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Relationship between flow rate and PD -37No.PF-OMX0007-A Conversion formula of the process data and flow measurement value (1) Conversion formula from the process data to the flow measurement value: Pr = a (PD) + b (2) Conversion formula from the flow gauge measurement value to the process data: (PD) = (Pr b) / a Pr: Flow measurement value and pressure set value PD: Flow measurement value

PD measurement value The upper and lower limit values of the rated pressure value can be output compulsively as PD measurement value (process data). Press the UP or DOWN button to select the lower or upper limit value. : IO-Link mode can provide the communication function. : Refer to page 63 for details of the PD measurement value.

Out valid 1: Hold 2: Clear/ PD Out invalid IO-Link master 70h Fault output (IO-Link) BOOL 0: Clear 1: Hold 2: Force ON 71h IO-Link master Fault output (DO) BOOL 0: Clear / PD Out valid 1: Hold 2: Clear / PD Out invalid 72h IO-Link master Idle output (IO-Link) BOOL 0: Clear 1: Hold 2: Force ON 73h IO-Link master 01h to Idle output (DO) BOOL 0Ah Get/Set 1 0: direct 1: 16 bit 2: 32 bit 3: all

Out valid 1: Hold 2: Clear/PD Out invalid 0..1 Fault output (IO-Link) 0: Clear 1: Hold 2: Force ON 2..3 Fault output (DO) 3 0: Clear/PD Out valid 1: Hold 2: Clear/PD Out invalid 4..5 Idle output (IO-Link) 0: Clear 1: Hold 2: Force ON 6..7 Idle output (DO) 0: 2/2/2/2 1: 4/4/4/4 2: 8/8/8/8 3: 16/16/2/2 4: 32/2/2/2 5: 16/16/8/8 6: 16/16/16/16 7: 24/24/8/8 8: 24/24/24/24 9: 32/32/8/8 10: 32/

Individual Vacuum l\,ls o 1lA o o o o o o PS M3 o PS M5 o o PD PD o o PE A EXH 1la A A Individual SUP spacer 1PS,lPD, :PE (R1) PV M5 o 1ta o o o o spa@r (R16) lPV, xPS, IPD,lPE 'Common o o PS t\r3 a PS a a PD PD O o PE EXH 1t8 A A each valve unit.

Individual Vacuum l\,ls o 1lA o o o o o o PS M3 o PS M5 o o PD PD o o PE A EXH 1la A A Individual SUP spacer 1PS,lPD, :PE (R1) PV M5 o 1ta o o o o spa@r (R16) lPV, xPS, IPD,lPE 'Common o o PS t\r3 a PS a a PD PD O o PE EXH 1t8 A A each valve unit.

A Mounting part (1) Fixed PD port 3 Guideline of PD port 1 PD port 2 tightening torque 3 to 5 [N-m] (5) Recommended One-touch fitting to be mounted at the PD port is the KQ2S06-01[]S or KQ2S07-34[]S. One-touch fitting may interfere with the top surface of the pad depending on the fitting dimensions.

Port exhaust (Individual exhaust) 2 Table 2 Exhaust port Manual Override Note 6) Combination of Supply Valve and Release Valve Note 3) Symbol Supply valve Release valve Applicable body type Ejector Pump system PV = PD PV PD PV = PD PV PD Nil Non-locking push type K1 J1 Q1 Q2 Normally closed None Normally closed None Normally closed Normally closed Latching (Positive common) Latching (Positive

PD 74.2 68.6 D D S 2 B 2 B 2 B 2 B 2 B P 1 P 1 V V V V 4 A 4 A 4 A 4 A 4 A These figures show the JJ5SY3-10F2-05DR-C8-M ZZK204A-A1S0 .

+ PD A B C D E 7 6 3 10 CW CW 10 10 2 R 330 CCW input 330 CCW input 2 2 9 1 CCW CCW 8 9 9 5 4 14 13 12 R 330 PD input 1 PD 8 11 F Functions Function change-over switch Input signal terminal CW pulse input terminal By applying the pulse input, the actuator moves from the motor side to the end side.

Rc1/8 10 NPT1/8 12 12 12 G1/8 10 8 10 M50.8 12 10 12 11 - No.ZB-OM00301 V PV PD PD Assy PD PV PVPD OUT1 OUT1 ON OUT2 OUT2 ON LED ON/OFF UP ON/OFF DOWN S SET 12 - No.ZB-OM00301 () -550 0.0750.096Nm 10mm 1mm 13 - No.ZB-OM00301 1mm (11.8) KQ2L04-M5N 16 1 PV PD (11.8) KQ2H04-M5N KQ2L04-M5N KQ2W04-M5N ZB1-BK1-A M2x14 2 M22 KQ2L04-M5NKQ2H04-M5NKQ2W04-M5N 14 - No.ZB-OM00301

P.1 Pressure measurement value (PD) Pressure value [MPa] Figure 1: Relationship between the pressure measurement value (PD) and pressure value (e.g. : ISE20B unit MPa) Conversion formula from process data to pressure measurement value Pr = a(PD) + b Conversion formula from pressure measurement value to process data (PD) = (Pr b) / a PrPressure measurement value and pressure setting value

MY1B16/20 Stroke (LL) L 2 x 2 x B counterbore depth C LD through-hole 4 x MM depth M PA YW MY1B QW NW PB MY1M MY1C PG Q + Stroke MY1H Floating bracket mounting thread (2 x JJ thread depth from bottom of counterbore KK) PC MY1HT 1 LW M5 x 0.8 (Port) 2 x T counterbore depth E M5 x 0.8 PD (Hexagon socket head plug) MY1W YH QQ PP QQ RR SS RR SS H NH NE MY2C NC PP MY2H TT TT GA GA UU UU Cushion

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com PD (Hexagon socket head plug) YH QQ PP QQ RR SS RR SS H NH NE NC PP TT TT GA GA UU UU Cushion needle M5 x 0.8 (Port) 2-M5 x 0.8 G G 2-M5 x 0.8 (Hexagon socket head plug) (Hexagon socket head plug) GB M5 x 0.8 (Hexagon socket head plug) N A Z + Stroke

+ PD A B C D E 7 6 3 10 CW CW 10 10 2 R 330 CCW input 330 CCW input 2 2 9 1 CCW CCW 8 9 9 5 4 14 13 12 R 330 PD input 1 PD 8 11 F Functions Function change-over switch Input signal terminal CW pulse input terminal By applying the pulse input, the actuator moves from the motor side to the end side.

+ PD A B C D E 7 6 3 10 CW CW 10 10 2 R 330 CCW input 330 CCW input 2 2 9 1 CCW CCW 8 9 9 5 4 14 13 12 R 330 PD input 1 PD 8 11 F Functions Function change-over switch Input signal terminal CW pulse input terminal By applying the pulse input, the actuator moves from the motor side to the end side.

depth TD RB 4 x RE depth RF 4 x RD through MB J PC RC L UB G TB D QB 2 x K MA PA H (Supply port of rod end) P 4 x UC depth UD F UA (4.7) PB + Stroke (Supply port of head end) P C E N B + Stroke A + Stroke (Supply port of rod end) P (Plug: Width across flats 8) (Supply port of head end) P (Plug: Width across flats 8) (Breathing port on guide) M5 x 0.8 (Plug: Width across flats 8) Note 2) PD