IDG

Purge air flow rate (l/min(ANR))(3) 2.5 12 25 50 75 125 125 150 190 6 Inlet air pressure (MPa) 0.7 Part no.

MNB

125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 187.5 187.5 701 to 750 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239 501 to 600 264 264 601 to 700 276 276 701 to 750 32 40 50 63 80 100 36

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken lines indicate DIN rail mount type [-D] and connector top entry [-JU].

CE

, 150 94 M5 x 0.8 16 5.2 25 15.5 69 15 6 25 42.5 25, 50, 75, 100, 125, 150, 175, 200 106 M8 x 1.25 10 8 28 25.5 78 15.5 10 36 53.5 Q R T V Y N O P Bore size (mm) 12 20 47 7 53.5 22 7 M4 x 0.7 M5 x 0.8 50 15 62.5 36 5 5.5 M6 x 1 M5 x 0.8 Refer to page 11 regarding the rod end nut which is included.

Series CE1

2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y MK/MK2 RSQ/RSG !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

from both sides of R port.

CS1

Description Mat'l Material Part No. 200 125 140 160 180 250 300 Rod cover Balck coated Rolled steel plate Lube style Head cover Black coated Rolled steel plate 125 to 160 Hard anodized Aluminum alloy @3 Wiper ring SDR-36 SDR-36 SDR-40 SDR-45 SDR-50 SDR-60 SDR-70 125 to 300 Cylinder tube e Carbon steel pipe Inside: Hard chrome plated PCS-85(R) @4 Cushion seal DSM-50S DSM-50S DSM-50S DSM-60S

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

) Dimensions L n 12 182.5 197 225 235.5 11 171 185.5 212.5 223 10 159.5 174 200 210.5 9 148 162.5 187.5 198 8 136.5 151 175 185.5 7 125 139.5 162.5 173 6 113.5 128 150 160.5 5 102 116.5 137.5 148 4 90.5 105 125 135.5 3 79 93.5 125 135.5 2 67.5 82 112.5 123 1 56 70.5 100 110.5 L1 L2 L3 L4 2-3-19 Kit (Serial transmission unit) S Manifold Specifications Porting specifications Maximum number

Cylinder with Lock Series CLS

Rod Series CLS 125, 140, 160 How to Order CLS L 125 125 100 100 A93 Standard Type CDLS A93 A53 With Auto Switch L With auto switch Cylinder unit auto switch type Mounting brackets Number of auto switches B Basic type Tube material Nil Without auto switch L Foot type 2pcs.

CG5-S

X165US inch rod option dimensional changes R V Integral clevis type (E)/CG5ENS Dim.

Best Pneumatics Vol. 14

r r u u u Drain Drain Drain Component Parts Material No.

VQ7-6/7-8

0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

VFR

2, Metal joint q, w, Gasket B r, Guard !3, Steel ball !2 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Resin Body SYJ (A) 2 Aluminum/NBR Spool valve w Pilot valve VK e 1 (P) 3 (R) VQZ100-12A Resin/Aluminum P, R plate r r VZ VT VQZ200/300 VT Metal seal Rubber seal VP r e w q r e w q VG VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

LEC-OM07605CN

PA10] ON DB RD ONRDON SA OFFSAOFFSAON ((X0.05)+20)r/min 20r/min VLC VLCONOFF ZSP ZSPON[Pr. PC07] 1) OFF 70 r/min 2) 3 20 r/min ON 50 r/min () [Pr. PC07] 0 r/min [Pr. PC07] ON -50 r/min 20 r/min OFF () -70 r/min 4 ZSP ON () OFF 50r/min(1)ZSPON 70r/min(2)ZSPOFF 50r/min(3)ZSPON-70r/min(4)ZSPOFF ZSPON 2Or/min 3 16 3.

Modular F.R.L. Unit

Note 2) Use a bushing (part no: 131368) when connecting R 1/8 pressure gauge to R 1/16 gauge port. Note 3) Not applicable to AW10. Accessory part no.

Series IDG

) With dew point indicator 1 10/2.5 3 25/6 50/12 100/25 200/50 300/75 500/125 600/125 750/150 1000/190 5 S Standard equipment 10 20 30 50 60 75 100 Note) In case of two or more options, indicate them in alphabetical order.

Compact

l-en load,o f * t__i-r i l u i I I I l ; l 5 t 6 t i ] F ? {C $mies L)(P tleslric Actrfllor$ It|odd $slediru ltleiludl Operating conditions when LXP is used as lifter Working fange to linear bail bearing. Use within allowable thrust. Lateral load allowance zoo T---*J-rf I I T---r -tl l r ) = _ 1 ) , 4 \ t l 1 -;-) 50 to 100 stroke 75 | 2.47 1oo I zJt 125 1 5 0 ' , , e 1'rC ' "; ?

MXS Series Air Slide Table

0 50 100 150 200 160 120 80 40 200 0 0 100 150 200 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 20 20 20 Lr=122mm 0.040 0.05 0.10 0.035 MXS20-125 MXS20-150 MXS20-100 MXS20-150 MXS20-75 MXS20-50 MXS20-40 MXS20-30 MXS20-20 MXS20-10 0.04 0.08 MXS20-125 MXS20-150 MXS20-100 MXS2075 MXS2050 MXS2040 MXS20-125 MXS20-100 0.030 Table deflection mm Table deflection mm Table