Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

sides n = 2, 3, 4 n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 2, 4, 6, 8 (n 2) 2 100 + 100 Same side 100 + 100 (n 2) n = 4, 6, 8 n = 2, 3, 4 1 pc. 75 90 80 10 Different sides 35 75 90 80 Same side 55 75 90 80 90 + 30 (n 2) 35 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) Different sides D-A44 n = 2, 3, 4 n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 2, 4, 6, 8 55 + 50 (n 2) 75 + 50 (n 2) 80 + 50 (n

Vacuum System Peripherals:

Nil DC: 1 W (With indicator light: 1.05 W) None With light/surge voltage suppressor (Possible only solenoid valve connector type.)

ITV

Return 0.4 0.3 0.5 0.5 AV 0.2 0.1 0 2 6 4 8 1.0 0 25 50 75 1.0 AU 0.0 10 0 25 50 75 100 100 Input signal (%F.S.) Repetition Input signal (%F.S.)

Compact Hydraulic Cylinder

Hydraulic Fluid Compatibility Standard Strokes Bore size (mm) Standard strokes (mm) Hydraulic fluid Compatibility 20 Standard mineral hydraulic fluid 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Compatible 32 W/O hydraulic fluid 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Compatible 40 O/W hydraulic fluid 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Compatible 50 Water/Glycol hydraulic fluid

RHC

I 11 JC 58 K 75 LD 7 H 11 GA 80 FA 16 EA 23 D 62 C 20 B 53 A 70 E Bore size (mm) Stroke range (mm) 50 Eff. thread length 32 -X Up to 1200 35 0 63 11 72 75 7 11 80 16 23 58 20 60 Up to 1200 80 35 32 55 0.074 0 2080 13 89 78 10 13 90 20 23 61 25 75 Up to 1400 95 40 37 65 0.074 0 100 16 110 80 10 13 95 20 25 63 30 90 Up to 1500 116 40 37 80 0.074 0 Data ZZ Y 6.8 to 11.3 WH 335 X 10 P 30 S 1

ZP

Construction Series ZPT Series ZPR Series ZPY r Buffer r Buffer y Adaptor e Adaptor e Adaptor r Buffer t Adaptor Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com w Lock ring w Lock ring w Lock ring q Pad q Pad q Pad q Pad With buffer With buffer With buffer Component

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

(g) n: Number of stations W = 30n + 50 W = 37n + 63 W = 61n + 101 W = 79n + 127 W = 100n + 151 Note 1) For 10 stations or more (5 stations or more in case of SS5Y7), supply pressure to P port on both sides and exhaust from EA and EB ports on both sides.

Free Mount Cylinder Series CU

Note 4) ( ) in column W is the dimensions of D-A93.

MXW Series Long Stroke Slide Table

My Mp W W L2 B2 W C2: Correction value for moment center distance L1 A2 L3 C2 My (mm) A2: Correction value for moment center distance MXW 8 MXW12 MXW16 MXW20 MXW25 23 29 37 49 63 B2: Correction value for moment center distance (mm) Mr (mm) W Mp 10 10 14 20 28 W MXW 8 MXW12 MXW16 MXW20 MXW25 39 48 58 75 97 MXW 8 MXW12 MXW16 MXW20 MXW25 W Dynamic moment Moment due to impact of load at end

MVGQ

Enclosure Dustproof Grommet (G)/(H), L plug connector (L), M Plug connector (M) RS Q G Electrical entry RS H A 24, 12, 6, 5, 3 DC Coil rated voltage (V) 100, 110, 200, 220 AC50/60 Hz Standard Stroke RZQ 10% of the rated voltage Allowable voltage (W) (2) (%) Model Standard stroke (mm) 0.5 (With indicator light: 0.55) Power consumption DC MI W S M L MVGQ 12/16 10, 20, 30, 40, 50, 75, 100 0.9

Cylinder with Lock Series MNB

75 75 75 75 75 136 144 152 152 164 164 41 23 51 25 51 25 56 29 61 29 151 to 200 ZZ Bore size (mm) 1 to 50 244 259 289 303 363 383 51 to 100 256 271 301 315 375 395 101 to 150 269 284 314 328 388 408 201 to 300 319 334 364 378 438 458 301 to 400 344 359 389 403 463 483 401 to 500 414 428 488 508 501 to 600 513 533 601 to 700 525 545 701 to 750 32 40 50 63 80 100 231 246 276 290 350 370

CG5-S

(G) T0403 Colour symbol -20 T1075 Colour symbol -100 Black (B) Black (B) Clear (C) Clear (C) 10 7.5 3 White (W) White (W) Orange (YR) Orange (YR) T1209 Colour symbol -100 Black (B) Black (B) Black (B) Black (B) 12 9 White (W) White (W) White (W) White (W) T1613 Colour symbol -100 Red (R) T0604 Black (B) Red (R) Red (R) 16 13 4 TU0604 TU0604 Blue (BU) Colour symbol -20 White (W) Blue (BU)

Basic type / Direct mount type Series CY3B/CY3R

D 2.8 x P 0.3 x Wcos + Wsin D 5.0 x P 0.3 x W + W D 5.0 x P W W > Wv P > Pv Determination of allowable load mass & pressure Inclined operation (For vertical operation, refer to page 1193.)

0.4

W) High-pressure type (1.0 MPa, 0.95 W) Negative common External pilot Nil (R1)5 1 (P) 3(R2) 1(P) 5(R1) 3(R2) N.C.

0.

(A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) q w e r q w e r N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

5 Port Solenoid Valve Series VQZ1000/2000/3000

W) High pressure/External pilot type (Metal seal type only) KR Note 1, 2) (0.9 W) Note 1) Option Note 2) For details on external pilot type, refer to page 966.

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 For XLF/XLG Symbol Changed part*2 Leakage [Pam3/s or less]*1 Internal External Nil None 1.3 x 1010 (FKM) 1.3 x 1010 (FKM) A w, e, r 1.3 x 108 1.3 x 108 B w, e 1.3 x 108 1.3 x 1010 (FKM) C r 1.3 x 1010 (FKM) 1.3 x 108 D w 1.3 x 108 1.3 x

IDU/IDF

Note 4) Options "T" and "W" are not available for IDF37C, 55C and 75C-4/6.

ISO Standard Hydraulic Cylinder

1 w !

CG5-S

(G) T0403 Color symbol -20 T1075 Color symbol -100 Black (B) Black (B) Clear (C) Clear (C) 10 7.5 3 White (W) White (W) Orange (YR) Orange (YR) T1209 Color symbol -100 Black (B) Black (B) Black (B) Black (B) 12 9 White (W) White (W) White (W) White (W) T1613 Color symbol -100 Red (R) T0604 Black (B) Red (R) Red (R) 16 13 4 TU0604 TU0604 Blue (BU) Color symbol -20 White (W) Blue (BU) Blue