D-F6N/D-F6P/D-F6B

[For D-97, (+) is on the no-displayed side, () is on the black line side.] 1) If connections are reversed, an auto switch will operate, however, the light emitting diode will not light up. Also, take note that a current greater than that specified will damage a light emitting diode and it will no longer operate.

7

The dog fitting cannot be attached to the knuckle joint, M6 without tap (end bracket symbol I or Y). 30 97 42.5 Foot MK 49 Material: Rolled steel Part no. Applicable clamp cylinder Option symbol 40 CK-L04 CK1A series CK1B series MK2T L Foot Note 1) A mounting bolt (hexagon socket head cap screw) and a spring washer will be attached as a standard for the foot bracket.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

10.5 9.5 10.5 A B G (NN 1) x H H 21 9 21 9 A-A B-B (mm) Model F 38 38 48 58 40 46 44 44 N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN 2 2 2 2 3 3 4 5 GA 18 18 19 19 48 73 80 105 HA 39 39 48 58 45 52 88 88 I 12 12 12 12 20 15 18 23 J 40 40 50 60 68 105 145 165 K 28 38 48 58 68 93 118 143 KA 91 123 166 191 NA 4 4 4 4 8 8 8 8 M 78 78 88 98 114 146 189 214 Z 77 77 87 97

CV/MVGQ

110 135 160 25 37.5 50 75 100 12.5 185 125 17 72 32 36 85 97 110 135 160 25 37.5 50 75 100 190 12.5 125 41 46 19 77 90 102 115 140 165 25 37.5 50 75 100 Long stroke type includes ones for strokes more than 301 mm. 10-15-21 22 Series CVM5 Axial Foot Style (L) Bore size Stroke CVM5L Manual override Width across flats B1 Width across flats B2 Width across flats NA Mounting hole S + Stroke

ZP

M6 x 1 I: M8 x 1 Y U C U C U C U C U C ZPR20 20 ZPR40 40 23 14 28 25 15 43 18.5 32 42.8 60.6 25 86.5 15 76.5 6.5 3.3 1.7 29 39.8 57.6 83.5 73.5 4 ZPR50 ZPR25 25 50 53 19.5 33 43.8 61.6 87.5 77.5 7.5 3.8 1.8 ZPR32 29.5 32 35 14.5 40.3 58.1 84 74 4.5 2.3 Deep Deep Model A B C D E F Y G H G H I: M6 x 1 I: M8 x 1 Model A B C D E F Y G H G H I: M6 x 1 I: M8 x 1 ZPR40D 40 43 29 42.5 53.3 71.1 97

IDG

.: J (NPT thread: K inch) Purge air for dehumidification Purge air for dehumidification (Maintenance space 100 mm or more) Option: P Port size L A B C D E Model F G J H K 97 224 8 119 [126] 5/16 114 249 10 147 [154] 3/8 IDG10/10H IDG20/20H Values inside [ ] are for NPT threads. 83 187 53 165 62 113 212 54 190 82 1/4, 3/8 14-19-30 27 Series IDG Membrane Air Dryer Single Unit Type IDG30/50

CV/MVGQ

110 135 160 25 37.5 50 75 100 72 12.5 17 185 125 32 85 97 110 135 160 25 37.5 50 75 100 36 77 12.5 19 190 125 41 46 90 102 115 140 165 25 37.5 50 75 100 Long stroke type includes ones for strokes more than 301 mm. 10-15-21 22 Series CVM5 Axial Foot Style (L) Bore size Stroke CVM5L Manual override Width across flats B1 Width across flats B2 Width across flats NA Mounting hole S + Stroke

REA/REB

Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-P S + Stroke LW EA EB HC HP HA H HB NT HT NL HG PP W A N 8 Z + Stroke Square nut for body mounting J TW (mm) HP MM HT J LW LL L M HG HC HB HA H EB EA Model A REAH15 REAH20 REAH25 42 8 19 M5 x 0.8 71.5 44 106 M5 x 0.8 17 45 33.5 33.5 46 21 26.5 97

Free Mount Cylinder

Model 40 50 60 70 80 90 100 49 (59) 55 (65) 61 (71) C(D)UK6-D Symbol Specifications -XB9 Low speed (10 to 50 mm/s) 71 (81) 79 (89) 87 (97) C(D)UK10-D -XB13 Low speed (5 to 50 mm/s) -XC19 Intermediate stroke (with a spacer built-in) 102 (132) 114 (144) 126 (156) C(D)UK16-D 243 (284) 267 (308) 291 (332) 315 (356) 339 (380) C(D)UK20-D 405 (460) 440 (495) 475 (530) 510 (565) 545 (600) C(D)

MHS

74 118 187 335 500 750 1270 (1) N 16 28 47 82 130 204 359 525 780 1320 () mm 4 4 6 8 8 12 16 20 24 32 g 60 100 140 237 351 541 992 1,850 3,340 6,460 1) 1625 =20mm 3263 =30mm 80125 =50mm 0.5MPa MHS4 MHS4 -16D MHS4 -20D MHS4 -25D MHS4 -32D MHS4 -40D MHS4 -50D MHS4 -63D mm 16 20 25 32 40 50 63 MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 10 19 31 55 88 140 251 1 N 12 21 35 61 97

SFOD-OMT0009CN

. / . 96 13.1 . 96 13.2 . 97 13.3 . 97 13.4 . 98 13.5 . 99 13.6 . 100 14. . 100 14.1 / . 100 14.2 . 101 14.3 . 102 3 No.SFOD-OMT0009CN-B 14.4 . 102 14.5 . 102 14.6 . 103 14.7 . 103 15. . 104 15.1 . 104 15.2 . 106 1. . 108 1.1 LEY/LEYG . 108 1.2 LEFS . 108 1.3 LES(H) . 109 1.4 LEP . 109 1.5 LEFB . 110 1.6 LER . 110 1.7 LEH . 110 4 No.SFOD-OMT0009CN-B JXC73/83 Series/

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

Series MHSJ3 Models/Specifications MHSJ3-16D MHSJ3-20D MHSJ3-25D MHSJ3-32D MHSJ3-40D MHSJ3-50D MHSJ3-63D MHSJ3-80D Model Cylinder bore size (mm) 16 20 25 32 40 50 63 80 Air Fluid 0.1 to 0.6 0.2 to 0.6 Operating pressure (MPa) Ambient and fluid temperature (C) 10 to 60 Repeatability (mm) 60 Max. operating frequency (c.p.m.) 120 30 Not required Lubrication Double acting Action 9 21 36 62 97

C95

TE TH TL Z TD TS TO TT TU TX TR TY 35 45 45 60 60 75 74 97 109 130 150 184 12 16 16 20 20 25 50 63 75 90 110 132 10 12 12 14 14 17 46 52 65 75 95 114 62 80 80 100 100 120 47 60 60 80 80 100 8.5 10 10 15 15 15 C95-S03 C95-S04 13 17 17 22 22 24 62 80 92 110 130 158 7 9 9 11 11 13.5 49 58 71 87 110 136 95 106.5 122 129.5 150 160 12 17 17 20 20 26 45 60 60 70 70 90 32 40 50 63 80 100 C95-S06

CL

Bore e f 1 to 50 68 72 72 77 51 to 100 81 85 85 90 101 to 150 93 97 97 102 151 to 200 106 110 110 115 201 to 300 131 135 135 140 301 to 400 156 160 160 165 401 to 500 185 185 190 51 to 100 25 25 25 25 101 to 150 37.5 37.5 37.5 37.5 151 to 200 50 50 50 50 201 to 300 75 75 75 75 301 to 400 100 100 100 100 401 to 500 125 125 125 1 to 50 12.5 12.5 12.5 12.5 20 25 32 40 68 72 72 77 35 35 35

Air Fittings & Tubing

F (mm) Port B min. port size Weight (g) L2 L3 L4 L5 L6 P Q1 Q2 M L1 89 110 99 125 108 139 40 KM12-04-02-6 6 17 65 72 81 91 97 112 1 4 10 18 29.5 19.5 29 10.6 16 6 12 4 61.5 KM12-04-02-10 10 KM12-06-02-6 6 KM12-06-02-10 10 KM12-08-03-6 6 KM12-08-03-10 10 47 1 4 17 10 19.5 31.5 21.5 31 13 17 7.5 13.5 6 73 55 3 8 19 11.5 22.5 35.5 24 34.5 15.5 18.5 9 14.7 8 86 SKM, #7 to #12 KM13 Tube O.D.

VFR

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% System Components Solenoid valve System Silencer Speed controller SPG (Steel pipe) dia. x Length 10A x 1 m Series VFR4000 Rc 3/8 Series VFR4000 Rc 3/8 AS4000-03 (S = 21 mm2) AN300-03 (S = 60 mm2) A AS420-03 (S = 73 mm2) 10A x 1 m AN300-03 (S = 60 mm2) B 15A x 1 m Series VFR4000 Rc 1/2 AN400-04 (S = 90 mm2) AS420-04 (S = 97 mm2) C

VFS

side Direct manual override D side Pilot valve manual override 2n-Rc , 1 2 3 4 R 1 1 2 Stations 250 250 D side U side Exhaust cleaner (Option) D side mounting U side mounting 4-Rc 1 8 n: Stations 2-Rc 3 4 Stations L L1 L2 Formula L1 = 51 x n + 92 L2 = 51 x n + 110 2 194 212 3 245 263 4 296 314 5 347 365 6 398 416 7 449 467 8 500 518 9 551 569 10 602 620 ( ): 2(B)/4(A) port Rc 3/4 3-8-96 97

Table of Contents

VQ1000 (VV5Q17)-Plug Lead Unit, Cassette Type (F, P, T, S kit) . 3 3 4 9 10 10 11 12 12 14 16 18 20 22 28 30 32 32 33 34 34 35 36 61 62 64 65 67 68 70 36 37 38 38 40 44 48 52 56 74 74 75 76 76 78 80 82 84 86 89 92 94 96 97 100 104 104 106 108 110 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-

KJ

(inch) H (Width across flats) Mounting plate thickness 11 mm or less Connection thread Min. port size Connection thread UNF L Mounting hole Weight (g) M Model 2-Applicable tubing KQ2E01-00 KQ2E03-00 KQ2E05-00 KQ2E07-00 KQ2E09-00 KQ2E11-00 KQ2E13-00 1 8 1 2 17.46 32.5 32.5 34 34.5 38 42.5 44.5 13.5 13.5 15 15 20 23 26 26 26 33 33 52 70 97 15.5 16 16.5 17 18.5 21 22 2.5 3 3.5 4.6 6 7 9.6 -20

Free Mount Cylinder for Vacuum Series ZCUK

Unit: g Model Bore size (mm) Cylinder stroke (mm) 5 10 15 20 25 30 40 50 63 (68) 69 (79) 75 (85) 81 (91) 87 (97) 93 (103) 10 103 (128) 163 (193) 115 (145) 127 (157) 139 (169) 151 (181) 16 180 (214) 300 (340) 348 (388) 396 (436) 204 (244) 228 (267) 252 (292) 276 (316) ZC(D)UKC 20 577 (636) 655 (714) 304 (358) 499 (558) 343 (402) 382 (441) 421 (480) 460 (519) 25 514 (587) 814 (892) 934