AIR FILTER

DIMENSIONS Bracket Accessory Port size Maintenance space Drain Model Standard specifications M5 1/81/4 1/43/8 1/43/81/2 3/4 3/41 1 J AF10-A 25 59.9 7 12.5 25 12.5 AF20-A 40 87.6 9.8 20 25 20 AF30-A 53 115.1 14 26.7 30 35 26.7 AF40-A 70 147.1 18 35.5 38.4 40 35.5 AF40-06-A 75 149.1 20 35.5 38.4 40 35.5 AF50-A 90 220.1 24 45 30 45 AF60-A 95 234.1 24 47.5 30 47.5 Model Bracket mount dimensions

AR20-B to AR60-B

Example) AR30K-03BE-1NR-B w e V q Body size 20 25 30 40 50 60 Symbol Description V w With backflow function Nil Without backflow function K Note 1) With backflow function + V e Pipe thread type Nil Rc N NPT F G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 V r Port size + a Mounting Nil Without mounting option B Note 3) With bracket H With set nut (for panel mount) + Nil Without pressure

VXP21/22/23

) Oil (Standard) (D, E) High temperature oil (3) (S) (D) 99 100 183 AC DC AC DC 60 40 80 60 60 40 40 60 Maximum Minimum 1 10 5 (2) 10 (1) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E etc. in parentheses are option symbols.

MIST SEPARATOR

DIMENSIONS (Accessory) (Port size) Maintenance space Drain Dimensions Model Standard specifications 1/81/4 1/43/8 1/43/81/2 3/4 , AFM20-A 40 87.6 9.8 20 45 AFM30-A 53 115.1 14 26.7 30 50 AFM40-A 70 147.1 18 35.5 38.4 75 AFM40-06-A 75 149.1 20 35.5 38.4 75 Model Bracket mount dimensions AFM20-A 30 27 22 5.4 8.4 40 2.3 28 AFM30-A 41 35 23 6.5 13 53 2.3 30 AFM40-A 50 52 26 8.5 12.5 70 2.3

FQ1

Filtration accuracy (m) 5 10 20 40 74 105 No.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Filtration accuracy (m) 5 10 20 40 74 105 No.

FQ1

accuracy (m) 5 10 20 40 74 105 No.

MICRO MIST SEPARATOR

DIMENSIONS (Accessory) (Port size) Maintenance space Drain Dimensions Model Standard specifications 1/81/4 1/43/8 1/43/81/2 , AFD20-A 40 87.6 9.8 20 45 AFD30-A 53 115.1 14 26.7 30 50 AFD40-A 70 147.1 18 35.5 38.4 75 AFD40-06-A 75 149.1 20 35.5 38.4 75 3/4 Model Bracket mount dimensions AFD20-A 30 27 22 5.4 8.4 40 2.3 28 AFD30-A 41 35 23 6.5 13 53 2.3 30 AFD40-A 50 52 26 8.5 12.5 70 2.3

Soft Start-up Valve

)-A AVA5000-(F,N)06~10(B,G,S)(-R,Z)-A AVL2000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL3000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL4000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL5000-(F,N)06~10(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A Contents Page 1.

Silencer Series AN

Series ANA1 Page 5-10-8 40 dB (A) 30 m High noise reduction type Series ANB1 has a larger effective area with the same port size as Series ANA1.

Nozzle Type Ionizer

ON OFF Output Maintenance signal Requirement for maintenance detected ON OFF Input External switch signal 1, 2 16 IZN10E Series Dimensions Energy saving static neutralization nozzle IZN10E-01m 06 07 High flow rate nozzle IZN10E-02m 06 07 18.31 (100) 2.5 16 5 92.5 46 3.5 L 6 18.5 6 11 8 L 12.4 5 6 M3 x 0.5 thread depth 4 (Ground terminal) 40 27.7 L-L Applicable tubing O.D. d A 86.4 [mm] Model

FILTER REGULATOR

HOW TO ORDER AW 30 03 BE 1 B 1 3 4 5 2 1 Symbol Description Body size 20 30 40 60 Nil Rc N NPT Thread type 2 F G 01 1/8 02 1/4 03 3/8 Port size 3 04 1/2 06 3/4 10 1 Nil Without mounting option B With bracket a Mounting H With set nut for panel mounting Nil Without auto drain b Float type auto Option C With float type auto drain (N.C.) drain 4 D With float type auto drain (N.O.)

VZS

Cylinder Speed Chart Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series Average speed (mm/s) 800 700 600 500 400 300 200 100 0 It is when the cylinder is extending that is meter-out controlled by speed controller which

Dual Speed Controller with One-touch Fitting Series ASD

Flow Direction Symbols on Body Meter-out type Meter-in type Symbol JIS Symbol 15-9-67 Series ASD-FM How to Order ASD 3 3 0 F M 01 06 S With seal M5 and U10/32 types, as they are not available with seal. Body size 2 3 4 M5 standard 1/8 standard 1/4 standard Type Applicable tubing O.D.

VHS20/30/40/50

VHS20/30 VHS40/40-06/50 2-10 I 10 I G H F E X H .

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

/40-06/50 2-10 I 10 I G H F E X H .

Vacuum System Peripherals:

40 e Valve Model Fill in the blanks below with symbols of necessary specifications.

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 30 40 50 60 25 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N F Thread type e Rc NPT G + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 3) H Note 2) a Without mounting option With bracket

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 (Mounting hole) Applicable tubing diameter M I J K L M N O P Model ZH05BS-06-06 ZH05BL-06-06 ZH07BS-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 60 12.8 3.2 26 5.8 2 32 60 12.8 3.2 26 5.8 2 32 75 15.3 4.2 28 7.5

5

(mm) Female Rod End (mm) (mm) Bore size A1 H MM ZZ 20 8 20 M4 x 0.7 95 Bore size S TD TT TX TY TZ Z ZZ 20 62 8 10 32 32 52 36 116 Bore size ZZ 20 103 25 8 20 M5 x 0.8 95 25 62 9 10 40 40 60 40 120 25 107 32 12 20 M6 x 1 97 32 64 9 10 40 40 60 40 122 32 109 40 13 21 M8 x 1.25 125 40 88 10 11 53 53 77 44.5 154 40 138 * When female thread is used, use a thin wrench when tightening the piston