CLA

DIHerMI 15 90 ,00 11 0 With 2 surface D-85 sWitches Same 75 90 '00 surface 110 D-B6 DiHerem jS+5~ go+l ~ D-GS l DO+'~r" 110... 10~ D-KS With n surface .1'1::1 .2,3,4 ... nz4.8.12. n= ...,e.l :t: n=o4,a .I 2..18. swifches Same 75..SO(~) 90+50/11-2) HlOo..so;.21 110+50 (n-2) I surface n",2,3,4, .. ~, "' .S.8 1"O:2.4,6.L n--2,4 ,6.8 ...

SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

Prevents Micro-Bubbles

LVA LVH A R P 3 port N.C. PA LVD N.C.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

2 @7 t y o u @8 r #2 @1 @2 @5 @4 @3 CY1HT32 @6 Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 No. !8 !

High Purity Chemical Valve

Symbol A R P 4 Metric sizes 03 04 06 3 4 6 Valve type N.C. 0 N.C.

Electric Actuators

6N q w e r t y u i o !

CY1

7 e #3 #4 @1 @2 r t #1 @9 !2 o !1 #0 !4 #2 !3 !

Vacuum Unit

pages 11 and 12, and r on page 13.)

Table of Contents

Male thread type Body size Port size R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 Body size Port size R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 Part no.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

from both sides of R port.

Modular Type Filter Regulator Series AW

r r u u u Drain Drain Drain Parts list Material No.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

R.

CKZ2N

Bore size A002 C A A001 50 63 80 Equivalent to 50 mm Equivalent to 63 mm Equivalent to 80 mm L arm L side position R arm R side position Cylinder port Nil TF NPT G Arm mounting position (A, B, C, D) Note 1) See below Arm Mounting Position. Arm Mounting Position: A, B, C, D A B C D Arm opening angle 30 45 60 75 90 105 120 135 30 45 60 75 90 105 120 135 denotes tool attachment surface.

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

CG1

, 100, 125, 150 25, 50, 75, 100, 125, 150, 200 Option Double knuckle joint (with pins) 25, 50, 75, 100, 125, 150, 200, 250, 300 Order Made Made to order 40/50/63 Pins and snap rings for double knuckle joint are included, not mounted.

Series SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

Single Axis Electric Actuator Series LJ1H

Nil W Axial Right Left Top Bottom F R L T B Cable length Motor specification 2m 3m 4m 5m 2 3 4 5 Motor output Standard motor Matsushita Electric Industrial Co., Ltd.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(A) 2 1 (P) 3 (R) Rubber seal type VQZ200 300 / Metal seal type 3 2 1 3 2 1 N.C. N.C. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) 3 2 1 3 2 1 N.O. (A) 2 N.O. (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Parts list No.

/

r r !

MGC

-X 20Front mounting flange Data 2-P R Y + Stroke Y R P Bore size (mm) 20 88 14 Rc 1/8 25 88 14 Rc 1/8 32 90 14 Rc 1/8 40 101 15 Rc 1/8 50 116 16 Rc 1/4 Dimensions other than the above are the same as those on pages 8-22-14 to 8-22-25. 8-22-7 8 Series MGC Slide Bearing Allowable End Load and Deflection MGCM20Stroke -R MGCM25Stroke -R MGCM32Stroke -R (Slide bearing type) (Slide bearing type