Aluminum High Vacuum Angle Valve

, 160 XLG q t y w e r u e Pilot port direction w Flange type q Flange size Symbol Nil K L M Pilot port direction Flange side Left flange surface Rear flange surface Right flange surface Size 16 25 40 50 63 80 100 160 Symbol Applicable flange 16, 25, 40, 50 63, 80, 100, 160 63, 80, 100, 160 Type Rear flange surface Nil KF (NW) Right flange surface Left flange surface D K (DN) E H V I G L H

5-Port Solenoid Valve

0 Manual override q w r e t y u i o !0 !

LJ1H

Direct Acting Ground Ball Screw 100 W 12 mm/12 mm lead Guide Series LJ1H10 How to Order 300 LJ1H10 F R 2 A1 PB S2 Auto switch Nil Without switch 1 2 3 4 5 6 NPN, A contact 1pc.

AS

(UL standard V-0) 40, 50, 63 1 2 AS421-04 R 63, 80, 100 Note) marking is electroless nickel plated, provided as standard.

AC Servo Motor Driver (CC-Link Type ）

Position data Speed Dwell Auxiliary Model adaptive control 1 1000 1000 80 80 0 0 Speed control 2 2000 2000 100 100 0 0 3 4000 2000 70 60 500 1 4 500 2000 60 70 1000 1 5 2000 80 80 0 0 1000 6 2000 1000 80 80 0 0 Position 7 1000 1000 80 80 0 0 control 8 1000 1000 100 100 0 0 LEC-MR-J3BAT MR-J3BAT 1000 1000 100 100 0 0 (Note 3) CN4 255 2000 2000 80 80 0 0 Position Optional battery (for absolute

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A + Stroke 7-6-17 18 Series CQ2/CDQ2 Dimensions: 63 to 100 Both Ends Tapped Style Basic style (Through-hole) Both ends tapped style: CQ2A/CDQ2A R R O1 thread Bore size (mm) R O1 63 80 100 M10 x 1.5 18 22 22 M12 x 1.75 M12 x 1.75 H thread effective depth C Q F 2-P 4-N Through-hole 8-O counterbore U (Port size) I D 22 11 M E Z Minimum lead wire bending radius 10 Auto switch D-A7, A8 With Boss

LEC-OM02704CN

5000.0 PB33 VRF1B 100.0 Hz 0.1 PB022 PB261 100.0 PB34 VRF2B 100.0 Hz 0.1 PB022 PB261 100.0 PB35 0.00 PB36 0.00 PB37 100 PB38 0 PB39 0 PB40 0 PB41 1125 PB42 1125 PB43 0004h PB44 0h PB45 0h 15 86 15 15.11.3 (PC) (1) PC01 0h PC02 *ZTY 0h PC03 *ZDIR 0001h PC04 ZRF 500 r/min PC05 CRF 10 r/min PC06 ZST 0 m PC07 0 PC08 1000 PC09 100 PC10 15.0 PC11 CRP 0 pulse PC12 JOG JOG 100 r

Magnetically Coupled Rodless Cylinder

Centralized piping on right R R L L R L Slide table actuation direction Centralized piping on left R L L R R L Slide table actuation direction 4. Never disassemble the magnetic component parts (external slider, internal slider) of the actuator (cylinder). If will cause decline of the holding force, etc. 2.

SYJ300/500/700

R port.

MGG

9 is type L only. r!1!6!7!8!9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!

Electric Actuator

Basic type/R type Series LESH;L Basic type/R type Series LES;R Series LES;L CAT.ES100-78 In-line motor type/D type In-line motor type/D type Max. work load (kg) Size Max. work load (kg) Stroke (mm) Stroke (mm) Size Series LES;D Series LESH;D 8 16 8 2 6 1 30, 50, 75 30, 50 75, 100 30, 50, 75 100, 125, 150 50, 75 50, 100 50, 100 150 16 3 25 9 25 5 Miniature Rotary Table Step Motor (Servo/24

AC Servo Motor Driver (CC-Link Type ）

Position data Speed Dwell Auxiliary Model adaptive control 1 1000 1000 80 80 0 0 Speed control 2 2000 2000 100 100 0 0 3 4000 2000 70 60 500 1 4 500 2000 60 70 1000 1 5 2000 80 80 0 0 1000 6 2000 1000 80 80 0 0 Position 7 1000 1000 80 80 0 0 control LEC-MR-J3BAT 8 1000 1000 100 100 0 0 MR-J3BAT 1000 1000 100 100 0 0 (Note 3) CN4 255 2000 2000 80 80 0 0 Position Optional battery (for absolute

Stability of suction position,

ZP3EA-P2 [Weight: 7.6 g] 10.3 27.4 10.3 20.3 R R 20 20 2.9 4.9 2.9 4.9 R R R R R R 23.5 19.5 31.6 26.5 Applicable pad part no. ZP3E-32UM ZP3E-40UM ZP3E-32BM ZP3E-40BM Applicable pad part no. ZP3E-50UM ZP3E-50BM Part no. ZP3EA-P3 [Weight: 17.7 g] Part no. ZP3EA-P4 [Weight: 31.1 g] 16.3 34.5 16.3 43.6 R R 4.9 7.9 4.9 7.9 15 15 R R R R R R R 50.5 41 39.8 32 Applicable pad part no.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

-r---r r-' !I -,zr n r y'~[ ~ ~I~@ ~ u Ll L4JE ItAII co ... ,,!

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W F R L T B None Axial Right Left Top Bottom 100/115VAC (50/60Hz) G 1 N.C. (B contact) 2 pcs.

SMC Basic Pneumatics

l . t ) J 63 |.235 t.542 r.850 2.158 2.465 EO t.93 2.487 2.983 3.4't9 3.975 100 3 .

%silltr

l . t ) J 63 |.235 t.542 r.850 2.158 2.465 EO t.93 2.487 2.983 3.4't9 3.975 100 3 .

Compact 5-Port Solenoid Valve

to 100 N Without pressure switch for vacuum/pressure sensor 100 to 100 i Option4 (For details on the Function/Application, refer to page 121.)

AC Servo Motor Driver

The speed is as indicated below for motorless operation of test operation. 0 0 r/min 1 to 50 Driver capacity [W] Servo motor speed [r/min] 100V class 100 to 400 3000 200V class 100 to 750 1k to 37k 2000 400V class 600 to 55k Analog speed limit maximum speed 0 0 5 35 5. PARAMETERS Used to set the speed at the maximum input voltage (10V) of the analog speed limit (VLA).

5 Port Solenoid Valve Series VQZ1000/2000/3000

SY100-82-3-05 SY100-82-3-06 SY100-82-2-01 SY100-82-2-02 SY100-82-2-03 SY100-82-2-04 Rated voltage 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC (115 VAC) 220 VAC (230 VAC) Voltage symbol 24 V 12 V 100 V 200 V 110 V 220 V Circuit diagram with light AC circuit DC circuit 1 2 1 2 NL: Neon light R: Resistor LED: Light emitting diode R: Resistor NL R R LED Fitting and Silencer Part No. for P, R Ports