VZA2000

(A side) 2 x M5 x 0.8 body side 2 x 4.5 Mounting hole 18 14 3 x Rc , 2 x Rc 18 2 x M5 x 0.8 sub-plate side Pilot port (A side) (R1, R2 port) (P , A, B port) Pilot port (B side) Sub-plate side 1761

XM, XY

changed part XSA Seal material Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Changed part Note 2) Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil N1 XGT w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 CYV Q1 R1 R2

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-M5 x 0.8 depth 7 22.5 5 +0.025 0 3H9 A Long groove depth 5 (Positioning pin hole) 22.5 47h9 0 0.062 +0.052 0 26H9 36 3-4H9 depth 4 +0.030 0 4 3 ( A , B , C ) 3-R2 3-R2 2-5.5 through 4.5 19 10.5 13 48h9 0 0.062 36 7 6 22.3 10.5 44 3 11 10 58.5 2-5.5

AXTS-OMY0007

Configuration symbol AXTS040*-2(B)-X2 Symbol for internal pilot fluid passage Fig.1 Symbol for internal pilot fluid passage. 1(P) Port:IN Port SUP.Air(for air blow 4(A) Port:OUT Port 3(R2) Port: Released to atmosphere (pilot exhaust port with silencer) AXTS040*-3(B)-X2 Symbol for internal pilot fluid passage Fig.2 Symbol for external pilot fluid passage. 3(R2) port: IN Port SUP. air (

K35-OMX0029

port R1 FU port FB port FA port R1 port P port R3 port R2 port Caution Do not allow foreign matter such as cutting chips inside the cylinder from the ports.

IDX-OM-M050

Inside diameter 25 Ventilation air outlet (The opposite side Drain tube for condensed water 4Eye bolt 20 4x Drain tube Compressed Air outlet Compressed Air inlet (O.D.10, Length approx. 0.7m) direction(Nil) direction(Nil) Ventilation Drain tube Ventilation Ventilation 107 R2 R2 460 267 7001 75 64 1130 1120 17 or less) (Electric wire diameter direction direction Ventilation Ventilation Signal

IDX-OM-U021

K 16K kg 245 270 350 1, 2 () kW 100 125 150 1(ANR)[2065%] 2[3275%] 3 4 5R 6-2 GWP (GWP) Regulation (EU) No 517/2014 IPCC AR4 ) R134a 1,430 1,430 R404A 3,922 3,920 R407C 1,774 1,770 R410A 2,088 2,090 (1) (2) IDF100150F 6-1 6 1 IDX-OM-U021 6 6-3 IDF100F-30() (10,2m) ) ( (10 4 () () 4x () () 4x 20 25 2m) 25 (10,0.7m) 107 267 460 R2 64 75 7001 1130 1120 R2 (17) 17) 40

IDX-OM-M051

Inside diameter 25 (The opposite side (O.D.10, Length approx. 0.7m) 4xEye bolt 20 4x Drain tube Drain tube Compressed Air outlet condensed water Drain tube for 107 267 460 R2 735 64 75 7001 1120 Compressed Air inlet 17 or less) (Electric wire diameter Signal cable outlet 40 127 479 R2 51 1276 Grommet with membrane 14 to 18) (Electric wire diameter Power supply cable fixture 1375 Terminal

IDX-OM-Z004

735 64 75 7001 1120 R2 (17) 17) 40 127 479 51 1276 1418) (14~18) 1375 1,3 -W4 -W4 (-W4) (-W4) Y1/2 Y 1/2 () () R1/2 R1/2 (50) 20 (143) 335 7122 752 670 1,3 (-W5) -W5 -W5 (-W5) R1/2 R1/2 IDF100F150F-W 6 3 IDX-OM-Z004 6 IDF125F-30-W () K16K (10, 2m) (10 ) ( 4 4x JIS 65A 10K (K16K) 2m) 20 JIS 65A 10K 25 4x (10,0.7m) (10, 0.7m) 78 9351 18 267 655 8x19 4x19 8x19 4x19

7mm Wide, Compact, Pilot Operated, 5 Port Solenoid Valve Series S0700

Solenoid specifications 5 (R1) 3 (R2) 1 (P) 0.35W (Standard) 0.1W (With power saving circuit, when energized) 4 (A) 2 (B) Power consumption N.O. N.O. Coil rated voltage 12/24VDC 5 (R1) 3 (R2) 1 (P) Flow characteristics 4 (A) 2 (B) Flow characteristics C[dm3/(s.bar)] 0.36 0.32 N.C. N.O. 5 (R1) 3 (R2) v 0.1 0.08 b 0.39 0.33 1 (P) 2-position, single/double 4-position, dual 3 port

Exhaust Cleaner for Vacuum Pump AMV Series

R2 80 (3B) JIS 10K FF flange 100 (4B) JIS 10K FF flange 789

CHANGE, ACTUATOR, CKZN SLIM LINE CLAMP CYLINDER, R2, 80MM CKZN SLIM LINE CLAMP CYL, .37830 lb

Industrial Filter

IN of filtered fluid (Port size: R1 or R2) Access to In pressure (Port size: Rp1/4) Access to Out pressure (Port size: Rp1/4) DRAIN Port to discharge accumulated fluid and drain at inlet when replacing the element. (Port size: R3/4) OUT of filtered fluid (Port size: R1 or R2) DRAIN Port to discharge all fluid when replacing the element. (Port size: R3/4) Table 1.

FGE-C

O 1 (O P71) V (V P71) 6/12 FGX-OM-L009-B FGESL Series IN/OUT -0.1MPa (P10) (M12) IN OUT O O V 40 () () () 7/12 FGX-OM-L009-B 1 G1/8 () (R1 R2) IN (Rp1/4) (R3/4) DRAIN OUT (Rp1/4) (R1 R2) (R3/4) 1 1 SUS304 O FGE-OP007 8 NBR FKM O (NBR) (FKM) M10X1.5 1 SUS304 M10 SUS304 SUS304 SUS316WPA FGE-OP005 SUS316 SUS304 SUS304 FGD-OP001 SUS316 FGE-KT001 NBR O FGE-KT002

VQZ Series

.:3.5 to 7 (Reference) 0.5mm2, 2-core or 3-core, equivalent to JIS C 3306 Part no. for One-fitting for 1(P) port and Silencer for 3(R2,R), 5(R1) port. (2) Silencer for 3(R2,R), 5(R1) port Series (1) One-touch fitting for 1(P) port Silencer One-touch fitting VQZ100/1000 KQ2H06-M5 AN120-M5 KJS04-M5 VQZ200/2000 KQ2S06-01S INA-25-46 IN-457-32for 6 VQZ300/3000 KQ2H08-02S AN101-01 KQ2H06-01S The

MHC2

A part z1 m1 = 20 x 3 x 4 x 2.7 x 10-6 = 6.48 x 10-4 (kg) Weight calculation m1 = a x b x c x Relative density IZ1 Inertial moment around Z1 axis IZ1 = {m1 (a2 + b2) / 12} x 10-6 = {6.48 x 10-4 x (202 + 32)/12} x 10-6 = 2.21 x 10-8 (kg.m2) = 2.21 x 10-8 + 6.48 x 10-4 x 16.42 x 10-6 = 0.20 x 10-6 (kg.m2) IA Inertial moment around Z axis IA =IZ1 + m1r12 x 10-6 z f2 z2 B part r2 = 23.5(mm)

MHC2

A part z1 m1 = 20 x 3 x 4 x 2.7 x 10-6 = 6.48 x 10-4 (kg) Weight calculation m1 = a x b x c x Relative density IZ1 Inertial moment around Z1 axis IZ1 = {m1 (a2 + b2) / 12} x 10-6 = {6.48 x 10-4 x (202 + 32)/12} x 10-6 = 2.21 x 10-8 (kg.m2) = 2.21 x 10-8 + 6.48 x 10-4 x 16.42 x 10-6 = 0.20 x 10-6 (kg.m2) IA Inertial moment around Z axis IA =IZ1 + m1r12 x 10-6 z f2 z2 B part r2 = 23.5(mm)

MRHQ

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 -0.062 47h9 +2.2 -0.2 20.9 opened 0 -0.1 5 41 +0.03 0 3-4H9 depth 6 (one each on three sides) 4-M3 x 0.5 (attachment mounting screw ) M5 x 0.8 Finger closing port 0 -0.1 8 0 -0.7 14.9 closed 4 7 4-M5 x 0.8 depth 8 (two on opposite side) 18.8 15 Max. 7.3 42 22.5 M5 x 0.8 Finger opening port 3-R2

VP4

(Values at the initial period) VP7-6: Flow Characteristics C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1 4/2 (P A/B) 4/2 5/3 (A/B R1/R2) Flow characteristics Type of actuation Valve model Port size Single 5.5 5.5 4.6 4.8 5.7(3.6) 4.2 4.2 4.0 3.9 4.5(3.3) 0.24 0.24 0.24 0.24 0.25(0.33) 0.22 0.22 0.22 0.22 0.27(0.27) 1.4 1.4 1.1 1.2 1.4(0.89) 1.1 1.1 1.0 1.0 1.1(0.84) 5.8 5.8 5.2 5.7(5.1) 3.5

Angular Style Air Gripper Series MHC2/MHCA2/MHCM2

A part z1 m1 = 20 x 3 x 4 x 2.7 x 10-6 = 6.48 x 10-4 (kg) Mass calculation m1 = a x b x c x Relative density Z1 Inertial moment around Z1 axis Z1 = {m1 (a2 + b2) / 12} x 10-6 = {6.48 x 10-4 x (202 + 32)/12} x 10-6 = 2.21 x 10-8 (kg.m2) = 2.21 x 10-8 + 6.48 x 10-4 x 16.42 x 10-6 = 0.20 x 10-6 (kg.m2) A Inertial moment around Z axis A = Z1 + m1r12 x 10-6 z f2 z2 B part r2 = 23.5(mm) Mass