C76

-45 to 6-10-46.

MK

Data 10-7-13 14 Rotary Clamp Cylinder: Heavy Duty Type Series MK2 20, 25, 32, 40, 50, 63 How to Order MK2 B S F9BW 20 10 R F Number of auto switches Nil S 2 pcs. 1 pc.

o

M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

o

M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

Air Slide Table

F A F Lr 6 6 6 Lr = 40 mm MXQR6-30 0.015 0.03 0.05 MXQR6-10 MXQR6-20 MXQR6-30 MXQR6-50 MXQR6-40 MXQR6-10 MXQR6-20 MXQR6-30 MXQR6-50 MXQR6-40 MXQR6-30 MXQR6-50 Table displacement (mm) Table displacement (mm) Table displacement (mm) MXQR6-50 0.04 MXQR6-20 0.010 0.02 MXQR6-20 MXQR6-40 0.03 MXQR6-40 0.02 MXQR6-10 0.01 0.005 MXQR6-10 0.01 0 0 10 20 30 40 80 120 0 10 20 30 Load (N) Load (N) Load

5 Port Solenoid Valve

SS0700-80A-2 SS0700-80A-4 SS0700-TR-l 10 S0700-GS-5 Applicable tube Applicable tube 2 Applicable tube 3 Applicable tube 4 Applicable tube 1/8" Applicable tube 5/32" Symbol C2 C3 C4 N1 N3 Gasket, Screw 10 Note 1) Gasket 10 Note 1) Clip Note) Above part number consists of 10 units. Each unit has one gasket and two screws. 2 Note 2) Tie-rod assembly Note 1) 1 set includes 10 pieces.

Guide Cylinder Series MGG

(mm) 1 300st 1 200st 100st 200st 100st 100st 75st 75st 0 0 20 30 40 50 0 0 10 20 30 40 50 60 70 0 0 10 20 40 60 80 100 Allowable end load F (N) Allowable end load F (N) Allowable end load F (N) MGGM 40Stroke 6 (Slide bearing type) 5 800st 700st 4 600st 3 500st 2 300st 400st st: Stroke (mm) 1 200st 100st 0 0 20 40 60 80 100 120 140 160 Allowable end load F (N) MGGM 50Stroke 8 (Slide bearing

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

W W FY B D E d MA M a NB C F A K NA B S + Stroke FT H FX ZZ + Stroke FZ With rod boot e 10 l f h + l ZZ + l + Stroke (mm) Bore size (mm) A a B C d F FD FT FX FY FZ G GA GB J K M MA MM NA NB P R D E 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 40 23 10 60 44 18 25 9 10 77 44 95 14 17.5 9.5 M8 x 1.25 18 16 20 M14

SMC

5H9 depth 5 +0.030 0 (mm) Model F 50 50 50 60 35 60 70 70 80 ZZ 121 121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NA 2 2 2 2 2 2 4 4 4 NN 2 2 2 2 3 4 5 6 7 KA 169 223 275 H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70

Table of Contents

Note 1) For power consumption of AC type, refer to page 2-4-10. Note 2) Except double (latching). 5 6 Low wattage type Y (2) Note) 200/220 VAC models are applicable to the F and L kits.

New

Torr (mmHg) 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 3. Mount a valve with its coil position upward, not downward. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.

PFxx-OMY0005

(Displays 0 when the value is below 10 L/min.)

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

This could cause an auto switch malfunction. 0.3 35.7 37 5.5 5.5 10 K 21 NA x M5 x 0.8 thread depth 6.5 5.5 10 KA 21 M 30 3 x M6 x 1 thread depth 10 5H9 ( ) depth 5 +0.030 0 14 2 N 1 x F 6.5 41 4 x M5 x 0.8 thread depth 7 12.5 (Extension end adjuster) F 3.5 49 1 24 14.5 24.5 24.5 28 29 58 6 Retraction end adjuster 5H9 ( ) depth 5 +0.030 0 11 5.5 N x M5 x 0.8 thread depth 6 Note 1) Note 2

PFxx-OMA1007

to "AMS20/30/40/60A-R/N/F#D" for dimensions other than "A" and "F".

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

V] 10 [V] 10 [pulse] 10 [pulse] 0 0 10 [pulse] 10 [pulse] -10 [V] -10 [V] CW direction CW direction App. 20 APPENDIX Setting value Output item Description Setting value Output item Description 0A Feedback position (Note 1, 2, 3) (10 V/1 Mpulse) 0B Feedback position (Note 1, 2, 3) (10 V/10 Mpulse) CCW direction CCW direction 10 [V] 10 [V] 1 [Mpulse] 10 [Mpulse] 0 0 1 [Mpulse] 10 [Mpulse] -

10

F F 1 2 1 2 MHL2-10DZ MHL2-16DZ MHL2-16D Z MHL2-10D Z 60 60 25 25 Pressure 0.6 MPa Gripping force [N] Gripping force [N] Gripping force [N] Gripping force [N] Pressure 0.6 MPa 50 50 20 20 Pressure 0.6 MPa 0.5 MPa Pressure 0.6 MPa 0.5 MPa 40 40 15 15 0.4 MPa 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 30 30 0.4 MPa 10 10 0.3 MPa 20 20 0.3 MPa 0.3 MPa 0.3 MPa 0.2 MPa 5 5 10 10 0.2 MPa 0.2 MPa 0.2 MPa 10

4-channel Flow Monitor ( compatible)

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to

CL

TdH9 TB +0.036 0 +0.036 0 +0.043 0 CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 20 25 32 40 42 48 53 60 10 10 10 10 5.5 5.5 6.6 6.6 31 37 38.5 42.5 40 47 47 55 20 25 32 40 36 43 50 58 10 10 10 10 5.5 5.5 6.6 6.6 25 30 35 40 (29.3) (33.1) (40.4) (49.2) 8 10 12 14 8 10 12 +0.043 0 14 CG-020-24A CG-025-24A CG-032-24A CG-040-24A Applicable bore size (mm) Applicable bore size (mm) Part no.

MHZ2/MHZJ2

External gripping force Internal gripping force MHZ 2-10D MHZ 2-10D Pressure 0.7MPa 25 20 0.6MPa 20 Pressure 0.7MPa 15 0.5MPa MHZ2/Standard MHZJ2/With dust cover Gripping force N Gripping force N 0.6MPa 0.5MPa 0.4MPa 0.3MPa 0.2MPa 15 0.4MPa 10 0.3MPa 10 0.2MPa 5 5 0 10 20 30 40 50 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm F F F F MHZ 2-16D MHZ 2-16D Pressure 0.7MPa 60 1N