42

0 200 400 600 800 1000 1200 1400 VQ4l5l (Plug lead type) ARBQ4000-00-B-5 B ARBQ4000-00-P-5 P Flow rate [L/min(ANR)] ARBQ4000-00-P (P B) 0.7 Dimensions 0.6 Outlet pressure [MPa] 0.5 0.4 SMC 0.3 0.2 59 50 147 0.1 B 2 SMC 1400 0 0 200 400 600 800 1000 1200 12 1 P 5 3 R2 R1 Flow rate [L/min(ANR)] PE 4 A 55.5 Pressure Characteristics 25 218.5 Conditions Inlet pressure: 0.7 MPa Outlet pressure:

High Vacuum Angle Valve

Model XLm-100(-1)-X152 XLm-160(-1)-X152 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 2 3 100 V 800/220 1200/350 H4 100C Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 3200/220 4800/350 Heater assembly quantity 3 4 100 V 1200/300 1600/400 H5 120C 200 V 4800/300 6400/400 The inrush current of

Dual Speed Controller with One-touch Fitting Series ASD

Flow Direction Symbols on Body Meter-out type Meter-in type Flow Rate and Effective Area Symbol JIS Symbol ASD230F ASD330F ASD430F ASD530F ASD630F Model 6 8 10, 12 10 12 Metric size 4, 6 8, 10 1/8" 5/32" 3/16" 1/4" 6 6, 8 1/4" 5/16" 3/8" Tubing O.D. 3/16" 1/4" 1/4" 5/16" 3/8" 3/8" Inch size Flow rate l/min (ANR) Controlled flow (Free flow) 500 600 700 1200 1300 175 295 350 75 {N R/min}

RSH/RS1H

REC RSH20, 32 Graph (1) Graph (2) 1.0 CX RSH20 RSH32 0.9 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 Operating pressure P [MPa] CY 0.8 1300 1300 80 0.7 1200 1200 MQQ M 0.6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1100 1100 0.5 RHC 1000 1000 0.4 900

1

D-X Shock absorber 20Data ZZ + Stroke S MH ZZ Bore (mm) 20 25 32 40 50 63 Stroke range Shock absorber 10 to 350 RBAC0806 77 23.5 135.5 10 to 400 RBAC1007 77 31 148 15 to 450 RBAC1412 55 79 174 15 to 800 RBAC2015 62.5 87 199.5 15 to 1200 RBAC2015 102 55.5 215.5 25 to 1200 RBAC2725 92.5 102 252.5 6-17-97 78 Made to Order Common Specifications: -XC51: With Hose Nipple -XC52: Mounting Nut with

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

CX DSymbol Specifications 1200 -XB11 Long stroke (2001 mm and up) -X -XB13 Low speed specifications (7 to 50 mm/s) 1100 40 40 -X116 Hydro specifications 20-X132 Axial ports 1000 -X160 High speed specifications Data 900 -X168 Helical insert thread specifications -X206 Added mounting tap positions for slider Theoretical thrust (N) 800 -X210 Oil-free exterior specifications -X322 Outside of

Accuracy: Basic Type, Size: 25, Motor Mounting: Top Mounting Position, Motor Type: S2 [AC Servo Motor, (Incremental Encoder), Output 100W], Lead: C [LEY25, 3mm; LEY32, 4(5)mm], Stroke: 100mm, Motor Option: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Cable Type: R (Robotic Cable, Flexible Cable), Cable Length: 2m, Driver: A1 (LECSA1-S, 100~120V, Incremental

Accuracy: Basic Type, Size: 25, Motor Mounting: Top Mounting Position, Motor Type: S2 [AC Servo Motor, (Incremental Encoder), Output 100W], Lead: C [LEY25, 3mm; LEY32, 4(5)mm], Stroke: 100mm, Motor Option: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Cable Type: Robotic Cable, Flexible Cable, Cable Length: 2m, Driver: LECSA1-S, 100~120V, Incremental,

PFxx-OMY0005

to 4200) Setting of OUT1 output set value (Hysteresis) S16 2000 Y 1 R/W H_1 (Setting of OUT1 hysteresis) Setting range 0x0 to 0x1040 (0 to 4160) OUT1 setting (FloW) Setting of OUT1 hysteresis (Hysteresis) U16 200 Y 2 R/W P1L (n1L) (Lower limit of window comparator) Setting range 0x0028 to 0x1068 (40 to 4200) Setting of OUT1 output set value (Lower limit of window comparator) 3 R/W S16 1200

Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

absolute H 20 24 30 L Left side parallel (Step motor 24 VDC) A 10 12 16 20 B 5 6 8 10 Stroke1[mm] Motor option Auto switch compatibility (In-line only) 23456 Nil Housing B bottom6 Positioning pin hole Grease application (Seal band part) 50 50 Nil Without option Nil With Nil None B With lock K Body bottom 2 locations N Without (Roller specification) C With (Includes 1 mounting bracket) 1200

LEJ-OM004xx

Crean class Amount of Type Speed recommended vacuum (mm/s) ISO 14644-1 Fed.Std.209D aspiration 6 1000 10 5 100 20 4 10 30 6 1000 50 5 100 60 4 10 70 6 1000 20 5 100 30 4 10 50 6 1000 30 5 100 70 4 10 90 600 11-LEJS40 1200 600 *Please aspirate it from the port on both sides when aspirating 50/min(ANR). Please select "D" about the type. 11-LEJS63 1200 * Based on SMC test condition.

Fan Type Ionizer

Installation distance [mm] mm At maximum air flow (air flow scale: 4) 300 mm 300 0 4s 6s 8s 0 2s -300 mm -300 0 300 600 900 1200 Installation distance [mm] mm At minimum air flow (air flow scale: 1) 300 mm 300 6s 0 4s 8s 0 2s -300 mm -300 0 300 600 900 1200 Installation distance [mm] mm 18 - Doc. no.

ML2B

If there is vibration, impact, etc. at long stroke, we recommend adoption of side support even if it is within the allowable value shown in the graph. 400 W l Load W ML2B32 W (1200) (1200) 300 ML2B25 l l 200 100 0 1000 2000 (mm) Support spacing l 10-13-16 14 Stroke Reading Rodless Cylinder with Brake Series ML2B Proper Auto Switch Mounting Position (Detection at stroke end) Operating Range

MQQ

Piston speed (3) 150 cm3/min or less 200 cm3/min or less 300 cm3/min or less Supply pressure 0.1 MPa Total allowable leakage MQQ M 800 cm3/min or less 1000 cm3/min or less 1200 cm3/min or less Supply pressure 0.3 MPa 1500 cm3/min or less 2000 cm3/min or less 3000 cm3/min or less Supply pressure 0.5 MPa RHC Note 1) Use clean, dry air with no freezing.

Secondary Batteries

Stroke adjusting unit Cylinder stroke (mm) Nil L H LH Without adjusting unit With low load shock absorber + Adjusting bolt With high load shock absorber + Adjusting bolt With one L unit and one H unit each 100, 200, 300, 400, 500, 600, 700 800, 900, 1000, 1200, 1400, 1600 1800, 2000 20, 25, 32, 40 50, 63 No stroke adjustment units are used for 50 and 63.

l

Stroke (mm) Tube material Mounting bracket Bore size (mm) 125 Aluminum alloy Basic, Rear flange, Single clevis, Double clevis, Center trunnion Carbon steel Basic, Rear flange, Single clevis, Double clevis, Center trunnion Foot, Front flange Front flange 1000 or less 1000 or less 1400 or less 1600 or less 140 1000 or less 1400 or less 1000 or less 1600 or less 160 1200 or less 1200 or less

CY1

Theoretical Cylinder Thrust JIS symbol 6, 10 15, 20, 25, 32, 40 1200 H H type 100 p40 40 1100 90 Bore size 10 1000 900 Mounting bracket type 80 Theoretical thrust (N) Theoretical thrust (N) Bore size Bore size 63 H H type L L type When mounting a floating bracket to a Series CY1B body, refer to P.67 for details, as this will be an order made product. 70 800 p32 32 700 60 600 50 500 p25 25

CY1F

Standard Stroke Maximum stroke available (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

Magnetically Coupled Rodless Cylinder

) Note 1) Max. stroke with switch (mm) Standard stroke (mm) Max. stroke without switch (mm) Bore size (mm) X168 Helical insert thread specifications X322 Outside of cylinder tube with hard chrome plating 50, 100, 150, 200, 250, 300 350, 400, 450, 500 XC57 With floating joint 15 750 1000 20 1000 1500 Minimum Operating Pressure 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700, 800 25 1200

Cylinder with Lock Double Acting, Single Rod Series CNS ø125, ø140, ø160 How to Order CNS L 100 125 D 100 M9BW D L 125 CDNS With auto switch With auto switch Number of auto switches (Built-in magnet) Nil 2 pcs. Mounting style S 1 pc. Basic style B Tubin

Bore size (mm) Foot style, Rod side flange style ML1C 125, 140 160 Up to 1000 Up to 1000 Up to 1600 Up to 1200 Up to 1200 Up to 1600 Cylinder Stroke/Auto Switch Mounting on Cylinder Unit (Built-in Magnet) Refer to the minimum auto switch mounting stroke (page 774) for those with an auto switch.