Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible Move Speed Position Accel Decel PushingF TriggerLV PushingSp Moving F Area1 Area2 In posn mm/s mm mm/s2 mm/s2 mm/s mm mm mm 0 ABS 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 ABS 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 ABS 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 Caution Writing of the step data should be performed while the electric actuator is stopped. 39 - Details of step data
Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.
www.stevenengineering.com I 5.15 AIR PREPARATION MODULAR TYPE ACCESSORIES SPACER H O W T O O R D E R S PA C E R D I M E N S I O N S S PA C E R Y10 (1000 S E R I E S) Y20 (2000 S E R I E S) Y30 (3000 S E R I E S) Y40 (4000 S E R I E S) Y50 (4000-06 S E R I E S) Y60 (5/6000 S E R I E S) Model A Applicable Model Y10 8 NAC100~NAC1040 Y20 10 NAC2000~NAC2040 Y30 11 NAC2500~NAC2540 NAC3000~NAC3040
L Required facility water system
Movement Speed Position Acceleration Deceleration Force Value Area 1 Area 2 In pos force speed force mode mm/s (mm) mm/s2 mm/s2 (mm) (mm) (mm) mm/s 0 1 Absolute 100 100.00 1000 1000 50 40 10 100 0 0 5 2 Absolute 50 50.00 1000 1000 0 0 0 100 0 0 0, 1 (E.g.) Flow chart Controller (1) Select Step No.1.
P Q S R Drain cock Gray: N.C.
Movement Speed Position Acceleration Deceleration Force Value Area 1 Area 2 In pos force speed force mode mm/s mm mm/s2 mm/s2 mm mm mm mm/s 0 1 Absolute 100 50.00 1000 1000 0 0 0 100 0 0 0.1 2 Relative 50 10.00 1000 1000 0 0 0 100 0 0 0.1 (E.g.) Flow chart Controller (1) Select/input Step No.1.
Vespel is a registered trademark of DuPont. 37 Single Stage Regulator for Ultra High Purity High flow Series AZ1300 For UHP gas delivery Flow capacity to 1000 slpm Body material: 316L SS Inlet pressure: Max. 300 psig (2.1 MPa) How to Order Port Number q w e r AZ13 S FV8 FV8 02 2PW Delivery pressure Code Delivery pressure 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to
MOD mm/s mm mm mm mm/s 2 mm/s 2 % % mm/s % mm 0 1 Absolute 100 100.00 1000 1000 50 40 10 100 0 0 5 2 Absolute 50 50.00 1000 1000 0 0 0 100 0 0 0.1 (1) Select/input Step No.1 (Turn on IN0) Controller (2) Turn on DRIVE input Parallel I/O signal Start moving to the position of Step No. 1 Signal Category Step No. output (OUT0 to 5) turns off (2)(5)(10)(13) DRIVE (3) INP output turns off (
EX500 AP Cable length (l) Connector specification 010 050 S A 1000 [mm] 5000 [mm] Straight Angle EX500 AC000 S M12 8 2 1 Straight connector type 3 7 16 M12 6 4 6 5 Plug connector pin arrangement 18 14.9 44.7 34 30 5 50 48 l 1 2 5 t Waterproof cap: M12 connector (for plug) 4 3 Use this on ports that are not being used for an M12 connector (plug).
(1 mm/s for 16 or smaller) is achieved.
+ Stroke H + Stroke H ZZ + 2 strokes (mm) Bore size (mm) Stroke range (mm) B C F R J M T GA NA P S 32 25 to 800 38 58 M10 x 1.25 32 11 3/8 158 16 39 37 11 40 25 to 800 65 45 32 M10 x 1.25 11 3/8 12 158 42 36 11 50 25 to 800 52 76 M10 x 1.25 40 11 1/2 176 15 46 43 13 63 25 to 800 63 90 M12 x 1.5 42 14 1/2 186 15 52 43 15 80 25 to 1000 80 110 M16 x 1.5 40 16 3/4 202 17 65 44 18 100 25 to 1000
(Using Step No.2) [Normal mode] Step data example Pushing Trigger Pushing Moving Move Accele Decele Speed Position Area1 Area2 In position No. ration ration force L V speed mm/s force ment MOD mm/s mm mm mm mm mm/s2 mm/s2 % % % 0 1 Absolute 100 100.00 1000 1000 50 40 10 100 0 0 5 2 Absolute 50 50.00 1000 1000 0 0 0 100 0 0 0.1 Flow chart (example) Controller (1) Select/ input No.1 (Turn
Note 2) V, S and R specifications are 45T, 45T1.
1 digit (Ambient temperature of 25 3C) Repeatability 0.2% F .S. 1 digit Analog output accuracy 2.5% F .S.
1500 0 200 400 600 800 0 500 1000 1500 Flow rate L/min(ANR) Flow rate L/min(ANR) Flow rate L/min(ANR) AC40-A Rc 1/2 AC40-06-A Rc 3/4 0.6 0.6 Outlet pressure MPa Outlet pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 0 1000 2000 3000 0 1000 2000 3000 4000 Flow rate L/min(ANR) Flow rate L/min(ANR) Pressure Characteristics (Representative values) Conditions: Inlet pressure 0.7 MPa,
14.9 1 M12 2 5 Cable length (L) 010 1000 mm 050 5000 mm 6 4 3 Socket connector pin arrangement A-coded (Normal key) 40.7 27 30 5 50 L Connector specification S Straight Item Specifications Cable O.D. 6 mm Conductor nominal cross section 0.3 mm2/AWG22 Wire O.D.
PLC *3) (Provided by customer) IO cable *1) Part no.JX-CI-E--S PC *2)*3) (Provided by customer) Communication cable /USB cable *1) Part no.JX-CT-E 120.3 120.3 mm mm 200 200 mm/s mm/s 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 Setup Communication Power supply for controller cable IO cable 24VDC Power supply cable *1) Part no.JX-CD-E--S Power supply cable *1
(de-energized) 490 m/s2 in X, Y, Z directions 3 times each 1000 Vp-p, Pulse width 1 s, Rise time 1 ns Status LEDs Response time Hysteresis Power supply voltage Enclosure Operating temperature range Withstand voltage Insulation resistance Vibration resistance Impact resistance Noise resistance Note 1) For digital flow switch with unit switching function.
si in ng gl le e a ax xi is s t ty yp pe e) ) d do ou ub bl le e a ax xi is s t ty yp pe e) ) LECP Series This manual describes the actuators operation in combination with the LECP6 series controllers.