for 100°C), Switch Part Number: No auto-switch (no magnet), Number Of Switches: -, Seal Material: FKM (Formula No.: 1349-80), Body Surface Treatment: External: hard anodized aluminum, Internal: base material, Seal Change Location: None, Length of Lead Wire for Switch(m): -

XMH/XYH Series

),CF KF(NW) KF(NW),CF KF(NW) Flange type XYH KF(NW) KF(NW) KF(NW) Main material Body: SCS13 (SUS304), Bellows: SUS316L,, Main part: SUS304 and FKM (standard sealing material) Operation torque 0.1 or more 0.15 or more 0.35 or more 0.5 or more Number of handle rotations 5 7 10 13 XMH 0.31 (0.35) 0.57 1.35 (1.71) 2.02 Mass kg Note 4 XYH 0.62 1.37 2.42 Note1) XYH-16 is not available.

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

XMA XYA M9N 16 A A M9N 25 Angle type In-line type q w e r t y u w Flange type q Flange size XMA Type KF (NW) K (DN) CF Symbol Nil D C Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA XYA Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 e Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Rear flange surface Right

XLAQ/XLDQ

Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature (C) 5 to 60 (High-temperature type: 5 to 150) Atmospheric pressure to 1 x 10-6 Operating pressure (Pa) (abs) Conductance (L/s) Note 1) 5 14 45 80 Internal 1.3 x 10-10 at normal temperatures (in case of standard material, FKM), excluding gas permeation Leakage (Pam3/s) External Flange type KF (NW

Magnet: D (Built-in Magnet), Mounting: D (Double Clevis), Bore Size: 50mm, Thread: Rc, Stroke: 100mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: N (Pivot Bracket), Rod End Bracket: W (Double Knuckle Joint)

Magnet: D (Built-in Magnet), Mounting: D (Double Clevis), Bore Size: 63mm, Thread: TN (NPT), Stroke: 100mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: N (Pivot Bracket), Rod End Bracket: W (Double Knuckle Joint)

Magnet: Built-in Magnet, Mounting: Double Clevis, Bore Size: 63mm, Thread: NPT, Stroke: 100mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: Pivot Bracket, Rod End Bracket: Double Knuckle Joint, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Made to Order: -

Cylinder, MWB, Tie Rod, TIE ROD CYLINDER W/LOCK, O08, 8.00000 lb

XLJ- -*G1 Series 25 40

Direction of exhaust Fixed Note 1 Operating pressure Pa (abs) Atmospheric pressure to 110-2 Conductance l/s Note 2 12 45 Operating power voltage 100VAC, 200VAC,110VAC,220VAC,230VAC,240VAC,24VDC,12VDC Electrical entry Grommet Pam3/s Internal 1.3 x 10-8 Leakage at ambient temperature, excluding gas penetration External 1.3 x 10-6 at ambient temperature, excluding gas penetration Type of flange KF(NW

Flange Size: 50, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: 2 (Refresh), Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)

Flange Size: 50, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: 2 (Refresh), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: Z (5m), Number: A (2pcs, Valve Open/Closed)

Flange Size: 80, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: 2 (Refresh), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: Z (5m), Number: A (2pcs, Valve Open/Closed)

Flange Size: 40, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 60°C, Version: 2 (Refresh), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: B (1pc, Valve Open)

Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 50, Flange Type: KF (NW), Valve Direction: F (w/Indicator, Left Flange Surface), Version: 2 (Refresh), Auto Switch: M9// (w/o Auto Switch w/Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: G [Grommet (Lead Wire Length 300mm)], Surge Suppressor: S (w/

Flange Size: 40, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: 2 (Refresh), Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: L (3m), Number: A (2pcs, Valve Open/Closed)

Valve Type: XYA (In-line Type, Normally Closed, Bellows Seal), Flange Size: 40, Flange Type: KF (NW), Port Direction: A (w/Indicator, Flange Side; w/Indicator, Rear Flange Surface), Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: , Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: L (3m), Number: A [2 pcs (Valve Open/Closed)]

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 50, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 25, Flange Type: KF(NW), Port Direction: K (w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface)

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 50, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 40, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)