5 Port Solenoid Valve Series SV1000/2000/3000/4000

VQC 50 51 52 53 54 55 56 57 58 59 Connector cable for M12 waterproof connector (Female side) L dimension 723 735.5 748 760.5 773 785.5 798 810.5 823 835.5 VQZ Mass (g) 130.1 132.4 134.6 136.9 139.1 141.4 143.6 145.9 148.1 150.4 No. 60 61 62 63 64 65 66 67 68 69 Connector manufacturers' example Correns Corp. OMRON Corp. Yamatake-Honeywell Corp. Hirose Electric Co., Ltd. DDK Ltd.

Refrigerated Air Dryers Series IDF/IDU

I D F IDF-BP317 IDF-BP318 IDU-BP336 IDU-BP337 4.4 7.7 4.5 8.0 928 980 1465 1635 1783 1918 405 198 134 46 70 445 550 93 64 I D U Port size (mm) IDU-BP338 12.3 110 530 53 2 Mass (kg) Applicable dryer IDF55E IDF75E Port size Rc A Part no. 1191 1291 IDF-BP325 2 12.3 53 Optional Accessories Dimensions IDU8E to 15E [Bypass piping set] (D) (E) (F) (B) (A) Compressed air outlet Port size Compressed

LEC-OM02704CN

CC-Link PC07() 5 53 5 5.6.12 DOGZ Z (1) /(RYn6) RYn6 18 (RYnARYnERY(n2)3RY(n2)5) RYnARYnERY(n2)3RY(n2)5 (2) (RY(n2)A) RY(n2)A DOGZ PC02 ADOG Z PC03 5.6.1(2) PC04 DOG PC05 DOG PC06 Z 1 1 PC07 5 54 5 (2) /(RYn6) ON OFF 0 4 ms ON (RYn1) OFF 6ms ON (RYn2) OFF 0r/min 3ms ON Z OFF ON (RXn2) OFF ON (RXnC) OFF (RXn3/ZP) ON OFF .

LEC-OM069xx

4.9.1 Hard Wire Base Block (HWBB) Function.4-53 4.9.2 External Device Monitor (EDM1).4-60 4.9.3 Application Example of Safety Functions.4-62 4.9.4 Confirming Safety Functions.4-63 4.9.5 Connecting a Safety Function Device.4-64 4.9.6 Precautions for Safety Function.4-65 5.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

88.5 M16 x 1.5 25 9 73 73 53 20 50 28 17 17 M10 x 1.5 20 12 22 30 19 73 63 11 55 194 10 60 95 M18 x 1.5 28 8 80 80 60 22.4 55 30 17 17 M10 x 1.5 22 12 25 30 21 80 80 13 65 212 12 75 115 M22 x 1.5 32 8 100 100 75 28 65 32 22 20 M12 x 1.75 26 14 29 35 26 90 100 13 80 234 14 90 139 M27 x 2 38 6.5 118 118 90 35.5 80 35 27 19 M12 x 1.75 27 14 34 35 34 100 125 15 100 250 16 112 170 M27 x 2 38

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

2-Rc P Effective thread GA3 3 GB3 A K F NA H NB Air release Air release Air release S + Stroke ZZ + Stroke W I (mm) Effective thread length (mm) Bore size (mm) Stroke range (mm) A B1 B2 D E F GA1 GA2 GA3 GB1 GB2 GB3 H H1 H2 I 20 18 13 26 10 8 16 10 12 12 8 10 10 41 5 8 31 25 to 300 15.5 25 22 17 32 12 10 16 10 12 12 8 10 10 46 6 8 34 25 to 400 19.5 32 24 22 38 16 14 19 11 13 13 8 10 10 53

3 Port Solenoid Valve Series SYJ300/500/700

35.5 59.6 [66.6] Approx. 300 (Lead wire length) 62.8 [65] 53 [55.2] 61.9 54.5 48 Refer to the page 68 for dimensions with connector cable.

Suction Guard (Produced upon receipt of order) FHG Series

53 53 74 74 74 3.7 3.7 3.7 7.4 7.4 7.5 Weight values are for the minimum T dimension (symbol 1) in each standard T dimension.

Battery-less

400 Positioning repeatability [mm] 0.015 0.08 0.02 0.02 0.01 0.05 0.05 Drive motor Step motor V V V V V V V 8 V 16 V V V V V 25 V V V V V V V Size 32 V V V V 40 V V V 8 2 (6) 16 15 (4) 1 35 (8) 35 (7.5) 8 (12) Max. work load [kg] The values in parentheses are for when mounted vertically. 25 30 (15) 10 70 (30) 70 (29) 12 (20) 5 (5) 12 (4) Size 32 50 (20) 19 80 (43) 80 (41) 40 65 (23) 90 (53

Round Type Hydraulic Cylinder

LS + Stroke ZZ + Stroke LX LZ (mm) Effective thread length (mm) Bore size (mm) Stroke range (mm) A B1 B2 D F GA GB H H1 H2 I K LD LH LS LT LX LZ MM N NA NB NC 20 Up to 800 15.5 18 13 26 10 16 12 8 41 5 8 30 5 7 25 121 5.5 40 55 M8 x 1.25 13 26 19 15 25 Up to 800 19.5 M10 x 1.25 22 17 32 12 16 12 8 46 6 8 32 5.5 7 28 121 5.5 40 55 13 28 19 15 32 Up to 800 21 M14 x 1.5 24 22 38 16 19 12 8 53

Cylinder with Lock

Bore size [mm] Appropriate tightening torque of the lock unit holding bolt [Nm] 32 1.35 to 1.65 40, 50 4.7 to 5.7 63 11.3 to 13.7 80 22.1 to 26.9 100 37.8 to 46.2 53 MWB-UT Series Specific Product Precautions Be sure to read this before handling the products. Refer to the back cover for safety instructions.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Note 3) Make sure to indicate the type of solenoid valve when ordering. 3 5 F2 (When double solenoid is mounted) (mm) C2 C3 C1 Model (size) A1 A2 B1 B2 B3 D1 D2 E1 E2 F1 F2 G R CVRB1BW50 CVRB1BW63 CVRB1BW80 CVRB1BW100 120 (136.5) 60 (61) 82.5 78 67 18 36 2.8 12 24 11.5 30 52 (53) 104 (120.5) 25 1/8 102 (136.5) 60 (61) 82.5 98 82 18 36 2.8 16 24 11.5 30 52 (53) 104 (120.5) 27.5 1/8 140 (155

100

flow rate Air consumption Air consumption 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Supply pressure [MPa] Supply pressure [MPa] Standard supply pressure: 0.33 MPa (Without valve) 0.35 MPa (With valve) Time to Reach Vacuum Tank capacity: 1 L Flow Rate Characteristics 100 90 80 70 60 50 40 30 20 10 0 90 Vacuum pressure reached 80 kPa Vacuum pressure in tank [kPa] 80 Vacuum pressure [kPa] 66 kPa 70 60 53

Vacuum Pad: Ball Joint Type

ZPT20F20 22 13 15 32 36 36 12.5 15.5 10.5 13 27.5 ZPT16F-B5 ZPT25F5 9 8 12 14 2 25 28 16 18 ZPT32F32 36.5 36.5 13 16 32 35 40 50 B8 01 ZPT F(Without buffer/Female thread) Hexagon width across flats P N NL Hexagon width across flats 19 F D C Y 2.5 A B Dimensions (mm) N: 1/8 (Rc, NPT, NPTF) N: M8 x 1.25 Model A B C D F NL P F P ZPT40F12.5 18.5 39 39 40 43 8 12 14 ZPT50F13.5 19.5 40 40 50 53

CRB2/CRBU2/CRB1

(mm) C2 F2 D1 G C3 A1 A2 B1 B2 B3 C1 D2 E1 E2 F1 R Model (size) CVRB1BW 50 CVRB1BW 63 CVRB1BW 80 CVRB1BW100 120 (136.5) 104 (120.5) 12 25 60 (61) 78 67 18 36 2.8 82.5 24 11.5 30 52 (53) 1/8 102 (136.5) 104 (120.5) 16 27.5 60 (61) 98 82 18 36 2.8 82.5 24 11.5 30 52 (53) 1/8 140 (155) 124 (139) 17 36 70 (71) 110 95 22 48 4 100 29 14 38 62 (63) 1/8 140 (155) 124 (139) 23.5 42.5 70 (71) 140 125

Table of Contents

Note 3) Make sure to indicate the type of solenoid valve when ordering. 3 5 F2 (When double solenoid is mounted) (mm) C2 C3 C1 Model (size) A1 A2 B1 B2 B3 D1 D2 E1 E2 F1 F2 G R CVRB1BW50 CVRB1BW63 CVRB1BW80 CVRB1BW100 120 (136.5) 60 (61) 82.5 78 67 18 36 2.8 12 24 11.5 30 52 (53) 104 (120.5) 25 1/8 102 (136.5) 60 (61) 82.5 98 82 18 36 2.8 16 24 11.5 30 52 (53) 104 (120.5) 27.5 1/8 140 (155

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Note 3) Make sure to indicate the type of solenoid valve when ordering. 3 5 F2 (When double solenoid is mounted) (mm) C2 C3 C1 Model (size) A1 A2 B1 B2 B3 D1 D2 E1 E2 F1 F2 G R CVRB1BW50 CVRB1BW63 CVRB1BW80 CVRB1BW100 120 (136.5) 60 (61) 82.5 78 67 18 36 2.8 12 24 11.5 30 52 (53) 104 (120.5) 25 1/8 102 (136.5) 60 (61) 82.5 98 82 18 36 2.8 16 24 11.5 30 52 (53) 104 (120.5) 27.5 1/8 140 (155

LFE-OMZ0011

The operation for unlocking the key differs depending on the security code request [F81] (page 53).

HRX-OM-W038

5.19.1 Communication function . 5-53 5.19.2 Communication function setting and checking . 5-53 Chapter 6 OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-W038 Contents 6.3 Option T [High-pressure

JXCx-OMY0006

Operation Instructions 53 13.1 Overview of the Operation Instructions 53 13.2 Operation procedure for Operation by Step No. 53 [1] Power on and Return to Origin position 53 [2] Positioning operation 54 [3] Pushing Operation 55 [4] HOLD 55 [5] Reset 56 [6] Stop 56 [7] Area output 57 13.3 Operation procedure for Operation by numerical instruction 58 14.