1

How to Order Air Output Port: KBV, KBZ (P. 15-2-113) 1 04 KB 1 V Elbow Module: KBV Elbow Socket Module: KBV T Connection thread Applicable tubing O.D. 4 Model Model Model Tube size/ Connecting female thread size Body size KBV1-04 KBV1-06 KBV2-06 KBV1-M5 KBV1-M6 KBV2-M5 M5 x 0.8 M6 x 1 M5 x 0.8 M6 x 1 6 KBV2-08 KBV3-08 8 KBV2-M6 KBV2-R1 KBV3-R1 KBV3-R2 KBV4-R2 KBV4-R3 1 8 Rc Branch Elbow Module

Rotary Table Series MSU

Dimensions (mm) 1in = 25.4mm MSUA7 MSUA7-S, SE Scale: 60% Top ports/MSUA7-SE C 8-M4 x 0.7 depth 8 A port B port 67 13 2-M5 x 0.8 14 B 41 50 33 37 4-M5 x 0.8 depth 7 22.5 5 +0.025 0 3H9 A Long groove depth 5 (positioning pin hole) 22.5 47h9 0 0.062 +0.052 0 26H9 36 +0.030 0 3-4H9 depth 4 ( A , B , C ) 4 3 2-5.5 through 3-R2 3-R2 4.5 19 10.5 13 48h9 0 0.062 36 7 6 22.3 10.5 44 3 11 10 58.5

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Seal material Part numbers indicating changed seal material and leakage Leakage Pa m3/s or less Note 1) Compound No. 1349-80 Symbol Nil N1 Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2

VZA2000

(A side) 2 x M5 x 0.8 body side 2 x 4.5 Mounting hole 18 14 3 x Rc , 2 x Rc 18 2 x M5 x 0.8 sub-plate side Pilot port (A side) (R1, R2 port) (P , A, B port) Pilot port (B side) Sub-plate side 1761

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Plug-in type Non plug-in type VVZS3000-22A-1 VVZS3000-22A-2 VFN G L M KZ D Cylinder side pressure Check valve Applicable valve model VZS3450-FZ VZS34504(A) 2(B) 3(R2) 5(R1) 3(R2) 5(R1) 3(R2) 5(R1) 210 Ncm3/ min or less Solenoid one side energized 1(P) 210 Ncm3/ min or less Leakage 0.5 MPa Solenoid both sides energized 1(P) Piston SUP side pressure P1 SUP side pressure P1 (MPa) 0 Operating

XM, XY

changed part XSA Seal material Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Changed part Note 2) Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil N1 XGT w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 CYV Q1 R1 R2

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-M5 x 0.8 depth 7 22.5 5 +0.025 0 3H9 A Long groove depth 5 (Positioning pin hole) 22.5 47h9 0 0.062 +0.052 0 26H9 36 3-4H9 depth 4 +0.030 0 4 3 ( A , B , C ) 3-R2 3-R2 2-5.5 through 4.5 19 10.5 13 48h9 0 0.062 36 7 6 22.3 10.5 44 3 11 10 58.5 2-5.5

AXTS-OMY0007

Configuration symbol AXTS040*-2(B)-X2 Symbol for internal pilot fluid passage Fig.1 Symbol for internal pilot fluid passage. 1(P) Port:IN Port SUP.Air(for air blow 4(A) Port:OUT Port 3(R2) Port: Released to atmosphere (pilot exhaust port with silencer) AXTS040*-3(B)-X2 Symbol for internal pilot fluid passage Fig.2 Symbol for external pilot fluid passage. 3(R2) port: IN Port SUP. air (

K35-OMX0029

port R1 FU port FB port FA port R1 port P port R3 port R2 port Caution Do not allow foreign matter such as cutting chips inside the cylinder from the ports.

IDX-OM-W028

EVAPORATION WITH LAMP THERMOMETER VENTILATION VENTILATION DRAFT AIR OUTLET BALL VALVE (F) AUTO DRAIN C DRAIN TUBE TERMINAL LENGTH:1m) (O.D.10, BLOCK J P K L2 N1 M 13 4x POWER SUPPLY ENTRY 911)[OPPOSITON] (WIRE H measuremm Model Port size A B C D E F G H J K L M N P IDU22E R1 325 775 1153 93 445 123 5 279 46 50 13 353 85 600 379 1258 64 550 135 0 290 388 680 414 IDU37E R11/2 360 855 IDU55E R2

180

z2 B part r2 = 47(mm) Calculation of weight m2 = d x e x f x Specific gravity m2 = 5 x 10 x 12 x 2.7 x 10-6 = 0.002 (kg) Moment of inertia around Z2 axis IZ2 = {m2 (d2 + e2)/12} x 10-6 IZ2 = {0.002 x (52 + 102)/12} x 10-6 = 0.02 x 10-6 (kgm2) IB = 0.02 x 10-6 + 0.002 x 472 x 10-6 = 4.4 x 10-6 (kgm2) I = 9.0 x 10-6 + 4.4 x 10-6 = 13.4 x 10-6= 0.13 x 10-4 (kgm2) Moment of inertia around Z

MHY2/MHW2

A part z1 m1 = 40 X 7 X 8 X 2.7 X 10-6 Calculation of weight m1 = a X b X c X Specific gravity = 0.006(kg) Iz1 = {0.006 X (40 2+7 2)/12} X 10-6 Moment of inertia around Z1 axis = 0.8 X 10-6 (kgm 2) = 0.8 X 10-6+ 0.006 X 37 2 X 10-6 Iz1 = {m1(a 2+ b 2)/12} X 10-6 IA = 9.0 X 10-6(kgm 2) Moment of inertia around Z axis IA = IZ1 + m1r1 2 X 10-6 z r2 Z2 B part r2 = 47(mm) m2 = 5 X 10 X 12 X

180° Angular Style Air Gripper Series MHY2/MHW2

z2 B part r2 = 47(mm) Calculation of weight m2 = d x e x f x Specific gravity m2 = 5 x 10 x 12 x 2.7 x 10-6 = 0.002 (kg) Moment of inertia around Z2 axis Z2 = {m2 (d2 + e2)/12} x 10-6 Z2 = {0.002 x (52 + 102)/12} x 10-6 = 0.02 x 10-6 (kgm2) B = 0.02 x 10-6 + 0.002 x 472 x 10-6 = 4.4 x 10-6 (kgm2) = 9.0 x 10-6 + 4.4 x 10-6 = 13.4 x 10-6= 0.13 x 10-4 (kgm2) Moment of inertia around Z axis

IDX-OM-M050

Inside diameter 25 Ventilation air outlet (The opposite side Drain tube for condensed water 4Eye bolt 20 4x Drain tube Compressed Air outlet Compressed Air inlet (O.D.10, Length approx. 0.7m) direction(Nil) direction(Nil) Ventilation Drain tube Ventilation Ventilation 107 R2 R2 460 267 7001 75 64 1130 1120 17 or less) (Electric wire diameter direction direction Ventilation Ventilation Signal

IDX-OM-U021

K 16K kg 245 270 350 1, 2 () kW 100 125 150 1(ANR)[2065%] 2[3275%] 3 4 5R 6-2 GWP (GWP) Regulation (EU) No 517/2014 IPCC AR4 ) R134a 1,430 1,430 R404A 3,922 3,920 R407C 1,774 1,770 R410A 2,088 2,090 (1) (2) IDF100150F 6-1 6 1 IDX-OM-U021 6 6-3 IDF100F-30() (10,2m) ) ( (10 4 () () 4x () () 4x 20 25 2m) 25 (10,0.7m) 107 267 460 R2 64 75 7001 1130 1120 R2 (17) 17) 40

IDX-OM-M051

Inside diameter 25 (The opposite side (O.D.10, Length approx. 0.7m) 4xEye bolt 20 4x Drain tube Drain tube Compressed Air outlet condensed water Drain tube for 107 267 460 R2 735 64 75 7001 1120 Compressed Air inlet 17 or less) (Electric wire diameter Signal cable outlet 40 127 479 R2 51 1276 Grommet with membrane 14 to 18) (Electric wire diameter Power supply cable fixture 1375 Terminal

IDX-OM-Z004

735 64 75 7001 1120 R2 (17) 17) 40 127 479 51 1276 1418) (14~18) 1375 1,3 -W4 -W4 (-W4) (-W4) Y1/2 Y 1/2 () () R1/2 R1/2 (50) 20 (143) 335 7122 752 670 1,3 (-W5) -W5 -W5 (-W5) R1/2 R1/2 IDF100F150F-W 6 3 IDX-OM-Z004 6 IDF125F-30-W () K16K (10, 2m) (10 ) ( 4 4x JIS 65A 10K (K16K) 2m) 20 JIS 65A 10K 25 4x (10,0.7m) (10, 0.7m) 78 9351 18 267 655 8x19 4x19 8x19 4x19

7mm Wide, Compact, Pilot Operated, 5 Port Solenoid Valve Series S0700

Solenoid specifications 5 (R1) 3 (R2) 1 (P) 0.35W (Standard) 0.1W (With power saving circuit, when energized) 4 (A) 2 (B) Power consumption N.O. N.O. Coil rated voltage 12/24VDC 5 (R1) 3 (R2) 1 (P) Flow characteristics 4 (A) 2 (B) Flow characteristics C[dm3/(s.bar)] 0.36 0.32 N.C. N.O. 5 (R1) 3 (R2) v 0.1 0.08 b 0.39 0.33 1 (P) 2-position, single/double 4-position, dual 3 port

5 Port Solenoid Valve Series SQ1000/2000

Exhaust center: SQ A31 Pressure center: SQ B31 5 (R1) 3 (R2) 1 (P) For applications which demand high speed, high frequency, long life and a precise response time. 1 2 (A) 4 (B) 2 1 2 1 2 SQ B31 N.O. valve N.O. valve 5 (R1) 3 (R2) A side B side 1 (P) A (A) 4 (B) 2 1 2 B SQ C31 N.C. valve N.O. valve 5 (R1) 3 (R2) 1 (P) R P

Exhaust Cleaner for Vacuum Pump AMV Series

R2 80 (3B) JIS 10K FF flange 100 (4B) JIS 10K FF flange 789