Mounting: Basic Style, Bore Size: 40mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 350mm, Option: Rear Plate, Auto Switch: B53--Reed, DC Volt >5 <24, LED, Lead Wire, Lead Wire or Prewired Connector: 5m, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Mounting: Basic Style, Bore Size: 40mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 100mm, Option: Rear Plate, Auto Switch: H7A2--Solid State, Gen. Purpose, 3 Wire PNP, Lead Wire, Lead Wire or Prewired Connector: 3m, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Mounting: Basic Style, Bore Size: 40mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 200mm, Option: Rear Plate, Auto Switch: B54--Reed, DC Volt >5 <24, AC Volt <200, LED, Lead Wire, Lead Wire or Prewired Connector: 3m, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Mounting: Basic Style, Bore Size: 40mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 250mm, Option: Rear Plate, Auto Switch: B53--Reed, DC Volt >5 <24, LED, Lead Wire, Lead Wire or Prewired Connector: -, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Mounting: Basic Style, Bore Size: 40mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 250mm, Option: Rear Plate, Auto Switch: H7BW--Solid State, 2-color Indication, 2 Wire, Lead Wire or Prewired Connector: 3m, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Mounting: Basic Style, Bore Size: 40mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 300mm, Option: Rear Plate, Auto Switch: H7A2--Solid State, Gen. Purpose, 3 Wire PNP, Lead Wire, Lead Wire or Prewired Connector: 3m, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Mounting: Basic Style, Bore Size: 40mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 500mm, Option: Rear Plate, Auto Switch: H7BW--Solid State, 2-color Indication, 2 Wire, Lead Wire or Prewired Connector: 3m, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Mounting: Basic Style, Bore Size: 40mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 350mm, Option: Rear Plate, Auto Switch: H7A2--Solid State, Gen. Purpose, 3 Wire PNP, Lead Wire, Lead Wire or Prewired Connector: 5m, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Mounting: Basic Style, Bore Size: 40mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 700mm, Option: Rear Plate, Auto Switch: C73C--Reed, DC Volt >5 <24, LED, Connector, Lead Wire or Prewired Connector: -, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

CG5-S

R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 6 6 8 8 10 10 12 12 <R type> <R type> 16 16 KGS Extended Male Elbow KGW Hexagon Socket Head Male Connector Applicable tubing O.D.

Series AK1000

Refer to gauge guide (P.94,95). 2P 3P t r t Sample Order Number Port t AK1510S e q 4 4 4 4 w 4 4 4 4 r w w q q 2P 3P 4PL 5PC MPA MPA MPA 1 1 1 0 0 40 e e 4PL 5PC qIN wOUT eExtra bottom port (Outlet) rGauge port (Inlet) tGauge port (Outlet) Specifications AK1502 1 to 30 psig (0.007 to 0.2 MPa) AK1515 5 to 150 psig (0.034 to 1.0 MPa) Select compatible materials of construction for the gas AK1506

G15/G27

, 4 1 R 1 4 The dimensions in ( ): Connecting thread R X2: Stud parts nickle plated 8 1 R 8 1 R , 4 1 R 8 1 R , 4 1 R X3: Wetted parts stainless steel MPa 8 1 R 8 1 R , 4 1 R 8 1 R , 4 1 R X4: Oil-free (Wetted parts degreasing) 8 1 R 8 1 R , 4 1 R Note 1) Do not apply pressure more than the maximum display pressure.

0.4

-STA1) 120 80 4 46.2 ERR T/R RUN (35) 0 1 DIP SW.

CG5-S

R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 6 6 8 8 10 10 12 12 <R type> <R type> 16 16 KGS Extended Male Elbow KGW Hexagon Socket Head Male Connector Applicable tubing O.D.

53

Applicable model Minimum operating flow rate [L/min] HRS-BP005 HRSH090-ll-l 20 r t r e q To circulating fluid outlet r t w r Parts List No.

Valve Single Unit

S 5 VDC R 3 VDC 1-6-55 Manifold Specifications SS5X3-41 SS5X3-42 SS5X5-41 SS5X5-42 SS5X7-42 SX340 SX340(R) SX540 SX540(R) SX740(R) Single base/B mount Common SUP/Common EXH 2 to 20 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P(SUP)/R(EXH) Valve stations Note) Location Direction A, B Porting specifications P, EA, EB port Rc 1 4 Rc 1 4 M5 x 0.8

Series VQ Metal Seal/Rubber Seal Body Ported

VQ VQ4 Note) R block valve is mounted in the blocking position when ordering an individual EXH spacer incorporated with a manifold. When separately ordering an individual EXH spacer, separately order a R block valve. VQZ P R PR 1 2 0 1 P R PR Block valve VQD VQ 4 --Valve No.

Step Motor Driver （ Pulse input type ）

R 30 - PNP type (LECPAP-) Power supply for pulse signal Positioning unit side Inside of the driver Current limiting resistor R NP+ <3> 1k NP<4> 120 Current limiting resistor R PP+ <5> 1k PP<6> 120 Caution Be sure to install a current-limiting resistor R according to the pulse-train signal voltage.

Compact manifold regulator ARM5 Series

X 5.5 L3=50+R+V L4=50+T+X 50 SMC H H L L S S O O U U C C P P K K R 8 S U 57 (at knob locked) DIN rail part no.

Membrane Air Dryer

Outlet air flow rate 150 L/min [ANR] [Series IDG150 0.4 = 375 L/min [ANR] NO [Series IDG] 150 0.86 = 175 L/min [ANR] Confirmation of compressed Step 1 air supply capacity Inlet Air Temperature Correction Factor for Outlet Air Flow Rate Review operating conditions.