PFxx-OMY0005

(Displays 0 when the value is below 10 L/min.)

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

This could cause an auto switch malfunction. 0.3 35.7 37 5.5 5.5 10 K 21 NA x M5 x 0.8 thread depth 6.5 5.5 10 KA 21 M 30 3 x M6 x 1 thread depth 10 5H9 ( ) depth 5 +0.030 0 14 2 N 1 x F 6.5 41 4 x M5 x 0.8 thread depth 7 12.5 (Extension end adjuster) F 3.5 49 1 24 14.5 24.5 24.5 28 29 58 6 Retraction end adjuster 5H9 ( ) depth 5 +0.030 0 11 5.5 N x M5 x 0.8 thread depth 6 Note 1) Note 2

PFxx-OMA1007

to "AMS20/30/40/60A-R/N/F#D" for dimensions other than "A" and "F".

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

V] 10 [V] 10 [pulse] 10 [pulse] 0 0 10 [pulse] 10 [pulse] -10 [V] -10 [V] CW direction CW direction App. 20 APPENDIX Setting value Output item Description Setting value Output item Description 0A Feedback position (Note 1, 2, 3) (10 V/1 Mpulse) 0B Feedback position (Note 1, 2, 3) (10 V/10 Mpulse) CCW direction CCW direction 10 [V] 10 [V] 1 [Mpulse] 10 [Mpulse] 0 0 1 [Mpulse] 10 [Mpulse] -

10

F F 1 2 1 2 MHL2-10DZ MHL2-16DZ MHL2-16D Z MHL2-10D Z 60 60 25 25 Pressure 0.6 MPa Gripping force [N] Gripping force [N] Gripping force [N] Gripping force [N] Pressure 0.6 MPa 50 50 20 20 Pressure 0.6 MPa 0.5 MPa Pressure 0.6 MPa 0.5 MPa 40 40 15 15 0.4 MPa 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 30 30 0.4 MPa 10 10 0.3 MPa 20 20 0.3 MPa 0.3 MPa 0.3 MPa 0.2 MPa 5 5 10 10 0.2 MPa 0.2 MPa 0.2 MPa 10

4-channel Flow Monitor ( compatible)

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to

CL

TdH9 TB +0.036 0 +0.036 0 +0.043 0 CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 20 25 32 40 42 48 53 60 10 10 10 10 5.5 5.5 6.6 6.6 31 37 38.5 42.5 40 47 47 55 20 25 32 40 36 43 50 58 10 10 10 10 5.5 5.5 6.6 6.6 25 30 35 40 (29.3) (33.1) (40.4) (49.2) 8 10 12 14 8 10 12 +0.043 0 14 CG-020-24A CG-025-24A CG-032-24A CG-040-24A Applicable bore size (mm) Applicable bore size (mm) Part no.

MHZ2/MHZJ2

External gripping force Internal gripping force MHZ 2-10D MHZ 2-10D Pressure 0.7MPa 25 20 0.6MPa 20 Pressure 0.7MPa 15 0.5MPa MHZ2/Standard MHZJ2/With dust cover Gripping force N Gripping force N 0.6MPa 0.5MPa 0.4MPa 0.3MPa 0.2MPa 15 0.4MPa 10 0.3MPa 10 0.2MPa 5 5 0 10 20 30 40 50 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm F F F F MHZ 2-16D MHZ 2-16D Pressure 0.7MPa 60 1N

Membrane Air Dryer

40 24 223 209 1/4, 3/8 56 80 56 195 241 195 10 18 10 89 70 95 70 35 50 35 20 28 20 209 255 209 195 241 195 1/4 3/8 1/4 7.5 14 12 7 6 127 7 6 12 10 7 89 35 Made to Order Series IDGF) 91 11 60 50 M V Purge air for 2.3

Title not found

Cylinder Bore Sizes (in inches) Valve Type Cv Type* 34 1 118 112 2 214 212 3 314 4 6 Micro-Line 0.11 SA F S S LTV 0.18 SA,DA F F F F M M M M S S Nova 1.00 SA,DA F F F F F F F M M Duramatic 0.18 SA,DA F F F F M M M M S S Duramatic 0.63 SA,DA F F F F F M M M M Capsula 0.75 SA,DA F F F F F F M M M Capsula 3.17 SA,DA F F F FT-1, FC-1 0.13 SA F F M S 4B-1, 4W-1 0.48 SA,DA F F F F M M M S FC51,

Title not found

Cylinder Bore Sizes (in inches) Valve Type Cv Type* 34 1 118 112 2 214 212 3 314 4 6 Micro-Line 0.11 SA F S S LTV 0.18 SA,DA F F F F M M M M S S Nova 1.00 SA,DA F F F F F F F M M Duramatic 0.18 SA,DA F F F F M M M M S S Duramatic 0.63 SA,DA F F F F F M M M M Capsula 0.75 SA,DA F F F F F F M M M Capsula 3.17 SA,DA F F F FT-1, FC-1 0.13 SA F F M S 4B-1, 4W-1 0.48 SA,DA F F F F M M M S FC51,

Modular F.R.L. Unit

Model Description AC10 AC20 AC25 AC30 AC40 AC40-06 AC50 AC55 AC60 G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 G36-10-01 GC3-10AS G36-2-01 GC3-2AS G36-10-01 GC3-10AS G36-2-01 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G-27-10-R1 Note 1) Pressure gauge

HRX-OM-S004

Automatic fluid fill port Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Over flow port Rc1 (Symbol F: G1, Symbol N: NPT1) Wetted material Stainless, Cupper(Heat exchanger brazing), Brass, Bronze PTFE, PU, EPDM, PVC, NBR, PE, NR, PBT, POM, PP, Carbon, Ceramic Power supply 3phase 380 to 415VAC(50/60Hz) Allowable voltage fluctuation 10% (No continuous voltage fluctuation) Rated current A 20 Earth

Table of Contents

P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 CDRB1BW50 Series CRB1 Series CRB2 Single/Double type CDRB1BW63, 80, 100 Solid state switch for size 10 and 15 requires no switch block, therefore the unit part no. will be P611070-13.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

swithch Size 10 15 20 30 40 Size 10 15 With auto switch Size: 10, 15 90 L CDRB2 10 WU F 180 S With auto switch Size: 20, 30, 40 CDRB2 20 WU B 180 S R73 L Number of auto switches With auto switch (With switch unit) Size S Nil 1 pc. 20 30 40 With angle adjuster 2 pcs.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 CDRB1BW50 Series CRB1 Series CRB2 Single/Double type CDRB1BW63, 80, 100 Solid state switch for size 10 and 15 requires no switch block, therefore the unit part no. will be P611070-13.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

+ Stroke Relief port With air cushion Cushion valve (Width across flats WH) WA GA RA Relief port M5 x 0.8 WB 20 10 S + Stroke ZZ + Stroke (mm) AL Bore size Stroke range 1 2 A GB I J MM P S ZZ K NA C H RA B1 KA D H1 E F GA Standard Long 20 25 32 40 50 63 80 100 35 40 40 50 58 58 71 71 5 5.5 5.5 6 7 7 10 10 24 29 35.5 44 55 69 86 106 7 7 7 9 10 10 10 10 0 0 0 10 10 10 10 10 15.5 19.5 19.5

Rotary Actuator/Vane Type

E L Double shaft/Port location: Side ported MRQ K G1 F D B N V1 Body (B) T V2 M S Body (A) C G2 J F L A 2 x R E Size: 10 Size: 10, 15, 20, 30, 40 A port B port N W 2 x R 2 x M3 x 0.5 depth 3 Size 10 only (For unit mounting) Y X DRefer to page 61 for details of shaft types J, K, T and Y.

Hygienic Design Cylinder Series HY

(mm) Bore size A1 82 85 MM M6 x 1.0 M8 x 1.25 20 25 B1 10 13 C1 10 12 H1 3.6 5 K 5 5 KA 6 8 L1 22 24 X 12 14 (mm) Bore size A 70 71 H M4 x 0.7 M5 x 0.8 20 25 B 60 61 C 8 10 D 8 10 E 33 40 F 6 6 I 42 50 K 5 5 KA 6 8 L 10 10 M 22 26 N 4.4 5.4 OA M5 x 0.8 M6 x 1.0 Q 14 14 R 10 10 SA 6.5 6.5 SB 10.5 11 Stroke range 50 or less 50 or less Note 1) The [ ] value denotes dimensions with the auto

SYJ300/500/700

port) 14.5 16 L plug connector (L): SYJ72-L-01 (-F) M plug connector (M): SYJ72-M-01 (-F) DIN terminal (D): SYJ72-D-01 (-F) M8 connector (MO): SYJ72-WO-01 (-F) Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 65 31.5 [38.5] 57.5 Max. 10 89.6 16.1 46.2 31.1 M8 x 1 36 18.5 42.6 [49.6] Approx. 300 (Lead wire length) Pg7 80.5 [82.7] 90.5 70.7 [72.9] 79.6 72.2 65.7 49.7 23.5 10.9