Cylinder (Tube) Inner Diameter(φ): 300, Stroke(mm): 500, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: No, Valves: Presence, Cushion: Without cushion, Operating Pressure(MPa): 0.05 to 0.97, Port thread type: Rc, Auto Switches: Without auto

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 10, Stroke(mm): 500, Max. Load Mass (Horizontal Mounting)(kg): 0.05~0.8, Table Size Length L(mm): 38, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 26, Table Size Height H(mm): 27, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 15, Stroke(mm): 500, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 53, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 32, Table Size Height H(mm): 33, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 20, Stroke(mm): 500, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 62, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 39, Table Size Height H(mm): 39, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 25, Stroke(mm): 500, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 70, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 44, Table Size Height H(mm): 44, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 25, Stroke(mm): 500, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 70, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 44, Table Size Height H(mm): 44, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 32, Stroke(mm): 500, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 76, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 55, Table Size Height H(mm): 55, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 40, Stroke(mm): 500, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 90, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 67, Table Size Height H(mm): 65, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 50, Stroke(mm): 500, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 110, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 85, Table Size Height H(mm): 83, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 63, Stroke(mm): 500, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 118, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 97, Table Size Height H(mm): 95, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Magnet: None, Mounting: Center Trunnion, Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 180mm, Thread: NPT, Stroke: 500mm, Option: w/o Cushion, Cylinder Switch Type: -, Lead Wire or Pre-wired Connector: -, Number: -, Lock Unit Built-in Magnet: -, Lock Unit Switch Type: -

Magnet: None, Mounting: Center Trunnion, Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 250mm, Thread: NPT, Stroke: 500mm, Option: w/o Cushion, Cylinder Switch Type: -, Lead Wire or Pre-wired Connector: -, Number: -, Lock Unit Built-in Magnet: -, Lock Unit Switch Type: -

Magnet: None, Mounting: Center Trunnion, Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 200mm, Thread: NPT, Stroke: 500mm, Option: w/o Cushion, Cylinder Switch Type: -, Lead Wire or Pre-wired Connector: -, Number: -, Lock Unit Built-in Magnet: -, Lock Unit Switch Type: -

Magnet: Built-in, Mounting: Double Clevis, Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 140mm, Thread: NPT, Stroke: 500mm, Option: w/o Cushion, Cylinder Switch Type: -, Lead Wire or Pre-wired Connector: -, Number: -, Lock Unit Built-in Magnet: -, Lock Unit Switch Type: -

Magnet: Built-in, Mounting: Double Clevis, Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 160mm, Thread: NPT, Stroke: 500mm, Option: w/o Cushion, Cylinder Switch Type: -, Lead Wire or Pre-wired Connector: -, Number: -, Lock Unit Built-in Magnet: -, Lock Unit Switch Type: -

Magnet: None, Mounting: Double Clevis, Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 200mm, Thread: NPT, Stroke: 500mm, Option: w/o Cushion, Cylinder Switch Type: -, Lead Wire or Pre-wired Connector: -, Number: -, Lock Unit Built-in Magnet: -, Lock Unit Switch Type: -

Magnet: Built-in, Series: Non-rotating, Mounting: Single Clevis, Bore Size: Ø40, Port Thread: Rc, Stroke: 500mm, Rod Boot: w/o Gaiter, w/o Cushion, Cushion: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

pressure Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 14 45 Leakage Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperature, excluding gas permeation Flange type KF(NW

XL-OMY0002

25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 13 XL-OMY0002 8 X L D 25 M9N A A ( X A N1 A ) 25 40 B A 50 63 80 C P11 160 100 FKM() P8 KF (NW

High Vacuum L Type Valve

Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW