CNG

x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 141 (149) 11 11 88 15 (16) 23 5.5 3 12 30 M6 x 0.75 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 151 (159) 11 11 98 15 (16) 25 6 3 12 25 M8 x 1.0 M5 x 0.8 depth 8 5.5 10 M10 x 1.25 35.5 Rc 1/8 26.5 2.5 73 154 (162) 11 10 (11) 99 15 (16) 28.5 6 3 12 20 M10 x 1.25 M6 x 1 depth 12 6 14 M14 x 1.5 44 Rc 1/8 28 2.5 81 169

High Vacuum Angle Valve

Bellows seal C Double acting Bellows seal F Single acting (N.C.)

Rubber seal 5 Port Solenoid Valve Series SYJ5000

O.D.: 4, 5/32" : 6, 1/4" (2.3) L plug connector (L): SYJ5120-L-M5(-F) M plug connector (M): SYJ5120-M-M5(-F) DIN terminal (D): SYJ5120-D-M5(-F) M8 connector (W0): SYJ5120-W0-M5(-F) Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 82.1 Max. 10 60.9 28.1 [35.1] 53.4 12.7 42.1 32.6 M8 x 1 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 73 [75.2] (2.3) 63.2 [65.4] 83 72.1 3

CRBU

T U V W X Y Model H K L M N R A B C D G E(g6) F(h9) S1 S2 5-0.004 -0.012 -0.004 -0.012 -0.005 -0.014 0 -0.043 0 -0.043 0 -0.043 CRBUWU15-lD 34 25 21.2 18 1.5 15.5 10 0.5 10.5 10.5 3.5 M5 X 0.8 M3 X 0.5 21 3 29 36 48 3.2 12 CRBUWU20-lD 34.5 25 20 1.5 17 10 0.5 11.5 11 42 4.5 M5 X 0.8 M4 X 0.7 26 4 36 44 59 4 6 14 CRBUWU30-lD 50 47.5 29 22 2 17.5 12 1 12 13 5.5 M5 X 0.8 M5 X 0.8 29 4.5 42 52

Stopper Cylinder

QA F 13 QU [mm] Tubing O.D. 6 29 8 QB Stroke Q Bore size A B D E F H J K M N O P Q T V Y Z W Rc NPT G Rc NPT G 16 59.5 41.5 10 29 6 18 18 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 20 18 37 0 0 0 20 67 45 12 36 8 22 22 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 24 22 47 1.5 1.5 0 32 68 48 20 45 7.5 20 4.5 32 34 5.5 9 depth 7 1/8 1/8 1/8 20 36 20 14 40 80.5 52.5 25 52 8 28 5 41 40 5.5

PSxx-OMM0006CN

) A A N01 NPT1/8 (M5) W1 Rc1/8 B B WF1 G1/81 D D M5 M5X0.8 () E C4 4 C6 6 F + 1IS0228-1 P10/1 X NPN2() Y PNP2() 1 R NPN2 +/ T PNP2 +/ M SI2 P (psi)1 S NPN2 +/ 1 2kPaMPa V PNP2 +/ -9No.PS-OMM0006CN-E /1 1 01 N01 W1 WF1 M5 C4 C6 A A ZS-24-A X X X B B ZS-24-B X X X X X D D ZS-24-D X X X ZS-35-C X X X X X E ZS-35-D X X ZS-35-F X X X X X + F ZS-35-G X X 1/ 1 ZS-24-A A M35 L,

Modular Type Regulators Series AR

Symbol 10 20 25 30 40 50 60 Body size Description Nil K Note 1) Without backflow function With backflow function With backflow function + Metric thread (M5) Rc NPT G Nil Thread type N F + M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 Port size + Nil B Note 3) a Without mounting option With bracket With set nut (for panel fitting) Mounting H + Nil E Without pressure gauge Square embedded type

9.8

(Refer to Copy function on page 8.) 3 Series ZSE10(F)/ISE10 Dimensions ZSE10(F)/ISE10 M5 6.4 (7.7) (30) 2 x 3.3 M5 x 0.8 (12) 1.2 25 13 3.5 9.8 51.8 4.2 ZSE10(F)/ISE10 M5R 1.2 6.4 25 51.8 4.2 9.8 4.5 M5 x 0.8 4 Digital Pressure Switch Series ZSE10(F)/ISE10 ZSE10(F)/ISE10 01 6.4 2 x 3.3 1.2 Width across flats 10 Width across flats 12 11 13 13 25 3.5 8 R1/8 9.8 12.5 51.8 4.2 ZSE10(F)/ISE10

Low Profile Air Gripper Series MHF2

Operating pressure: 0.4 MPa Model Selection Illustration When gripping a workpiece as in the figure to the left and with the following definitions, F: Gripping force (N) : Coefficient of friction between attachments and workpiece m: Workpiece mass (kg) g: Gravitational acceleration (= 9.8 m/s2) mg: Workpiece weight (N) F F the conditions under which the workpiece will not drop are mg F F

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

03 Rc 1 4 Rc 3 8 T F SJ Option Mountable only for VFS3120.

Free Mount Cylinder

F FK FL FY GC GA Model Air port Vacuum port M5 x 0.8 M5 x 0.8 M5 x 0.8 16.5(1) ZC(D)UKR16 ZC(D)UKR20 ZC(D)UKR25 ZC(D)UKR32 Rc 1 8 M5 x 0.8(2) 7 20 32 2 6 7 8 13 17 28 19 5 8 9 10.5 26 32 40 40 50 62 3 4 5 8 10 12 9 10 11 8 10 12 16 20 24 20 22 29 33 43.5 51.5 21.5 22 22.5 19 21.5 23 M5 x 0.8 M5 x 0.8 Rc 1 8 6.6 5 to 50 8 5 to 50 11.5 5 to 50 SA H HA J L P Q QA R S T W Y Z Model ZC(D)UKR16

Guide Cylinder/Compact Type Series MGC

Note 2) Bore sizes 20 and 25: M5 x 0.8 only.

Rotary Actuator

(Example) For M4: L2 = 8 Applicable shaft types: X, Z L1 + (3 x P) Q1 = M C1 = C L2 = L1 = L2 = D1 = Q2 = M Q2 = M C1 Z axis X axis X = L1 = [mm] [mm] [mm] Size Q1 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size Q2 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size X L1max D1 30

10

F = One finger thrust.

2 Phase Stepper Motor/Without Motor Brake Series LXS

Stroke + 246 75.5 59 LXSH S B Q F G x I Without brake 5H9 +0.030 0 depth 5 D-5.1 through Refer to Cross section C-C, bottom view. 5H9 +0.030 0 depth 5 Phillips binding head screw (included) 32 5 M3 x 4l E-M5 2-M3 x 0.5 Effective thread depth 4 (PE terminal) 6 Thread depth 10 Crimping terminal 38 76 46 Toothed lock washer (included) Motor wire (300mm) Photo micro sensor wire (300mm) Phillips

Rotary Actuator/Vane Style Series CRB2

(mm) R F (h9) E (g6) A B C D G K L M N P Q Y Model 90 180 270 CDRB2BW10-S CDRB2BW15-S CDRB2BW20-S CDRB2BW30-S 9 12 14 16 4 5 6 8 29 34 42 50 15 20 29 40 29 29 30 31 14 18 20 22 3 4 4.5 5 9 10 10 12 0.5 0.5 0.5 1 10 15 20 30 25 25 25 25 24 29 36 43 18.5 18.5 25 25 M5 x 0.8 M5 x 0.8 M3 x 0.5 M3 x 0.5 M3 x 0.5 depth 5 M3 x 0.5 depth 5 M5 x 0.8 M5 x 0.8 M4 x 0.7 depth 7 M5 x 0.8 depth 10 60 Series

Pin Cylinders Series CJP2/CJP

10 8.5 6.5 7.5 24 10 M5 x 0.8 M14 x 1.0 M5 x 0.8 19.5 4 43.5 Built-in magnet: CDJP2B6 to 16 Z + Stroke S + Stroke H A' F GB GA 2 x P A F' Mounting nut Width across flats B1 A' Rod end nut Width across flats B2 30 D-1 D E J C MM Without rod end thread NN W B (mm) Symbol A A' B B1 B2 C D E F F' GA GB H J MM NN P S W Z Bore size 6 10 16 7 9 14 14 5.5 2 3 16.5 8 6.5 5.5 6.5 17 6 M3 x 0.5 M10

MXW Series Long Stroke Slide Table

port M5 x 0.8 Operation direction A (Plug: M-5P) 49 46 38 5 22 12 19 4 40 25 Y Y 5.5 Operating port M5 ~0.8 24 84 Operation direction B (Plug: M-5P) Operation direction B A 7 6.5 13 10 10 13 A 14.8 30 7 24 A 15.8 Z Cross section AA (scale 50%) (N-1) x H G H 6 depth 4.5 5H9 +0.03 N-M4 x 0.7 thread depth 8 0 Bottom through hole 3.3 5H9 +0.03depth 4.5 0 F E Model J N H G F E Z MXW8-25 64 3

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 14.5 13.3 13.5 54.1 43.3 35 5.8 19 19 2 x 3.2 M5 x 0.8 (External pilot port) 17 17 (For mounting) 3 A B 22 SMC A B B A PE X EB EA P Manual override 41 2.8 A side: Orange B side: Green (Light/surge voltage suppressor) M5 x 0.8 (Pilot EXH port) 89.3 (L = 300 to 5000) 83.7 M12 waterproof connector 53.5 48.5 24.5 16.5

ZR

PE port Vacuum release pressure port M5 PD port Ejector unit Non-locking push type Manual override EXH PE PE 109 PD PD PD PD 80.8 81.5 PS PS PV PV 61.5 52 50 13.5 PS PD 42 35.5 33 31.5 28 PV 17 16.5 PV PV Release flow rate adjustment needle Vacuum release pressure port M5 PD port Pilot valve supply pressure port M5 PS port 3 2.5 1 1.5 7.5 7.5 4.5 2-Rc 1/2 EXH port 2-M5 PD port Air supply