Flow Sensor Series PFMV

Mounting screw (M3 x 8 l) Power supply / Output connector (2 m) ZS-28-A Bracket ZS-28-B With M3 x 5 l (2 pcs.) Panel mount adapter Sensor connector ZS-28-C 1 pc. Note) Options are shipped together, but not assembled. Panel mount adapter ZS-27-C With M3 x 8 l (2 pcs.)

Rotary Actuator/Vane Type

Weight [g] Vane type Single vane Double vane Size 10 15 20 30 40 10 15 20 30 40 Rotating angle 90 180 270 90 180 270 90 180 270 90 180 270 90 180 270 90 100 90 100 90 100 90 100 90 100 Rotary actuator body 27 26 26 48 47 46 104 103 101 199 194 189 385 374 363 42 43 55 58 119 142 219 239 398 444 Flange assembly 9 10 19 25 9 10 19 25 Auto switch unit 15 20 28 38 43 15 20 28 38 43 Angle adjuster

CEx-OMQ0011

P1 No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 59 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

Rotary Table: High Precision Type

Allowable load Table 7 0.044mAllowable moment OK Moment of inertia Find inertial moment of load to calculate I=m(a2+b2)/12+m2 I=0.15(0.062+0.042)/12+0.150.032 energy. Find I.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

Rod end: KJ (ISO 8139) l l3 [mm] Bore size [mm] Part no. d3 d1 H9 h d6 (Max.) b1 h12 l (Min.) a l3 32 KJ10D M10 x 1.25 10 43 28 14 20 4 15 40 KJ12D M12 x 1.25 12 50 32 16 22 4 17 50, 63 KJ16D M16 x 1.5 16 64 42 21 28 4 23 80, 100 KJ20D M20 x 1.5 20 77 50 25 33 4 27 140 ISO (15552) Standard Air Cylinder: Non-rotating Rod Type Double Acting, Single/Double Rod 32, 40, 50, 63, 80, 100 CP96K Series

MY1

32 250 290 11 14 57 65 168 200 15 16 M8 x 1.25 47 50 44 60 122 147 105 M10 x 1.5 PA NH NW PB PG PP Q QQ QW RR SS TT UU VV W WW YW Z XX Bore size (mm) 50 63 090 110 60 70 118 142 120 140 186 220 10 12 26 42 380 436 28 30 35 49 10 13 35 43 24 28 28 30 200 236 22 25 128 152 424 490 74 92 Hole Size for Centralized Piping on the Bottom (Mounting side should be machined to these dimensions.)

Card Motor

Amount of Overhang: Ln [mm], Correction Value for the Distances to the Moment Center: An [mm] Correction Value for the Distances to the Moment Center: An [mm] Fig. 1 Table 1 Mp: Pitching Mounting orientation My: Yawing Mr: Rolling Model A1 A2 22.5 L2 A2 LAT3m-10 LAT3m-20 LAT3m-30 2.2 L1 A1 32.5 2.2 42.5 2.2 Mr L1 A1 Horizontal W Mp My L3 W W Mr W L2 A2 L3 Vertical Mp My W W Allowable Load

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

(Piping specifications A2(L) and B2(L) are excluded.) ZSP PS Specifications ISA Model 500 kPa ZSE80(F) 1.5 MPa ISE80 PSE Withstand pressure Applicable fluid Fluids do not corrode stainless steel 316L IS Models other than above are the same specifications as standard.

SI Unit for Vacuum Manifold

L/A1 LED and L/A2 LED Table. 7-2 L/A1 LED and L/A2 LED L/A1 L/A2 Description Green ON --The SI Unit is connect to Ethernet via BUS IN/Port 1. Orange ON --The SI Unit is transmitting or receiving Ethernet data via BUS IN/Port 1. --Green ON The SI Unit is connect to Ethernet via BUS OUT/Port 2. --Orange ON The SI Unit is transmitting or receiving Ethernet data via BUS OUT/Port 2.

IZx-OMP0064

Troubleshooting" (p62) Revision B (May 28, 2013) Revision to the note (p8) Revision to the electrode cleaning kit (p13) Removal of the description about cleaning from (p39), and addition of "10.

48

FB G GA GB H J JC K L MM ML NN 12 (10 x 2) 10, 20, 30, 50, 100 33 24.5 6 6.5 2 17 11 5.5 58 8.5 1.5 8.5 11 M3 x 0.5 7.5 M2.5 x 0.45 16 (12 x 2) 33 24.5 6 6.5 2 18 11 5.5 64 9 3 9 11 M4 x 0.7 10 M3 x 0.5 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z 12 (10 x 2) 3.4 6.5 2.5 M3 x 0.5 6 16 18.5 8 26 14 49.5 39 52 10.2 23 M4 x 0.7 6 4.2 16 (12 x 2) 3.4 6.5 2 M3 x 0.5 6.5 16 18.5 8 28

No more element replacement!

Device Cylinder driving valve Drain valve 5-port solenoid valve (Series SY) Coolant valve (Ball type) 1 5 Air supply valve Speed controller Process valve (Series VNB) Speed controller (Series AS) 2 6 IN side valve Coolant valve (Series FNVB) Differential pressure switch (Series OPL550) 3 Differential pressure switch 7 OUT side valve Differential pressure controller (Series PSE200 + Series PSE560

PSE560 and 564 are remote pressure sensors with an analog V or mA signal output.  PSE56* sensors measure pressure of any liquid or gas non-corrosive to 316L stainless steel.  560 is for a standard pneumatic system's pressure range, while the 564 model is for low pressure.  An accuracy of ±1% of the full scale rated pressure range is suitable for general purpose applications. 

PSE560 and 564 are remote pressure sensors with an analog V or mA signal output.  PSE56* sensors measure pressure of any liquid or gas non-corrosive to 316L stainless steel.  560 is for a standard pneumatic system's pressure range, while the 564 model is for low pressure.  An accuracy of ±1% of the full scale rated pressure range is suitable for general purpose applications. 

AS-FG/ASD-FG

A1 D1 L5 D1 A2 T T Inch size L4 L5 A1 A2 M1 Max.

ZSE F/ISE

22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and

OMR0031

NPN type -PNP type Input signal power Input signal power CN5 CN5 supply supply 24 VDC 24 VDC A1 COM A1 COM A2 IN0 A2 IN0 A3 IN1 A3 IN1 A4 IN2 A4 IN2 The power supply can be either polarity. The power supply can be either polarity.

OMR0032

Wire the product while referring to the wiring diagram below. (1) NPN type (2)PNP type Input signal power Input signal power CN5 CN5 supply supply 24 VDC 24 VDC A1 COM A1 COM A2 IN0 A2 IN0 A3 IN1 A3 IN1 A4 IN2 A4 IN2 The power supply can be either polarity. The power supply can be either polarity.

Thermo-con/Rack Mount Type

A C B Applicable model Dimensions [mm] A B C HECR002-A5-E 14 230 35 HECR004-A5-E 45 HECR006-A5-E HECR008-A5-E 44 HECR010-A2-E HECR008-W5-E 46 HECR012-W2-E 310 13 400 15 Option symbol F With Flow Switch F HECR Applicable model HECR002-A5-F HECR004-A5-F HECR006-A5-F HECR008-A5-F HECR010-A2-F HECR008-W5-F HECR012-W2-F With flow switch This is an ON/OFF switch detecting low levels of the circulating

CRQ2

Pattern Air cushion None Size Thread type Attached C How to order model with auto switches Combination 4 Types Combination of Applicable Chart 10, 15 20, 30, 40 Size 10, 15 Port type Nil Nil TF TN TT Nil Chart 1, 2, 5 Chart 1, 2 Chart 2, 5 Chart 2, 5 C30 C8 C10 C30 C12 A2 A24 C11 C8 A1 A2 A14 A14 M5 Rc 1/8 G 1/8 NPT 1/8 NPTF 1/8 Refer to page 11-8-2 for How to Orderproducts with auto switch