HRX-OM-I051

Table 8-15 Compliance EMC Directive 2004/108/EC Low Voltage Directive 2006/95/EC CE Marking Machinery Directive 2006/42/EC SEMATECH S2-93, S8-95 SEMI S2-0703, S8-0701, F47-0200 UL E229305 / UL1995 HRZ Series 8.7 Compliance 8-25 HRX-OM-I051 Chapter 8 Appendix Serial No. Model: Judgment 8.8 Thermo Chiller Daily Inspection Sheet Circulating fluid supply port cap Looseness IN press.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.

ML1C

Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) 25 32 40 2000 2000 2000 Stroke adjustment unit symbol Refer to page 1109 for stroke adjustment unit. 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 When stroke is required, which is longer than the standard stroke, refer

ML1

, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 25 32 40 2000 2000 2000 *When the required stroke is longer than the standard stroke , refer to the specifications for Made to Order q (p.5.4-79) longer stroke styles.

VQ5000

In addition, 3 of the wiring types are available with IP65 enclosures. 50 63 80 100 125 140 160 180 200 250 1100 1000 900 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQ5100--04 VQ5101--04 IP65 compatible Enclosure Individual wiring type kit (Connector) C It is when the cylinder is extending that is meter-out controlled by speed

Free Mount Cylinder Series CU

Do not drop, bump, or apply excessive impacts (300m/s2 or more for reed switches and 1000m/s2 or more for solid state switches) while handling. Although the body of the switch may not be damaged, the inside of the switch could be damaged and cause a malfunction. 5. Do not allow short circuiting of loads.

ZSE40/ISE40

(Refer to Precautions on page 16-2-24 for details.) 1.5 01: R 1/8 T1: NPT 1/8 Data ZSE40(F)/ISE40-W1 2-M4 x 0.7 thread depth 4 20 30 Rc 1/8 MPa 7 19 20 30 OUT2 OUT1 SET 6.5 R 6.4 18.35 Atmospheric release port Lead wire length 600 (3000) 3.5 12.4 7.8 7 2.5 2.6 30 15.2 42 10.7 4 6 For splash proof use (IP65), insert an air tube into the atmospheric release port.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Also when exceeding a 600 mm stroke, specify -XB11 at the end of the part number. (Except 10) Applicable Auto Switches/Refer to pages 1575 to 1701 for further information on auto switches.

3 Port Solenoid Valve/

0.7 MPa (Same as operating pressure) Maximum operating frequency 30 times/minute Minimum operating frequency 1 time/week Operating and ambient temperature 14 to 122F [10 to 50C] (No freezing) Ambient humidity 20 to 90%RH (No condensation) Manual override None Pilot exhaust Individual exhaust Lubrication Not required Mounting orientation Unrestricted Impact/Vibration resistance 150/30 m/s2

Thermo-chiller

Operating time 20 s 30 s Voltage 10 s 5 s Min. 2 s dV dt 1 s = Voltage increase ratio 0.5 s dV 0.2 s 0.1 s Time 0.05 s 0.02 s dt 0.01 s 100 125 200 300 500 400 600 700 1000 2000 3000 4000 1500 < For option B [With earth leakage breaker]> 3. This product is installed with a breaker with the following operating characteristics.

Compact Cylinder

Relationship between Number of Needle Rotations and Piston Speed 32, 40 50, 63 800 800 32 32 50 700 700 600 600 63 Piston speed (mm/s) Piston speed (mm/s) 40 40 500 500 50 400 400 63 300 300 200 200 100 100 1 0 1 2 3 4 5 6 0 0 1 2 3 4 5 6 7 8 9 10 7 Fully opened Without restrictor Without restrictor Fully opened Number of restrictors needle rotations Number of restrictors needle rotations

Plug-in/Plug Lead: Single Unit

construction Air/Inert gas Fluid (3) 1.0 MPa Maximum operating pressure Plug-in unit Single 0.20 MPa 0.10 MPa Min. operating pressure Valve specifications Solenoid specifications Double 0.15 MPa 0.10 MPa 3 position 0.20 MPa 0.15 MPa 1.5 MPa Proof pressure (1) 5 to 50C Ambient and fluid temperatnre Not required Lubrication Push type/Locking type (Tool required) Option Manual override (2) 150/30 m/s2

2.0

Impact resistance of this solenoid valve is 150 m/s2. Vibration resistance of this solenoid valve is 30 m/s2. SOL. Power supply Power supply voltage Voltage drop + 16. Do not disassemble the solenoid valve. A disassembled product will void our warranty. If you absolutely require it be disassembled, contact SMC.

Thermo-chiller

When deionized (pure) water is used, the electric conductivity should be 0.5 S/cm or higher (Electric resistivity: 2 Mcm or lower). 0.05 s 0.02 s 0.01 s 100 135 200 300 400 500 600 700 1000 1500 2000 3000 4000 Current (% to the capacity of the main breaker of this product) HRLE090 28 A HRLE Series Specific Product Precautions 4 Be sure to read this before handling the products.

HRS100/150

Operating time 20 s 30 s HRZ 10 s Voltage HRZD 5 s Min. 2 s HRW 1 s 0.5 s dV dt HECR = Voltage increase ratio 0.2 s 0.1 s dV HEC 0.05 s 0.02 s Time HEB 0.01 s 100 125 200 300 500 400 600 700 1000 2000 3000 4000 1500 dt HED Current (% for chiller main breaker volume) < For option B [With earth leakage breaker]> 3.

Compact Cylinder with Solenoid Valve/

Auto Switches Common Specifications Solid state auto switch Type Reed auto switch 3-wire: 100 A or less, 2-wire: 0.8 mA or less Leakage current None Operating time 1 ms or less 1.2 ms Impact resistance 1000 m/s2 300 m/s2 50 M or more at 500 VDC Mega (Between lead wire and case) Insulation resistance 1500 VAC for 1 minute (Between lead wire and case) 1000 VAC for 1 minute (Between lead wire

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Rated voltage 1 2 3 4 5 6 7 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC 240 VAC (50/60 Hz) G: Lead wire length 300 mm H: Lead wire length 600 mm L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) D: With connector T: Condait terminal E: Grommet terminal type has been discontinued.

3 Port Solenoid Valve/

pressure 0.25 to 0.7 MPa (Same as operating pressure) Maximum operating frequency 30 times/minute Minimum operating frequency 1 time/week Operating and ambient temperature 10 to 50C (No freezing) Ambient humidity 20 to 90%RH (No condensation) Manual override None Pilot exhaust Individual exhaust Lubrication Not required Mounting orientation Unrestricted Impact/Vibration resistance 150/30 m/s2

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.