8 55 Z ZZ G (NN 1) x H H 32 11.5 32 11.5 A B 6.6 6.6 11 12 12 35 1.5 A B NN x M8 x 1.25 thread depth 16 7 HA GA 6H9 ( ) depth 6 +0.030 0 6H9 ( ) depth 6 +0.030 0 B-B A-A (mm) Model F 55 46 55 65 75 60 48 60 65 N 4 4 4 4 4 6 8 8 8 G 23 23 23 23 32 44 31 56 H 55 55 55 65 80 44 66 66 NN 2 2 2 2 2 3 4 4 4 GA 23 23

7

d e 34 C (U2) (V2) E VX2 VXK 32 T 1.2 7.5 VXD VXD 25 VXZ 5.5 A B G1/2 VXS b a OUT IN VXB 2 x P Port size F 4.5 L K D f J I VXE 4.5 VXP Conduit d e C VXR E U 280 VXH 23 VXF 1.2 7.5 VX3 G1/2 T 5.5 A b a VXA IN OUT B 2 x P Port size f J F I L K D 4.5 4.5 Flat terminal C e d U E 11 1.2 7.5 T 5.5 A b a IN OUT B 2 x P Port size I F J 4.5 L K D 4.5 f (mm) Electrical entry One-touch fitting

CLA

14 113 21 30 72 80 750 20-750 23 17 M12X1 .75 11 M22X 1. 5 100 -750 20750 37 40 11 6 140 V 'I.. 92 30 52 14 124 21 31 76 25 19 M12X 1.75 11 M26X1 .5 IBore Size (mm) MM X1US N Without Boot With BootLZ H ZZ ee f h !

LEC-OM07605CN

46 D 62 E 47 E 63 F 48 F 64 4 9 4. 4.3.2 (1) 1.6 s 0.2 s (1 ) (2 ) b: Ready offOFF c: Ready onOFF d: Ready onON (2) ((2)((1)AL.32 0.8s 0.8s 0.2s (2 ) (1 ) (2 ) (1 ) n 4 10 4. 4.3.3 (1) ON ON (SSCNET/H ) (SSCNET/H) ON (SSCNET/H ) (SSCNET/H) () () : 1 [AL. 50 1] () :1 [AL.50 1] () Ready off OFF 0.8 s Ready on 0.8s 0.8 s () 0.8s () Ready on Off on :1 [AL.E1 1] : 1 [

MNB

GE MNB K F A BN A H S + Stroke ZZ + 2 strokes H + Stroke CNA CNS CLS CLQ e e MLGP 13 13 RLQ 9 f f l + Stroke 9 l h h + Stroke MLU ZZ + 2 strokes ML1C With rod boot D-X Bore size (mm) Stroke range (mm) Effective thread length (mm) Width across flats GL1 A B B1 H1 B2 BN BP C D Ee11 F GA GB GC GD GL 2032 40 50 63 80 100 12 12 15 12 18 20 10 14 18 18 22 26 19.5 27 32 32 37 37 Up to 500 Up to