Vacuum

OO 3.24 5 . 1 2 8.01 Technic Vacuum System Specification (continued) 2.

Model Selection 1

Single unit 1/4 to 1/2 0.05 to 2 10 Solenoid valve 2 port Pilot operated (Quick response, Instantaneous high flow) 17-3-71 VXF21/22 N.C. Single unit 3/4, 1, 1 1/2 0.03 to 1 20, 27, 40 17-2-79 VQ20/30 N.C. Single unit C6 to C12 Pilot operated (For dry air) 0.01 to 0.6 3.4, 4.8 C6 to C12, (3/8) (1) 17-2-89 VV2Q22/32 N.C. Manifold Note 1) All IN ports are 3/8. Note 2) 10 is N.C.

MY1

IC circuit Z76 5V Yes Z73 100V 12V Grommet Relay PLC 24V 2-wire 100V or less 5V 12V IC circuit Z80 No 3-wire (NPN) 3-wire (PNP) Y69A Y59A IC circuit 5V 12V Y7PV Y7P Y69B Y59B 2-wire 12V 3-wire (NPN) 3-wire (PNP) Y7NWV Y7NW Diagnostic IC circuit Grommet 24V Yes 5V 12V Relay PLC indication Y7PWV Y7PW 2-color display Y7BWV Y7BW 2-wire Waterresistant 12V Note 2) 2-wire Y7BAL 2-color

Wireless System

-10S6WS72-05B-C6 (Type 10 5-station manifold base, Wireless slave) Negative common, M12 connector IN/OUT pin arrangement 1, I/O unit: 2 stations * SY3100-5U1 3 sets (2-position single part no.) * SY3200-5U1 2 sets (2-position double part no.) * EX600-DXPD 1 set I/O unit part no.

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: L (Bottom), Output Specification: 1 [Analog Output (1 to 5 V)]

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C8 (ø8 (5/16") one-touch fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)]

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: F01 (G1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)]

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)]

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: 01 (Rc1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)]

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C8 (ø8 (5/16") one-touch fitting), Piping Entry Direction: L (Bottom), Output Specification: 1 [Analog Output (1 to 5 V)]

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: 01 (Rc1/8), Piping Entry Direction: L (Bottom), Output Specification: 1 [Analog Output (1 to 5 V)]

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: L (Bottom), Output Specification: 1 [Analog Output (1 to 5 V)]

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)]

Structure: IP40, Lead Wire: With lead wire with connector (2 m), Handling Instructions: With Instruction Manual (Japanese and English), Calibration Certificate included: Without calibration certificate, Flow rate control valve: None, Custom-made Specifications: None, Rating Flow Range(L/min): 1 to 50 (25), Accessory: None, Option: None, Analog Current Output(mA): None

Structure: [Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Voltage, Pipe Port Type: [One-Touch Couplings] One-Touch Couplings (Elbow), Plumbing Thread Type: -, Plumbing Thread Nominal: -, Pressure Resistance(MPa): 1, Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2,

Structure: IP40, Lead Wire: With lead wire with connector (2 m), Handling Instructions: With Instruction Manual (Japanese and English), Calibration Certificate included: Without calibration certificate, Flow rate control valve: None, Custom-made Specifications: None, Rating Flow Range(L/min): 1 to 50 (25), Accessory: None, Option: None, Analog Current Output(mA): None

[Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Voltage, Pipe Port Type: [One-Touch Couplings] One-Touch Couplings (Straight), Plumbing Thread Type: -, Plumbing Thread Nominal: -, Pressure Resistance(MPa): 1, Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2,

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø8 (5/16") one-touch fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: G1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø8 (5/16") one-touch fitting, Piping Entry Direction: Bottom, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -