Modular/F.R.L. Units Series AC

25-MLA [ISE35-R-25-M (Switch body only)] Note 4) NPN output/Wiring top entry ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] Note 4) PNP output/Wiring bottom entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] Note 4) PNP output/Wiring top entry Note 5) AD27 Y200 AKM2000-01 (02) IS1000M-20 Y210-01 (02) AD17 Y100 N.O.

CYV

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

AR Series Modular Type Regulator

r q w w Component Parts No.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

d 5 i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

Parallel Opening/Closing Type Gripper, XRAY Series

x-cov-450-50 xRAY-450-150 Weld SDatter Covers x-cov-450-r 50 To Mount 6.5mm Prox.

LG1H

Refer to pages starting with 181 for mounting. 3-8H10 depth 10 30 A B Stroke Model LG1H202PC-500-F LG1H202PC-600-F LG1H202PC-700-F LG1H202PC-800-F LG1H202PC-900-F LG1H202PC-1000-F 350 450 550 650 750 850 370 470 570 670 770 870 500 600 700 800 900 1000 95 B 100 95 8-6.2 110 95 20 95 A Positioning Time Guide Positioning time Positioning time (sec.)

Silencer 40 dB (A): High Noise Reduction Type Series ANA1

P 1 Silencer VEX Solenoid Tightening Torques for Silencers Applicable tightening torque (N.m) 12 to 14 Connection thread AN 1 4 22 to 24 3 8 28 to 30 1 2 28 to 30 3 4 36 to 38 40 to 42 1 4 1 2 48 to 50 48 to 50 R R R R R 1 R 1 R 1 R 2 Inlet pressure for silencer AMC 4.

AIR COMBINATION

25-MLAISE35-R-25-M (Switch body only)] Note 3 Digital pressure switch PNP output Wiring bottom entry ISE35-N-65-MLAISE35-N-65-M (Switch body only)] Note 3 PNP output Wiring top entry ISE35-R-65-MLAISE35-R-65-M (Switch body only)] Note 3 N.C.

Modular F.R.L. Unit

No indication is necessary for R; however, indicate N for NPT. Contact P/A regarding the connection thread NPT and pressure gauge supply for PSI unit specifications. Note 2) Includes one O-ring and 2 mounting screws. Note 3) Minimum operating pressure: N.O. type0.1MPa; N.C. type0.1MPa (AD27), 0.15MPa (AD37/47).

100

6 @2 r y w t e t @2 u i !0 @0 !5 y !9 ZL6 Without valve or pressure switch, Silencer exhaust ZL6 With valve and pressure switch, Port exhaust @1 !2 !3 !1 !6 !8 !7 q !4 r y w t e t u i @0 !5 y !9 Component Parts No. Description Material Note No.

AN

Model Model Model Port size R(PT) Effective area (mm2) Weight (g) Dimensions (mm) Weight Effective area Port size Model Dimensions (mm) R(PT) (mm2) (g) AN200-02 35 17 63 22 19 25 84 25 22 35 92 30 27 165 107 46 36 225 132 50 41 490 200 74 55 580 233 74 60 820 263 86 70 A B D A B D 1 4 1 4 AN202-02 35 16 64 22 19 33 84 28 24 47 95 34 24 AN300-03 60 3 8 AN302-03 60 3 8 AN402-04 90 1 2 AN400

VQ20/30

VX B 1 2 1 2 VX3 A VXA B NL R VN R LED B NL: Neon light R: Resistor LED: Light emitting diode R: Resistor LVC Caution LVA Valve Mounting After confirming the gasket is correctly placed under the valve, tighten the mounting screws with the appropriate torque (0.2 to 0.23 Nm).

Mounting: B (Basic Style), Bore Size: 25mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 450mm

Mounting: Basic Style, Bore Size: 25mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 450mm, Option: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

JXCx-OMU0004

P.24 6 I/O 7.1 P.256.3 P.21 10 No.JXC-OMU0004-A 3. 31 2 HB DC24V102 (1) * UL , UL1310 Class2 6 () 6 () 14 114E A/B 800p/r EEPROM LED LED/1 7 LED 1 7 3 16 10 [10][15][A][F] I/O 5m 20m [] 040 [%RH] 90 ) [] -1060 90 ) [RH] 50MDC500V 130g 150gDIN 1 2 37 LED 10 [10][15] 10 10 11 12 13 14 15 16 A b c d E F 11 No.JXC-OMU0004-A 3.2 PWR LED ON/ : ON/OFF : ALM ON/ ON/: LED

Air Slide Table

(Without stroke adjuster) Nil Without auto switch r Adjuster options t Auto switch Symbol Adjuster type*3 Adjuster mounting position*1 * For applicable auto switches, refer to the next page.

Clean Room Rodless Cylinder Series CYP ø15, ø32

Data L R S Piping Port Locaition Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

End Lock Cylinder Series CBG1

Rear trunnion type (mm) With front lock/R Bore size (mm) Rear trunnion type/CBG1T (with front lock-R only) Z (rear trunnion) ZZ (rear trunnion) With rod boot With rod boot Without rod boot Without rod boot 124 + l 145 + l 20 125 104 131 + l 152 + l 25 130 109 133 + l 157 + l 32 135 111 147 (154) + l 175 (182) + l 40 155 (162) 127 (134) 168 (179) + l 200 (211) + l 50 180 (191) 148 (159) Z