C76

401 to 500 77 90 102 115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12 x 1.75 Item I Wh Bore Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 57 70 82 95 120 145 170 64 77 89 102 127 152 177 32 12.5 25 37.5 50 75 100 125 40 12.5 25

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

MY2C16 MY2HT16 Horizontal impact: P = 0.5 MPa Horizontal impact: P = 0.5 MPa 1500 2000 2000 1500 H unit Impact speed mm/s Impact speed mm/s 1000 1000 L unit 500 400 300 400 500 L unit 300 Air cushion Air cushion 200 200 1000.5 1 2 3 4 5 100 10 30 20 0.5 1 2 3 4 5 10 20 30 m2 max. m1 max. m3 max. m1 max. m2, m3 max.

KN Series Nozzles for Blowing

Weight (g) L1 M Width across flats H1 H2 Nozzle size D Model KN-04-100 KN-04-150 KN-06-100 KN-06-150 KN-06-200 KN-08-150 KN-08-200 KN-10-250 KN-10-300 KN-10-350 KN-10-400 KN-10-600 KN-12-350 KN-12-400 KN-12-600 KN-16-400 KN-16-600 KN-20-400 KN-20-600 13 14 19 20 22 28 30 35 36 37 30 28 54 55 40 77 79 117 112 15 15 16 16 16 16 16 17 17 17 17 17 17 17 17 17 17 17 17 27 27.7 30.1 30.8 31.5 33.8

Thermo-chiller/Rack Mount Type

400 32C 25C 25C 300 300 200 200 5C 5C 100 100 Ambient temperature Ambient temperature Ambient temperature Ambient temperature 0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRR010-W-20 [50 Hz] [60 Hz] 400 400 35C Heating capacity [W] Heating capacity [W] 35C 300 300 25C 25C 200 200 5C 5C 100 100 Facility water temperature

LEKF-OMZ0035

Weight[kg] Series LEKFS25 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 S2 2.0 2.1 2.3 2.4 2.6 2.7 2.8 2.9 3.1 3.2 3.5 3.7 4.0 Motor type T6 2.1 2.2 2.4 2.5 2.7 2.8 2.9 3.0 3.2 3.3 3.6 3.8 4.1 Additional weight with lock [kg] 0.2 Series LEKFS32 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 S3 3.4 3.6 3.8 4.0 4.3 4.5 4.7 4.9 5.1 5.3 5.8 6.2 6.6 7.1

Magnetically Coupled Rodless Cylinder

, 450, 500 15 1000 Note 2) 20 1500 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25, 32 3000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 3000 Note 1) Contact SMC if the maximum stroke will be exceeded.

VFR

400 300 200 100 0 VF B VFR VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 800 700 600 500 400 300 200 100 0 VZS C VFS VS4 800 700 600 500 400 300 200 100 0 VQ7 D EVS VFN 800 700 600 500 400 300 200 100 0 E It is when the cylinder is extending that is meter-out

Cylinder with Lock Series CLS

m(kg) Load weight: m(kg) 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) 31

Cylinder with Lock Series CNS

200 100 100 500 400 300 200 100 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 320 125 300 300 200 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 7

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

, 450, 500 15 1000 Note 2) 20 1500 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25, 32 3000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 3000 Note 1) Contact P/A if the maximum stroke will be exceeded.

High Vacuum Angle Valve, XL Series

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

XL

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

Series: LEKFS, Size: 40, Motor Mounting Position: L (Left Side Parallel), Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 900, Motor Option: B (with Lock), Seal Band Stopper: N [Roller Type Seal Band Stopper [Grease Free]], Actuator Cable Type, Length: RA (10), Controller: C91 (JXC91, EtherNet/IPâ„¢ Direct Input

Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 100mm, Motor Option: W (with Lock/Motor Cover), Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: A (10m), Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IPâ„¢ Direct

Table Accuracy: Basic, Size: 50, Max. Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: 2 (External Stopper: 180°), Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: R (Robotic Type Cables, Flexible Type), Actuator Cable Length: A (10), Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IP™ Direct Input Type), I/O Cable Length for LEC: w/o Cable

The rod type electric actuator LEY series has various body sizes with thrust equivalent to 16, 25, and 32 bore size. Direct or bracket mountings are available in three directions or types. Thrust, speed and positioning * can be managed with the use of an optional controller. Possible applications include transfer, opening and shutting, pressing, pushing, and press-fitting.Three body sizes

Size: 40, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 500mm, Motor Option: None, Rod End Thread: M (Male), Mounting: Both Ends Tapped (Standard), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: A (10m), Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/

The LES series electric slide table actuator uses a compactly-integrated, recirculating linear guide for high rigidity and high precision. When the LES is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein.. Two types of built-in motors * are available. The series can be top or bottom mounted. In

The LES series electric slide table actuator uses a compactly-integrated, recirculating linear guide for high rigidity and high precision. When the LES is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein.. Two types of built-in motors * are available. The series can be top or bottom mounted. In

The rod type electric actuator LEY series has various body sizes with thrust equivalent to 16, 25, and 32 bore size. Direct or bracket mountings are available in three directions or types. Thrust, speed and positioning * can be managed with the use of an optional controller. Possible applications include transfer, opening and shutting, pressing, pushing, and press-fitting.Selectable mounting