Symbol: 07R6 (2 Port, N.C.), Function: Standard, Voltage: 6 (12VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: None, Lead Wire Length: 150mm, CE Compliant: Q (CE Compliant)
Symbol: 2 Port, N.C., Function: Standard, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Reverse Mounting Prevention Pin: None, Lead Wire Length: 150mm, CE Compliant: CE Compliant
Symbol: 2 Port, N.C., Function: Standard, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Lead Wire Length: 150mm, CE Compliant: CE Compliant
Symbol: 2 Port, N.C., Function: Standard, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Reverse Mounting Prevention Pin: None, Lead Wire Length: 150mm, CE Compliant: CE Compliant
Symbol: 2 Port, N.C., Function: Standard, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Lead Wire Length: 150mm, CE Compliant: CE Compliant
Symbol: 2 Port, N.C., Function: Standard, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Reverse Mounting Prevention Pin: None, Lead Wire Length: 150mm, CE Compliant: CE Compliant
Symbol: 2 Port, N.C., Function: Standard, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Lead Wire Length: 150mm, CE Compliant: CE Compliant
Symbol: 2 Port, N.C., Function: Standard, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Lead Wire Length: 150mm, CE Compliant: CE Compliant
Symbol: 2 Port, N.C., Function: Standard, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Reverse Mounting Prevention Pin: None, Lead Wire Length: 150mm, CE Compliant: CE Compliant
Symbol: 2 Port, N.C., Function: Standard, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Lead Wire Length: 150mm, CE Compliant: CE Compliant
Symbol: 2 Port, N.C., Function: Standard, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Lead Wire Length: 150mm, CE Compliant: CE Compliant
Symbol: 2 Port, N.C., Function: Standard, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Reverse Mounting Prevention Pin: None, Lead Wire Length: 150mm, CE Compliant: CE Compliant
5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 @9 #3 @8 @7 o @0 !6 i !9 !8 u o @0 !7 i !9 !
Note Description SY940 M2: 0.15Nm M3: 0.6Nm M4: 1.4Nm SY5000-27-1*-Q Rc 1/4: SY7000-27-1*-Q Rc 3/8: SY7000-27-2*-Q SY3000-27-1*-Q Rc 3/8: SY9000-27-1*-Q Rc 1/2: SY9000-27-2*-Q 6 Die-cast aluminum Sub-plate *Thread Pilot valve assembly Refer to "How to Order Pilot Valve Assemblies" on page 1.2-32.
-6 U4 For 4 soft tubing M-5AU-4 U6 For 6 soft tubing M-5AU-6 H Model A B C D 2 E F G H J K Vacuum inlet direction q Pad dia.
Note Description SY940 M2: 0.16 Nm M3: 0.8 Nm M4: 1.4 Nm Aluminum die-casted 1 4 3 8 3 8 1 2 SY5000-27-1 (-Q) : SY7000-27-1 (-Q) : SY7000-27-2 (-Q) SY3000-27-1 (-Q) : SY9000-27-1 (-Q) : SY9000-27-2 (-Q) Sub-plate Note) 6 Pilot valve assembly Refer to How to Order Pilot Valve Assembly on page 130.
37 42 15 21 24 7 10 17 14.5 5 28 5 14 6 12 6h9 -0.03-0 3 Part No P Q R SA SB SC TB UA UB VA VB WA MHS3-16D M3x0.5 6 25 3.4 6.5 8 5 M3x0.5 4.5 2H9 0~0.025 2 17H9 0~0.043 MHS3-20D M5x0.8 7 29 3.4 6.5 9.5 6 M3x0.5 6 2H9 0~0.025 2 21H9 0~0.052 MHS3-25D M5x0.8 8 34 4.5 8 10 6 M4x0.7 6 3H9 0~0.025 3 26H9 0~0.052 Part No XA XB MHS3-16D 2H9 0~0.025 2 MHS3-20D 2H9 0~0.025 2 MHS3-25D 3H9 0~0.025 3
Pressure 0.7 MPa PM: Raised up to 0.43 MPa 6 x 6 pcs. 6 x 10 pcs. 6 x 8 pcs. 6 x 10 pcs. 6 x 8 pcs. 6 x 10 pcs. 6 x 10 pcs. Flow rate Q (Nl) Flow rate Q (Nl) Tube 2,000 Tube 2,000 mm 500 mm 6 x 8 pcs. 6 x 8 pcs. 500 mm 500 mm mm 6 x 6 pcs. 6 x 6 pcs. 6 x 6 pcs. 6 x 6 pcs.
Chemical valve, CHEMICAL VALVE, 2 PORT, B07, 0.007 lb
[mm] Model D Weight [g] X Y O N Thickness Nylon Urethane Q Q 2 x O 3.2 KQ2T23-00A1 7.1 6.7 9.5 14.9 18.5 13.3 5.4 6 3.2 7.1 3.4 2.9 2.5 2.3 4 KQ2T04-00A1 8.2 7.7 10 15.3 19.4 13.3 5.7 6 3.2 8.2 6.4 4.4 3 2.8 6 KQ2T06-00A1 10.4 9.7 12 16.3 21.5 13.3 6.8 6 3.2 10.4 13.4 10.6 4.5 3.8 2 x N M Q L1 L2 Q D D L1 M L1 M Release button dimensions X Y Different Diameter Tee: KQ2T D1 2 x Applicable