Specification: Clean Series, Vacuum Suction Type, Special Treatment on Guide, Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 20mm, Adjuster: Rubber Stopper, Both Ends, Functional Option: -, Auto Switch: -, Lead Wire: -, Number: -

Specification: Copper, Fluorine and Silicon-free + Low Particle Generation, Vacuum Suction Type, Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 20mm, Adjuster: Rubber Stopper, Both Ends, Functional Option: -, Auto Switch: -, Lead Wire: -, Number: -

Specification: 13 (Clean Series, Vacuum Suction Type, Special Treatment on Guide), Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 20mm, Adjuster: A (Rubber Stopper, Both Ends), Functional Option: Standard Type, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: L (3m)

Specification: 13 (Clean Series, Vacuum Suction Type, Special Treatment on Guide), Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 20mm, Adjuster: A (Rubber Stopper, Both Ends), Functional Option: Standard Type, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal

Specification: 22 (Copper, Fluorine and Silicon-free + Low Particle Generation, Vacuum Suction Type), Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 20mm, Adjuster: A (Rubber Stopper, Both Ends), Functional Option: Standard Type, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: Z (5m)

Bore Size: 12mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 20mm, Adjuster: A (Both Sides Adjusters/Rubber Stoppers), Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)

Specification: Clean Series, Vacuum Suction Type, Special Treatment on Guide, Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 20mm, Adjuster: Rubber Stopper, Both Ends, Functional Option: Standard Type, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 3m, Number: -

Specification: Clean Series, Vacuum Suction Type, Special Treatment on Guide, Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 20mm, Adjuster: Rubber Stopper, Both Ends, Functional Option: Standard Type, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: -, Number: -

Specification: Copper, Fluorine and Silicon-free + Low Particle Generation, Vacuum Suction Type, Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 20mm, Adjuster: Rubber Stopper, Both Ends, Functional Option: Standard Type, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 5m, Number: -

Table of Contents

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Table of Contents

Body type Plug-in type VVFS2000-20A-1 Non plug-in type VVFS2000-20A-2 Part no. Body type Plug-in type VVFS2000-22A-1 Non plug-in type VVFS2000-22A-2 Part no.

2/3 Port Valve

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

VFR

Body type Plug-in type Non plug-in type 1 8 Plug-in type Non plug-in type Body type VVFS2000-20A-1 VVFS2000-20A-2 Part no. Body type Plug-in type Non plug-in type VVFS2000-10A Part no.

7

F 24 VDC 1/2 G DIN terminal 24 VDC L M 5 20A C37 N.C. With surge voltage suppressor 3/4 20 H 100 VAC C N.O. Stainless steel J 110 VAC 6 25A N.C. N P C37 Stainless steel 25 1 K 200 VAC D N.O. L 230 VAC 7 32A N.C. Q CAC408 35 32A Flange M Conduit terminal 24 VDC E N.O. With surge voltage suppressor N 100 VAC 8 40A N.C. R CAC408 40 40A Flange P 110 VAC F N.O. Q 200 VAC 9 50A N.C.

VFS

Body type Plug-in type VVFS2000-20A-1 Non plug-in type VVFS2000-20A-2 Part no. Body type Plug-in type VVFS2000-22A-1 Non plug-in type VVFS2000-22A-2 Part no.

SY

Port size M5 x 0.8 Rc 1/8 Rc 1/4 SY3000 SY3000-39-20A SY5000 SY5000-39-1A SY7000 SY7000-39-1A SY3000 SY3000-38-20A SY5000 SY5000-38-1A SY7000 SY7000-38-1A Rc 1/4 SY9000 SY9000-39-1A Rc 1/4 SY9000 SY9000-38-1A Series Round head combination screw Gasket Note 1) The SUP port can be on the lead wire side or end plate side for SY3000/5000/7000.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Port size M5 x 0.8 SY3000 SY3000-38-20A(-Q) SY5000 SY5000-38-1A(-Q) SY7000 SY7000-38-1A(-Q) E5 5 SY3000 SY3000-39-20A(-Q) SY5000 SY5000-39-1A(-Q) SY7000 SY7000-39-1A(-Q) EXH port (Both sides) 1 8 1 4 SY9000 SY9000-39-1A(-Q) 1 4 1 8 1 4 SY9000 SY9000-38-1A(-Q) 1 4 P1 1 SUP port Note) In case of 20P and 23P, for protection of the wiring unit section from drainage, piping at the EA port should

HRS100/150

HECR Circulating fluid return port Rc3/4 HEC Barrel nipple 20A 144 HEB Y-strainer (40 mesh) 20A HED Flow direction HEA Y-strainer (20A) (Accessory) IDH Barrel nipple (20A) (Accessory) 107 HRS100/150 Series Standard Type Recommended External Piping Flow External piping circuit is recommended as shown below. 7 Thermo-chiller 2 Facility water outlet (Water-cooled refrigeration) Facility water

Thermo-chiller

/Japanese 1 pc.), Y-strainer 20A 1 pc., Barrel nipple 20A 1 pc., Drain pan for the pump 1 pc.