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based on conditions , and 1 1 C = 1.00 based on condition C = 0.90 based on condition 2 2 Based on condition , A and B Based on condition , B-1 and C 3 3 Corrected air flow = 350 (0.85 x 1.00) = 412 l/min (ANR) Corrected air flow = 1200 (0.95 x 0.90) = 1400 l/min (ANR) 4 4 Based on condition ; Based on condition ; IDU4D is selected as the model to process an air flow larger than 412 l/

200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end (mm/s) Speed at the end (mm/s) Applicable related components Applicable related components For details regarding different conditions, make determinations after using the SMC Model Selection Program Pneumatic Cylinder Drive Systems.

200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end (mm/s) Speed at the end (mm/s) Applicable related components Applicable related components For details regarding different conditions, make determinations after using the SMC Model Selection Program Pneumatic Cylinder Drive Systems.

00-A-5 0 0 200 400 600 800 1000 1200 1400 VQ45 (Plug lead type) B ARBQ4000-00-B-5 Flow rate (l/min(ANR)) P ARBQ4000-00-P-5 ARBQ4000-00-P (P B) 0.7 Outlet pressure (MPa) 0.6 SMC 0.5 0.4 0.3 0.2 50 147 0.1 0 0 200 400 600 800 1000 1200 1400 B 2 SMC Flow rate (l/min(ANR)) 12 1 P 5 3 R2 R1 Pressure Characteristics 59 PE 4 A Conditions Inlet pressure: 0.7 MPa Outlet pressure: 0.2 MPa Flow rate

1 8 0.33 0.19 1.4 0.28 0.12 1.2 VF VZS2250 13 or less 0.19 Double 1200 1 8 0.33 0.19 1.4 0.28 0.12 1.2 VFR Closed center VZS2350 22 or less 0.2 600 0.27 0.17 1.1 0.21 0.23 0.90 1 8 VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Exhaust center 3 position VZS2450

Unit: g Cylinder stroke (mm) Bore size (mm) CY 10 94 166 228 395 479 728 20 118 206 290 487 567 846 75 30 142 246 352 579 655 964 50 60 366 538 100 40 10 16 20 25 30 40 166 CX 286 326 Unit: N OUT IN Theoretical Output 414 476 MQ 671 763 993 1223 Operating pressure (MPa) Rod size (mm) Direction Piston area (mm 2) Bore size (mm) 743 831 1052 1272 RHC 1082 1200 1495 1790 0.7 35.2 0.6 30.2

00-A-5 0 0 200 400 600 800 1000 1200 1400 VQ45 (Plug lead type) B ARBQ4000-00-B-5 Flow rate (l/min(ANR)) P ARBQ4000-00-P-5 ARBQ4000-00-P (P B) 0.7 Outlet pressure (MPa) 0.6 SMC 0.5 0.4 0.3 0.2 50 147 0.1 0 0 200 400 600 800 1000 1200 1400 B 2 SMC Flow rate (l/min(ANR)) 12 1 P 5 3 R2 R1 Pressure Characteristics 59 PE 4 A Conditions Inlet pressure: 0.7 MPa Outlet pressure: 0.2 MPa Flow rate

550 740 1200 12 23 31 49 23 31 49 215 415 560 880 415 560 880 3300 1 4 1 2 1.0 1.0 1.0 1.0 1.0 1.0 Water Air Oil 1.5 4200 5400 Steam 1.0 5900 32A 7300 40A 9200 50A Note) Weight of grommet type.

1400 1600 1600 0 0 200 400 600 800 1000 1200 1400 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ4000-00-P (PA) ARBQ4000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 200 400 600 800 1000 1200 1400 1400 0 0 200 400 600 800 1000 1200 Flow rate l/min (ANR) Flow rate l/min (ANR) 1MPa = 145 psi Nl/min X 0.035 = SCFM Pressure

0.7 0.8 0.9 1.0 200 CM2 20 50% 70% 10% 30% 150 Stroke mm AS2201F -01-06 AS2200-01 70% 100 50 10% 30% 50% 0 200 CM2 25 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 ANA1 -C08 T0604 200 CM2 32 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 Stroke mm AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200

1200 1200 1000 1000 800 800 Smooth exhaust valve T msec 600 600 400 400 200 200 0 0 25 40 50 63 80 25 40 50 63 80 Size Size Response time when closed (including pneumatic valve) Operation time when closed (vacuum valve only) Response time when open (including pneumatic valve) Operation time when open (vacuum valve only) 35 Series XL High Vacuum Angle Valve 2 As a function of pilot pressure

CE2 ML2B Graph (1) Graph (2) RSA50, 63, 80 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 C J G5-S 1.0 1300 1300 RSH80 RSA80 RSH63 RSA63 RSH50 RSH50 RSA50 80 0.9 Operating pressure P [MPa] 1200 1200 CV 0.8 1100 1100 0.7 MVGQ 1000 1000 0.6 900 900 0.5 CC 63 80 Load weight m [kg] Load weight m [kg] 800 800 0.4 50 0.3 RB 700 700 0.2 600 600 J 0.1 63 500 500 50 1000 2000 3000 4000 5000

) MGF 81 (88) 12 (20) 90 (120) 50 (58) 110 (144) 46 (47) 159 (163) 0.032 0.059 50 1200 600 600 600 15 30 76 38 103 9.0 144 3.2 27 13 31 188 9.0 35 19 183 195 127 154 45 50 70 30 12 22 74 12 80 76 18 95 160 1000 (1001 to 1200) 170 (179) 101 (105) 15 (23) 105 (140) 59 (64) 130 (170) 43 (48) 0.032 0.059 63 1200 600 600 600 18 11.5 11.5 110 40 92 49 107 166 3.2 34 16 24 206 40 23 196 212 148

1600 2000 LC6m LC6m 0.5 0.5 LZm LZm LC3F2 LC3F2 0 0 500 1000 0 0 500 1000 Xm Xm Stroke (mm) Stroke (mm) D-m D-m Medium Load (9.80 m/s2) Light Load (19.60 m/s2) 4.0 4.0 E-MY E-MY 300 mm/s 300 mm/s 3.5 3.5 400 400 3.0 3.0 500 500 600 600 2.5 2.5 800 800 Tact time (sec) Tact time (sec) 1000 1000 2.0 2.0 1.5 1.5 1.0 1.0 1600 2000 1600 2000 1200 1200 0.5 0.5 0 0 500 1000 1000 0 0 500 Stroke (

200 CM2 20 10% 30% 50% 70% 150 Stroke (mm) Stroke (mm) Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 70% 100 50 10% 30% 50% 0 CM2 25 200 150 AS2201F -01-06 AS2200-01 100 50 0 SV100 ANA1 -C08 T0604 CM2 32 200 150 AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200

550 740 1200 12 23 31 49 23 31 49 215 415 560 880 415 560 880 1850 3300 4200 5400 5900 7300 9200 1 4 1 2 0.7 0.7 0.7 0.7 0.7 0.7 Water, Air, Oil 1.5 Steam 1.0 32A 40A 50A Note) Weight of grommet type.

Guide for Using MY3M Side Support 200 (1200) 180 160 m 140 Weight W (kg) 120 MY3M63 l 100 (800) 80 MY3M40 60 (700) m l 40 MY3M25 (600) m 20 MY3M16 0 1000 2000 3000 4000 0 l l Support spacing l1 (mm) Note) A side support must be used to keep the spacing from exceeding the value inside the parentheses.

2 1 Max. operating pressure differential (MPa) Min. operating pressure differential (MPa) Max. system pressure (MPa) Note) Flow characteristics Port size Model Orifice size (mm) AC, DC Weight (g) Av x 10-6m2 Cv converted VXD2142-03 VXD2142-04 VXD2152-06 VXD2262-10 VXD2272-32 VXD2382-40 VXD2392-50 (10A) (15A) (20A) 1 (25A) 32A 40A 50A 3 8 4.5 5.5 9.5 13 23 31 49 110 130 230 310 550 740 1200

Use the acceleration time constant of Point table No.1 as the acceleration time constant (msec) of Home 1200 for LEJS40 H Lead position return. Set the recommended value in the above figure. Refer to "LECSC2-T Operation Manual ", section 5.4.2 for how to set the Point table. App. 32 APPENDIX LEJS100 Series Lead symbol H A B Lead 50 25 10 Parameter *1,*2 Para.

ISE20B : 0x02440x1450 ZSE20B P_2(n_2) (5805200) 0x03FE (1022) 0 R/W (Setting of switch U16 ZSE20B : 0x02580x1450 (6005200) ZSE20BF : 0x03840x13EC (9005100) 0x0BB8 (3000) point of OUT2) ZSE20BF 0x0FA0 (4000) ISE20B 0x04B0 (1200) Setting of OUT2 hysteresis.