size P , A port R port Body size Port 01 02 02 03 04 04 06 10 10 12 14 20 Nil 01 02 8 1 1 4 1 4 1 3 8 3 Body ported Base mounted 2 1 2 1 5 4 3 1 1 1 1 2 4 1 1 7 4 1 2 1 9 2 Without sub-plate 8 1 2 4 1 Option Description Part no. 0 3 0 3 0 3 0 3 0 3 0 3 VEX1A33 VEX1B33 VEX113 VEX123 VEX133 VEX153 VEX173 VEX193 B Bracket (With bolt and washer) VEX1-18-1A VEX1-18-1A VEX3-32A VEX5-32A VEX7-

PA300/500/700

3(R) 1(P) NC (R port) Rc 1/8,1/4 39.2 Switch mark (Mounting hole) 24.5 26.7 56.9 55.9 25 24 18.5 12 (P port) Rc 1/8,1/4 A B (A port) Rc 1/8,1/4 Base mounted: VPA344V12 65.6 39 12 30 (PA port) Rc 1/8 2(A) NO 26.5 PA 35 43 3(R) 1(P) NC (R port) Rc 1/8,1/4 39.2 Switch mark (Mounting hole) 24.5 26.7 56.9 55.9 25 24 18.5 12 (P port) Rc 1/8,1/4 5-5-16 5 3 Port Air Operated Valve Series VPA300/

Compressed Air Cleaning Filter Series

X17 P.69 Port size X26 P.70 Symbol Size 2C Applicable body size Accessory Option 3 4C 8C 11C 22C Symbol Nil Description Symbol Nil Description 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 B Bracket 2 Rubber material: Fluororubber For medium air pressure (1.6 MPa) Drain guide 1/4 female threaded 4 F H J R S U T V 2 Bracket is included, (but not assembled).

Thermo-chiller/Rack Mount Type

m, height: 1 m, stable with no load, Other conditions R See 4.

30

(mm) Connection thread Rc T (M) Width across flat M Weight (g) Mounting hole L1 L2 Model H1 H2 KQB2E23-02 KQB2E04-01 KQB2E04-02 KQB2E06-01 KQB2E06-02 KQB2E06-03 KQB2E08-01 KQB2E08-02 KQB2E08-03 KQB2E10-02 KQB2E10-03 KQB2E12-03 KQB2E12-04 KQB2E16-03 KQB2E16-04 3.2 3.4 1/4 1/8 1/4 1/8 1/4 3/8 1/8 1/4 3/8 1/4 3/8 3/8 1/2 3/8 1/2 17 14 17 11 12 31 25.8 30.9 24.2 31.6 33 26.3 32.4 34 31.6 33.6

VQ7-6/7-8

Wiring specification L side R side L R O-ring NBR 4 AXT502-19 Side Bottom A B O-ring NBR 2 AXT502-20 Cylinder port size Plate SPCC 1 AXT502-22-2 Rc1/4 Rc3/8 6 One-touch fitting 8 One-touch fitting 10 One-touch fitting 02 03 C6 Note 1) Gasket NBR 1 AXT502-31 Oval countersunk head screw SWRH3 2 M4 X 8 C8 Note 1) C10 Note 1) Note 1) Side ported only 31 Series VQ7-8 Manifold Exploded View D side

ISG

AC 110 12 2 12 3 q e w e t y 220 10 1 10 1.5 440 6 1 3 1 550 5 0.8 2 0.5 r b contact w a contact r q DC 24 3 2.5 3 2.5 C C 48 1.5 1.2 1.5 1.25 When rising pressure q w = ON e r = OFF When rising pressure q e r y = ON q w r t = OFF 110 0.5 0.25 0.5 0.2 220 0.25 0.1 0.25 0.1 Insulation resistance: 100 M or more at 500 VDC by megameter Voltage resistance: 2000 VAC/1 min. 16-9-5 Series

Modular Type Lubricators Series AL

(Example) 23-R Semi-standard Combinations Available Not available Accessory, Semi-standard Option Symbol 1 1S-1 1S-2 2 3 6 8 R -1 -1S-1 -1S-2 -2 -3 -6 -8 -R 1000 cm3 tank 1000 cm3 (With switch) Bottom limit ON 1000 cm3 (With switch) Bottom limit OFF Metal bowl Lubricator with drain cock Nylon bowl Metal bowl with level gauge Flow direction: Right to left Note) -1, -1S-1 and -1S-2 are with

Fieldbus System

How to Order Valves (With mounting screw) SY 3 5 1 0 0 1 q w r e t y u i o !0 !1 Base mounted q Series y Pilot valve option !

AD402/600

Port 3/4 3/4, 1 D I M E N S I O N S AD S E R I E S A U I T O D R A I N S S Y M B O L S H O W T O O R D E R A U T O D R A I N S E R I E S AD AD402-02 (1/4) PT AD402-03 (3/8) PT AD402-04 (1/2) PT AD600-06 (3/4) PT AD600-10 (1) PT H O W T O O R D E R A U T O D R A I N S E R I E S NAD NAD402-N02 (1/4) NPT NAD402-N03 (3/8) NPT NAD402-N04 (1/2) NPT NAD600-N06 (3/4) NPT NAD600-N10 (1) NPT FOR FURTHER

Booster Regulator/Air Tank

Make sure to refer to the procedure for maintenance. 9 Booster Regulator Series VBA Dimensions VBA10A-02 With elbow silencer (Option) 150 Pressure gauge (Option) Elbow silencer (Option) 60 IN side gauge port Rc 1/8 OUT side gauge port Rc 1/8 28 7 28 7 Silencer (Option) 113 113 IN port Rc 1/4 IN port Rc 1/4 OUT port Rc 1/4 23 27 23 27 OUT port Rc 1/4 22 22 4 x 5.5 EXH port Rc 1/4 60 40 60

AZ1000

AZ14 S T FV4 FV4 02 2PW Delivery pressure Connections (Inletq, Outletw) Code Delivery pressure Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 3/8 inch face seal (Female) 3/8 inch face seal (Male) 3/8 inch tube weld 1/2 inch face seal (Female) 1/2 inch face seal (Male) 1/2 inch tube weld Code 1 to 30 psig (0.007 to 0.2 MPa) Bonnet option FV4 MV4 FV6 MV6 TW6 FV8 MV8 TW8 02

With Factory Installed

At inlel pressure 0.7MPa 1 7.1 kgflcm2! AI Inlel pressure 0.7MPa /71 kgf/cm21 , outlel pressure 0.2MPa 1 2.0kgflcm21. flow rale 20 / min (ANR) AR2001-02 AR2001-02 0.25 -r-=:: lf~1 ~ "'" ~ :'.. ::;; 0.2 ~r. " 5 OJ> ~ o . 3k-1-j.-:=.

Check Valve Series AK 1

NPT thread Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32 1/4 5/16 3/8 1/2 From One-touch fitting to male thread B Bushing type AKB 01 A 01 S With seal (Standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction Female/Male

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

0 (B) (A) 2 4 (B) (A) 2 4 4(A) 3 5 1 3 5 1 (EB) (P) (EA) (EB) (P) (EA) 2(B) i 5(EA)/3(EB) 1(P) 2 position double with back pressure check valve 2 position double 2 position double o t r e w y q !1 u !

Air Combination

AC-OMX0051-D PRODUCT NAME Air Combination MODEL / Series / Product Number AC20(A)-(F,N)01~(F,N)02(C,E,E1,E2,E3,E4,G,M)-(1,2,3,6,C,J,N,R,Z,ZA)-D AC20B,C,D -(F,N)01~(F,N)02(C,E,E1,E2,E3,E4,G,M)-(1,2,6,C,J,N,R,Z,ZA)-D AC30(A)-(F,N)02~(F,N)03(C,D,E,E1,E2,E3,E4,G,M)-(1,2,3,6,8,J,N,R,W,Z,ZA)-D AC30B,C,D -(F,N)02~(F,N)03(C,D,E,E1,E2,E3,E4,G,M)-(1,2,6,8,J,N,R,W,Z,ZA)-D AC40(A)-(F,N)02~(F,N)04(C,D

VQC

Communication connector (PROFIBUS-DP): M12, 5 pins (plug) 3 2 5 R 1 4 0 0 0 0 BUS 3 Description Function No. 1 1 12 1 1 Terminal +5V VP 1 X 2 2 P PWR Signal N R x D/T x D(N) 2 3 3 1 GND terminal DGND 3 Signal P R x D/T x D(P) 4 Shield ground SHIELD 5 Power connector: M12, 5 pins (Boss configuration differs from plug and communication connector.)

SQ1000/2000

1 Port plugs> CP VVQZ3000 w e r t

VP300/500/700

(Non-locking) Manual override 69.4 (30.5) 24 13.5 2-6.5 (For mounting) (X port) (M5 x 0.8) (R port) Rc 1/4 101.6 26.7 (17.5) 3(R) 1(P) 3(R) 1(P) 3(R) 1(P) 3(R) 27 50 V100 1(P) MAX.10 D: 112.8 26.7 Y: 112.3 101.6 102.4 MAX.10 112.8 (P port) Rc 1/4 SY SYJ 300 (Pitch) Pg9 Pg9 85.6 95.6 27.5 28 (Lead wire length) 95.1 105.1 Y: 97.6 114.6 L1 L2 7.5 90.1 100.1 D: 95.6 112.6 Applicable lead wire

VQ20/30

VX B 1 2 1 2 VX3 A VXA B NL R VN R LED B NL: Neon light R: Resistor LED: Light emitting diode R: Resistor LVC Caution LVA Valve Mounting After confirming the gasket is correctly placed under the valve, tighten the mounting screws with the appropriate torque (0.2 to 0.23 Nm).