5-Port Solenoid Valve

(For metal seal) 2(B) port side : Yellow 2.2 18 A side pressure sensor Plug B side pressure sensor 3000 3000 71.1 66.1 (For F type: 62.3) (For E type: 60.2) 33.3 31.3 37 56.6 45.6 62.1 (For 3-position) 33 33 SY3000/5000/7000 Series Made to Order Please contact SMC for detailed dimensions, specifications, and lead times.

Size: 40, Motor Mounting Position: Top Mounting Type, AC Servo Motor: 400W Output, Absolute Encoder, Stroke: 3000mm, Motor Option: None, Cable: Standard Cable, Cable Length: 2m, Driver: -, I/O Connector: -

Compact Vacuum Unit

(30 m/s2) Without sensor/switch With sensor Enclosure Vibration resistance Note 1) 66 ft/s2 (20 m/s2) (With switch) Note) Push-locking type only for the latching type Without sensor/switch With sensor 490 ft/s2 (150 m/s2) Impact resistance Note 2) 330 ft/s2 (100 m/s2) (With switch) Note 1) 10 to 500 Hz for 2 hours in each direction of X, Y and Z (During de-energizing) Note 2) 3 times in

Vacuum

Material N N B R S Silicone rubber u urethane rubber F Fluorine rubber GN Conductive NBR (s2-o 16) GS Conductive silicone (s2-o16) Material N N B R s silicone rubber u _ urethane rubber F Ftuorine rubber GN Conductive NBR (o2-o16\ GS Conductive silicone (@2-@'16) Pad type (application: Refer to list O) U Flat type c Ftat with rib D Deep type B Bellows type Pad type U Flat type c _ Flat vYith

Vacuum

Material N N B R S Silicone rubber u urethane rubber F Fluorine rubber GN Conductive NBR (s2-o 16) GS Conductive silicone (s2-o16) Material N N B R s silicone rubber u _ urethane rubber F Ftuorine rubber GN Conductive NBR (o2-o16\ GS Conductive silicone (@2-@'16) Pad type (application: Refer to list O) U Flat type c Ftat with rib D Deep type B Bellows type Pad type U Flat type c _ Flat vYith

Series VQ Base Mounted Metal Seal/Rubber Seal

Connector location Connector location P.1.10-124 P.1.10-128 P.1.10-132 Top (vertical) Side (honzontal) Top (vertical) Side (honzontal) Without cable With cable (1.5m) With cable (3m) With cable (5m) Without cable Without cable F F S0 S1 S2 S3 P P S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 0 1 2 3 (2) (2) (2) G 2 to 16 stations With cable (1.5m) With cable (3m) With cable

CY1

When excessive impact (300m/s2 or more) is applied to a reed switch during operation, the contact point will malfunction and generate or cut off a signal momentarily (1ms or less). Consult SMC regarding the need to use a solid state switch depending upon the environment. 7. Do not use in an area where surges are generated.

CYP

When excessive impact (300m/s2 or more) is applied to a reed switch during operation, the contact will malfunction and generate or cut off a signal momentarily (1ms or less). Consult SMC regarding the need to use a solid state switch depending upon the environment. 5. Do not use in an area where surges are generated. 1.

CYPSeries

When excessive impact (300m/s2 or more) is applied to a reed switch during operation, the contact will malfunction and generate or cut off a signal momentarily (1ms or less). Consult SMC regarding the need to use a solid state switch depending upon the environment. 5. Do not use in an area where surges are generated. 1.

CYPSeries

When excessive impact (300m/s2 or more) is applied to a reed switch during operation, the contact will malfunction and generate or cut off a signal momentarily (1ms or less). Consult SMC regarding the need to use a solid state switch depending upon the environment. 5. Do not use in an area where surges are generated. 1.

ZSE1/ISE1

) 56.5 600 (3000) 49 8.5 47 47 3.5 3.5 8.5 2-3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 M5 x 0.8 depth 5 Piping port M5 x 0.8 depth 5 Piping port 2-3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 13 13 16-6-5

VQ5000

0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ5000-00-P (PA) ARBQ5000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 2500 2000 1500 1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) Note: 1MPa = 145psi 1l/min = 0.035SCFM Pressure Characteristics

ZR

Vacuum Pressure Switch: ZSE2-0R-15 ZSE2-0R-15 ZSE2-0R-15L ZSE2-0R-15C ZSE2-0R-15CL ZSE2-0R-15CN Indicator light (Red) Pressure setting trimmer Indicator light (Red) Pressure setting trimmer H L SET L SET H 15 15 9 9 2-M2.5 Mounting thread 2-M2.5 Mounting thread 25 25 31 31 600(3000) 42 600(3000) 49.5 40 40 3 3 20 20 18 18 16 16 13 11 13 11 9 9 Vacuum supply port 3.3 Vacuum supply port 3.3

Compact Pressure Switch Series ZSE1 (For Vacuum)/ISE1 (For Positive Pressure)

Pressure setting trimmer SET HYS SET HYS L L H H L L H H 15 15 Indicator light (Red) Indicator light (Red) 23 23 SE1-01-16C/-17C SE1-01-16/-17 I Z I Z Pressure setting trimmer 2 Pressure setting trimmer 1 Pressure setting trimmer 2 Pressure setting trimmer 1 SET1 SET2 L L H H 15 SET1 SET2 L L H H 15 Indicator light (Red, Green) 23 Indicator light (Red, Green) 23 600 (3000) 56.5 600 (3000

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ5000-00-P (PA) ARBQ5000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 2500 2000 1500 1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) Note: 1MPa = 145psi 1l/min = 0.035SCFM Pressure Characteristics

For post-stoppage positioning and locking

Clamping Force Specifications W-R1-S2Type Type 1 Type 3 Mass of transferred object 1000 kg or less 3000 kg or less 5000 Possible amount of positional correction 50 mm or less 4000 Clamping force 4430 N 4070 N Clamping force [N] Operating time 1.0 s or more 0.8 s or more 3000 Cylinder operation stroke 83.5 mm 140 mm Bore size 100 mm 2000 Cylinder proof pressure 1 MPa Max. operating pressure

Aluminum High Vacuum Angle Valve

L type: Lead wire length 3000 mm 3 Flange: Seal material changed part Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

Table of Contents

S3 S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 Without cable Without cable Without cable (2) Max. 16 stations (2) Max. 16 stations (2) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) Max. 16 stations Kit P Kit P Kit J Kit J Kit F Kit F L S The valve is equipped with an indicator light/surge

Water-cooledThermo-chiller

-0703, S8-1103, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation.

PSE540/560

Do not drop, bump, or apply excessive impact (PSE540: 980 m/s2, PSE560: 500 m/s2) while handling. Although the body of the sensor may not be damaged, the inside of the sensor could be damaged and lead to malfunction. 2. The tensile strength of the cord is 50 N. Applying a greater pulling force to it can cause malfunction.