._3d_items_collection = {}; } SMC KQ2P-11 fitting, plug, KQ2 FITTING (sold in packages of 10; price is per piece) $1.61 + Add to Quote Add To Cart Add to Cart SMC SJ3000-155-

._3d_items_collection = {}; } SMC KQ2P-07 fitting, plug, KQ2 FITTING (sold in packages of 10; price is per piece) $0.92 + Add to Quote Add To Cart Add to Cart SMC SX3000-145-

Add to Cart SMC SY5000-221-3A screw, NEW SY3000 MFLD*** $3.48 + Add to Quote Add To Cart Add to Cart SMC SY5000-221-5A

SMC EX500-S103 si unit, 16/32 output, EX500 SERIAL INTERFACE UNIT $190.00 + Add to Quote Add To Cart Add to Cart SMC KQ2P-06 fitting, plug, KQ2 FITTING (sold in packages of 10

Add to Cart SMC SY5000-221-3A screw, NEW SY3000 MFLD*** $3.48 + Add to Quote Add To Cart Add to Cart SMC SY5000-221-5A

Add to Cart SMC SY5000-221-3A screw, NEW SY3000 MFLD*** $3.48 + Add to Quote Add To Cart Add to Cart SMC SY5000-221-5A

Add to Cart SMC SY5000-221-3A screw, NEW SY3000 MFLD*** $3.48 + Add to Quote Add To Cart Add to Cart SMC SY5000-221-5A

._3d_items_collection = {}; } SMC KQ2P-11 fitting, plug, KQ2 FITTING (sold in packages of 10; price is per piece) $1.61 + Add to Quote Add To Cart Add to Cart SMC SX3000-145-

Add to Cart SMC SY5000-221-3A screw, NEW SY3000 MFLD*** $3.48 + Add to Quote Add To Cart Add to Cart SMC SY5000-221-5A

Electric Actuator

to 500 10 LEFS16 100 to 400 10 4 5 to 250 5 Series LECP6 20 7.5 12 to 500 12 LEFS25 100 to 600 20 15 6 to 250 6 Step motor Series LECP1 (Servo/24 VDC) 40 10 16 to 500 16 Ball screw drive LEFS32 100 to 800 45 20 8 to 250 8 Series LECPA o0.02 Page 2 50 20 to 500 20 LEFS40 200 to 1000 Clean room compatible 60 23 10 to 250 10 7 2 10 to 500 10 LEFS16A 100 to 400 10 4 5 to 250 5 Servo motor (

7ND9071en

mm or 3/8" [6 mm or 1/4" (x)] 4.1 4.1 13 2.3 140 3/8 10 mm or 3/8" 17 4.3 262 1/2 10 mm or 3/8" 3.6 3.6 20 5.4 330 1/2 10 mm or 3/8" 5.0 5.0 25 10.5 610 1/2 10 mm or 3/8" 9.5 9.5 32 21 1282 3/4 10 mm or 3/8" 18.0 18.0 40 43 2624 3/4 10 mm or 3/8" 35.0 35.0 50 84 5126 1 10 mm or 3/8" 67.0 67.0 60 121 7380 1 10 mm or 3/8" 75 189 11500 1 10 mm or 3/8" 502 195 11900 1 10 mm or 3/8" 130.0

70pvpump

LVD Refer to the separate pamphlet P-E00-5A for further details.

Brake mechanism added

0 0 4.5 0 2 9.5 8 ML2B 3.5 1.5 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 8.5 7.5 6 5 2.5 3 9 4.5 6.5 14 12.5 1.5 2 8 3.5 5.5 13 11.5 12 10 9.5 7.5 6 6.5 4.5 8 10 17.5 16 4 4.5 12.5 6 8 15.5 14 13.5 12.5 11 10 7.5 8 14 9.5 11.5 19 17.5 6.5 7 13 8.5 10.5 18 16.5 D-A9 and D-A9V cannot be mounted on 50.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Pushing completed position End position 50 - 10.

Step Motor Controller (Servo / 24 VDC)

Product Specifications 3.1 Basic specifications The basic specifications of this controller are as follows: Item Specifications Compatible motor Step Motor (Servo / 24 VDC) Power voltage: 24 VDC +/-10% Max. current consumption: 3A (Peak 5A) *3) Power supply *1) *2) (for both of motor drive power control power, stop, lock brake release) Parallel input 11 inputs (photo-coupler isolation) Parallel

High performance type Step Motor Controller (Servo/24 VDC)

Product Specifications 3.1 Basic specifications The basic specifications of this controller are as follows Item Specifications Compatible motor Step Motor (Servo / 24 VDC) Power voltage: 24 VDC +/-10% Max. current consumption: 3A (Peak 5A) *2) Power supply *1) (for both of motor drive power control power, stop, lock brake release) Parallel input 11 inputs (photo-coupler isolation) Parallel

Compact manifold regulator ARM5 Series

IN side OUT side Fitting size Straight Elbow Elbow Elbow Straight Elbow Elbow Elbow R S T U V W X Y 4, 5/32 2.5 6 11 35.5 6 3 12.5 19 35.5 3 6.5 11 36 1/4 3 12.5 19 35.5 6.5 6 11.5 38.5 8, 5/16 5 13.5 21 38.5 ARM5AB Centralized supply type (DIN rail mount) n = Number of stations for regulator block L2 L2-10.5 L1=(14 x n)+56 11.5 Y Pressure gauge (Accessory) 10 10 14 14 16 10 10 5.3 W V T

pa

LVD Refer to the separate pamphlet P-E00-5A for further details.

Ejector Valve Unit, Series ZYY/ZYX

10 -20 -20 -20 -20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 0 0 0 5 10 15 20 25 Supply pressure MPa Suction flow rate l/min (ANR) Supply pressure MPa Suction flow rate l/min (ANR) ZY -10S Max. vacuum pressure: 84KPa {630mmHg} Y3 X3 ZY -10L Max. vacuum pressure: 53KPa{400mmHg} Y3 X3 Exhaust characteristics Flow rate characteristics Exhaust characteristics Flow

Ejector Valve Unit Series ZYY/ZYX

-20 -20 10 -20 0 0 5 10 15 20 25 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 Supply pressure (MPa) Suction flow rate (l/min(ANR)) Supply pressure (MPa) Suction flow rate (l/min(ANR)) ZY -10S Y3 X3 ZY -10L Y3 X3 Exhaust Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics -100 -100 -100 -100 Suction flow rate (l/min(ANR)) Air consumption