20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021250/20Ball screwLinear guide5 to 4090 or less (No condensation)100 W/;40AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)4514528445Non-magnetizing lock1316.324 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021250/20Ball screwLinear guide5 to 4090 or less (No condensation)100 W/;40AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)4514528445Non-magnetizing lock1316.324 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021250/20Ball screwLinear guide5 to 4090 or less (No condensation)100 W/;40AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)4514528445Non-magnetizing lock1316.324 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021250/20Ball screwLinear guide5 to 4090 or less (No condensation)100 W/;40AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)4514528445Non-magnetizing lock1316.324 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%

Title not found

zz 1 3 8 (35) 170) 2 0 5 (52) 0.79 l2D) 140) 0.39 ( 1 0 ) 3.94 (100) r 5 0 (38) (62) 1.38 (35) 0.43 ( 1 1 ) M l 8 i 1 . 5 I 1 8 (30) 1.22 ( 3 1 ) 3.4 (90) 2 2 4 (58) 6 2 6 1159) 2.05 (s2) 11.2) 2.60 166) s T o 6 5 7 (167) 1 3 8 (35) 3.35 (85) 2 5 2 (64) 0.79 l2D) 1.57 (40) 0.39 (10) 3.94 (100) 1.50 (38) 2.44 (62) 1.38 (35) 0.55 (14) M 1 8 x l 5 1.22 ( 3 r ) 1.22 ( 3 1 ) 3.86 (s8) 2.24 (s3

Title not found

consumption Tiro TVpe of Manifold Options Compact size with large flow Model (Seies) Manifold pitch (mml Rubber seal Appicable cylinder size (mm) Cv sv1m0 10.5 0.28 Up to o50 Gassette base type manifold (Series SV1000/2000) Cassette base type manifolds offer the ultimate in flexibility. lvlanifold sections can be added using a simple release mechanism. sv2(x)0 16.0 0.48 Up to o80 SV3O(D 20.5 0.s3

Title not found

specfcatpns on a man i)d spe.ilicalDn sheel (Note thal doubteand 3 posiuo. vatves nnol be usedwhere sinqle solenodwtrng has been specitied ) A, B port size (metric) A, B port size (inch) SSsV E series I DIN rail length 2 stalions Nore 1) Double wiring spcilication I sialions 2 stalions Noie 4 Specified layout (Up to l6solenods possible.) 6 slations Mibubishi Eleclric C,omoralion: MELSECNETA,IINI-S3

Vacuum

SymbolTube size l\,lodel Note) Replacemont Ong sal included with reolacement elefienls @3h6" NZFBl Ol srze Symbol Flow SCFM (N/min) @1/4" NZFBl Ol NZFB2Ol s3/8" NZFB3Ol Inch 3ize' MAX 0.7 (20) MAX 1.1 (30) MAX 2.1 (60) r\rAX 3.5 (100) @1/2" NZFB4Ol lnch slze' (Rebase butlon: Fed) o4mm zFB100 oGmm zFB100 zFB'200 oBmm zF8.200 zF8300 o10mm zFB300 can o8mm can be used with 5/16'tubing. iti slze

Note 3)o0.085450/20BeltLinear guide5 to 4090 or less (No condensation)100 W/;40AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)29?2?445Non-magnetizing lock276.324 VDC 0 10%

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor Type: S3 (200W Output, Incremental Encoder), Lead: B (LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 150mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: None, Grease Application: N (w/o, Roller Specification)

5-Port Solenoid Valve

Manifold Options Protective class class # (Mark: ) 148 Connector Connecting Base Plug-in Type 10 Side Ported EX120 SY3000/5000/7000 Series Type 11 Bottom Ported RoHS How to Order Manifolds SS5Y 10 3 C6 05 R1 S3 U Refer to pages 160 (SY5000) and 161 (SY7000) for the dimensions of Type 11/Bottom-ported type. q w r e t y u i r Valve stations e SI unit q Series 0 Without SI unit Q DeviceNet (

Accuracy: Basic Type, Size: 63, Motor Type: S3 [AC Servo Motor (Incremental Encoder) 200W], Lead (mm): A (20), Stroke (mm): 990, Motor Option: None, Cable Type: S (Standard Cable), Cable Length: 5m, Driver Type: A2 (LECSA2-S, 200~230V Incremental, Pulse Input), I/O Connector: 1 (1.5m)