Air Slide Table Series MXQ

MXQ25-30 MXQ25-125 MXQ25-100 MXQ25-75 MXQ25-40 MXQ25-100 MXQ25-125 MXQ25-150 MXQ25-100 MXQ25-125 MXQ25-150 MXQ25-150 MXQ25-100 MXQ25-125 0.06 0.08 MXQ25-30 MXQ25-50 MXQ25-50 MXQ25-30 MXQ25-50 MXQ25-125 0.08 0.06 MXQ25-20 MXQ25-20 0.04 MXQ25-20 0.04 MXQ25-10 MXQ25-10 0.04 0.02 0.02 0 0 0 100 200 300 400 500 100 200 300 400 500 800 200 400 600 Load (N) Load (N) Load (N) D-X Individual -X 97

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

120 4-M12 x 1.75 thread depth 15 20 80 12.5 16.5 Cable entry side Work piece mounting reference plane 8H10 depth 8 Body mounting reference plane 212 160 Z section detail 63.5 63 Stroke + 204 (table movement range) 194.5 Z section 31.5 110 3.3 69 113 105 A section 5.8 1.7 4.8 Stroke + 430 170 8-9 A section detail (Switch groove) 20 110 (T-slot pitch) 80 11.5 76 4-8H10 depth 5 45 Stroke + 97

Single Axis Electric Actuator Series LJ1H

120 4-M12 x 1.75 thread depth 15 20 80 12.5 16.5 Cable entry side Work piece mounting reference plane 8H10 depth 8 Body mounting reference plane 212 160 Z section detail 63.5 63 Stroke + 204 (table movement range) 31.5 194.5 Z section 110 3.3 69 113 105 A section 5.8 1.7 Stroke + 430 170 4.8 A section detail (Switch groove) 8-9 20 110 (T-slot pitch) 80 11.5 76 4-8H10 depth 5 45 Stroke + 97

High Vacuum Angle Valve, XL Series

97 66 G 23 25.5 28 H 56 66 72 72 28 G 39 41 43 H 48 58.5 64 64 43 G 92 95 97 H 48 58.5 64 64 97 J 59 62 66 41(51) 46.5(57) 46.5(57) 50(66) 8.5 11.5 11.5 11.5 22 25 25 25 20 23 25.5 25.5 56 61 61 65 64 75.5 82 82 30 35 40 40 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S

Compact Rotary Actuator Series CRQ2

Applicable model: D-A73, A73H, A73C, C73, C73C, E73A, Z73 D-R73, R73C, 97, 93A, A93, A93V D-A33, A34, A33A, A34A, A44, A44A D-A53, A54, B53, B54 2) When using a 2-color indicator type auto switch (D-A79W, A59W and B59W), the auto switch will constantly remain ON if the connections are reversed.

LG1H

Operating temperature range (C) Work load (kg) Maximum speed (mm/s) Positioning repeatability (mm) Motor Encoder Lead screw Guide Motor/Screw connection Model 5.3 6.1 6.9 7.7 5 to 40 (No condensation) Performance 30 500 0.02 AC servo motor (100 W) Incremental system/Absolute type Main parts Ground ball screw 15 mm, 10 mm lead High rigidity direct acting guide With coupling LECS(Refer to page 97

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

N.O. 10-SYJ714M 140 (80) 1/8 Base mounted (with sub-plate) 10-SYJ724M 135 (75) 136 (76) 157 (97) 10-SYJ714M 1/4 10-SYJ724M Note) Value for DC. Add 3 g for AC. ( ): Without sub-plate. 627 3 Port Pilot Solenoid Valve 10-SYJ700 Note) AC-type models that are CE-compliant have DIN terminals only.

0.4

A A A A A A (12) (7.5) P = 10.5 31.4 18.1 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread C8 [1(P) SUP port] C8: 8 One-touch fitting 2 L n Dimensions Formula L1 = 10.5n + 44.5, L2 = 10.5n + 62.5 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 (L3) (L4) 65.5 76 86.5 97

Manifold Specifications

VV5Z5-20Station 1 (4(A), 2(B) port) 2n-Rc 1/8 Grommet (G), (H) (Pitch) 4-4.5 (Mounting hole) VK VZ VF VFR 6-Rc 1/8 (1(P), 3/5(R) port) PE port (Pilot EXH) VP4 VZS Manual override (Non-locking) G: 300 mm H: 600 mm VFS (Lead wire length) VS4 VQ7 EVS VFN (mm) Stations L1 L2 15 306 294 14 287 275 13 268 256 12 249 237 11 230 218 10 211 199 9 192 180 8 173 161 7 154 142 6 135 123 5 116 104 4 97

CQ2

across flats K 11 Lead wire minimum bending radius 10 D D 22 Z M E Auto switch K M L B L+ stroke D-A7, A8 E J S A+stroke Rod end male thread Rod end male thread (mm) A Without auto switch A With auto switch Rod end nut Rod end nut 2-H1 Bore (mm) 50st. or less 55 to 75 80 to 100 50st. or less 55 to 75 80 to 100 87.5+ stroke 97.5+ stroke 32 172.5 197.5 172.5 197.5 C1 C1 Auto switch D-A9, F9 97

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

For details about the rod end nut and accessory brackets, refer to page 7-6-20. 31.5 35 41 47.5 57.5 67.5 55.5 62 77 90 114 134.5 9 depth 7 9 depth 7 11 depth 8 5 to 100 5 to 100 10 to 100 10 to 100 10 to 100 10 to 100 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 3/8 Rc 3/8 16 16 20 20 25 30 60 69 86 103 132 156 14 14 17 17 22 27 14 depth 10.5 17.5 depth 13.5 17.5 depth 13.5 7-6-97 98 Compact Cylinder:

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

depth 4.4 2-M5 x 0.8 4-M4 x 0.7 2-M4 x 0.7 thread depth 6 M5 x 0.8 x 10l CXS15 9 10 58 20 56 18 2-M5 x 0.8 45 25 5 30 8 48 10 10 M6 x 1.0 x 5l 38.5 thread depth 8 thread depth 5 Dimensions by Stroke (mm) Symbol SS Z ZZ Stroke 10, 15 20, 25 30, 35, 40, 45, 50 60, 70, 75 90, 100 25 30 20 15 100 80 10 35 40 45 50 60 70 75 80 90 40 45 35 30 25 20 15 100 10 50 60 70 75 80 90 Model CXS10 CXS15 97

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

10 9.5 M6 x 1.0 M10 x 1 Rc 1/8 5.6 40 70 90 38 73 16.5 25.5 90 87 115 10 11 M6 x 1.0 M14 x 1.5 Rc 1/8 7 40 70 100 42 73 16.5 25.5 0.5 1 90 97 115 12 11.5 M8 x 1.25 M20 x 1.5 Rc 1/8 8.7 40 75 122 50 91 18.5 28.5 0.5 1 110 119 138 12 10.5 M8 x 1.25 M20 x 1.5 Rc 1/4 8.7 65 105 145 64 99 20.5 35.5 1 1 120 142 155 PA dimensions are for split from center.

JXCx-OMU0004

bit_0 ON(1) IN1 ON OFF [3] BUSY ON [4] BUSY ON IN03 bit_1 IN2 ON OFF OFF IN2 [5] BUSY OFF bit_2 OUT03 ON IN3 ON OFF [6] OUT03 ON IN0 bit_3 ON1 (2) RESET ON OFF [7] BUSY ON OUT03 STOP ON OFF OFF [8] BUSY ON IN0 OFF [9] BUSY OFFOUT 0 OUT0 ON OFF ON bit_0 [10] 2 1 OFF ON OUT1 bit_1 OUT2 ON OFF bit_2 OUT3 ON OFF bit_3 OFF ON BUSY OFF ON ALARM 0 46 No.JXC-OMU0004-A 9.2 .3435 53 97

JXCx-OMT0062

Controller and its peripheral devices /Specific product precautions . 95 19.1 Design and selection . 95 19.2 Handling . 95 19.3 Installation . 96 19.4 Wiring . 96 19.5 Power supply. 97 19.6 Ground . 97 19.7 Maintenace . 97 20. Troubleshooting . 98 21. Memory map list . 104 22.

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

Lead wire length indication Note 1) Applicable auto switch with 5 m lead wire (Z) Reed switch: D-B53/B54, DC73(C)/C80C, D-A73(C)(H)/ A80C, D-A53/A54, D-Z73, D90/97/90A/93A Solid state switch: Manufactured upon receipt of order as standard.

0.4

P.98 P.99 P.95 P R D side U side Silencer (For EXH port) Individual SUP spacer SSQ1000-P-4EXH block plate SSQ1000-B-R Port plug VVQZ100-CP C6 L6 P.97 P.98 P.99 P.95 P R D side U side Individual EXH spacer SSQ1000-R-4Back pressure check valve (-B) SSQ1000-BP Built-in silencer, direct exhaust (-S) Special wiring specifications (-K) C6 L6 P.97 P.98 P.105 P.96 D-sub connector Terminal no.

Magnetically Coupled Rodless Cylinder

B Counter bore depth C T Y HT HP 2-P (Piping port) Note 1) 22 8 TC X F 14 WP 12.5 19.5 D 13 WS GP GW PW QW 4-LD 30 Plug 12.5 2 x 4-MM Thread depth M Switch rail HR HS CR W K CY3RG15 2-P (Piping port) Plug G G Z + Stroke Q + Stroke CY3RG25, 32, 40 CY3RG10 Note 1) 50, 63: L 0 0.2 CY3RG20 (mm) HB 14 17 21 23.5 29 36 45 51 HA 24 30 36 41 52 62 80 92 H 26 32 39 44 55 67 85 97 D 12 16.6 21.6 26.4

Clamp Cylinder Series CK1

Dog fitting -X 20 30 Individual -X 97 42.5 Material: Rolled steel 1327 Series CK1 Option Foot 49 Foot 40 45 Part no. Applicable clamp cylinder Option symbol 6 Clevis pin 9 60 CK-L04 Series CK1A Series CK1B L 12 60 48 Material: Rolled steel Note 1) A spring washer for the mounting bolt (hexagon socket head cap screw) will be attached as a standard for the foot bracket.

2-Apr-01 Quick Reference Auto Switch Chart with (PnP) M-8 (3 pin) & M-12 (4 pin) Connectors, Page 1/2 32, 40, 50, 63, 80 & 100 Bore sizes (Auto Switch Spacer # BMP1-032 required) 32, 40, 50, 63, 80, 100, 125 & 200 Gripper Bore sizes (sizes depend on seri

Applicable models: D-A73, A73H, A73C, R73, D-97, 93A, A93, A93V, D-A53, A54. MHZ2 rMount a switch at the center of the operating range. MHZJ2 Adjust the mounting position of an auto switch so that the piston stops at the center of the operating range (the range in which a switch is ON.)