21

1.5 FX Effective thread length 2 x FL FZ FT S + Stroke F 40 Boss-cut 40 20 to 32 ZZ + Stroke Rod Flange (F) (mm) A 14.5 AL 12 B 34 B1 13 B2 26 C2 30 D 8 E 20 F 13 FD 7 FL 10.5 FT 4 FX 60 FY FZ 75 G 6 H 31 H1 5 H2 8 Bore size 0 0.033 0 0.033 0 0.033 0 0.039 20 25 32 40 17.5 15 40 17 32 37 10 26 13 7 10.5 4 60 75 6 34 6 8 17.5 15 40 17 32 37 12 26 13 7 10.5 4 60 75 8 34 6 8 23.5 20.5 52

15

NZ M5 x 0.8 9 70 50 4 44 89.8 85 M3 x 12 M5 x 45 14 NY M4 x 0.7 8 70 50 4 44 89.8 85 M3 x 12 M5 x 45 14 NX M5 x 0.8 9 63 50 5 47.2 89.8 85 M4 x 12 M5 x 45 9 NW M5 x 0.8 9 70 50 5 45 89.8 85 M4 x 12 M5 x 45 9 NV M4 x 0.7 8 63 50 5 47.2 89.8 85 M4 x 12 M5 x 45 9 NU M5 x 0.8 9 70 50 5 45 89.8 85 M4 x 12 M5 x 45 11 NT M5 x 0.8 9 70 50 4 44 89.8 85 M3 x 12 M5 x 45 12 NM2 M4 x 0.7

CQS

M5 X 40 l M5 X 45 l M5 X 50 l M5 X 55 l M5 X 60 l M5 X 65 l M5 X 70 l M5 X 75 l M5 X 80 l M5 X 85 l 40 45 50 55 60 65 70 75 80 85 M3 X 30 l M3 X 35 l M5 X 40 l M3 X 45 l M5 X 50 l M3 X 55 l 30 35 40 45 50 55 6.5 8.5 Note 1) The appropriate plain washer must be used for through-hole mounting.

Electric Actuator with Integrated Guide

lead Series Series 6 Nil X10 F H L 6 8 Standard motor 6mm Cable length Non-standard motor 10mm Series 8 2 3 4 5 2m 20mm Motor specification 3m Motor output Nil G R Y Standard motor 4m Brake Matsushita Electric Industrial Co., Ltd. 5m Nil K E F Mitsubishi Electric Corporation 100W None Switch specification Yasukawa Electric Corporation 200W With brake Nil 1 2 3 4 5 6 7 A B Without switch

VM

VM120-01-07 VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Cross roller plunger Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM-30AR Red Push button (Mushroom) VM-30AB

Electric Actuator/Slider Type

Rubber back of the belt is softened and sticky f.

VQ7-6/7-8

AXT632-45-1 AXT632-45-2 AXT632-45-4 AXT632-45-5 AXT632-45-6 AXT632-45-7 AXT632-45-8 AXT632-45-9 AXT632-45-10 AXT632-45-11 AXT632-45-12 AXT632-45-13 Mounting bolt Size M5 x 35 with SW M5 x 15 with SW M5 x 45 with SW M5 x 60 with SW M5 x 65 with SW M5 x 70 with SW M5 x 75 with SW M5 x 90 with SW M5 x 95 with SW M5 x 100 with SW M5 x 105 with SW M5 x 115 with SW VK Option mounting diagram SMC

4/5 Port Air Operated Valve SYJA3000 Series

M5 x 0.8 (Piping port) 10 10 7 7 14 M3 x 0.5 28 (Piping port) 1476 4/5 Port Air Operated Valve SYJA5000 Series SYA How to Order SYJA SYJA VZA A, B port size Bracket VFA One-touch fitting for 6 C6 One-touch fitting for 4 M5 x 0.8 C4 M5 With bracket F Nil Without bracket VFRA *The bracket is not mounted. *2 position single only VPA4 SYJA SYJA5 20 1 M5 Body ported VZA VTA SYJA5 40 2 Base mounted

Compact 5-Port Solenoid Valve

PNP sensor input NPN sensor input Without input block Nil M12, 2 inputs A D M12, 4 inputs B E M8, 4 inputs C F * When not selecting an SI unit, the symbol will be nil. u P, E port entry, SUP/EXH block assembly P, E port entry Internal pilot Internal pilot, Built-in silencer U side (2 to 10 stations) U C D side (2 to 10 stations) D E Both sides (2 to 24 stations) B F * The 3/5(E) port is

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Table displacement due to yaw moment load Displacement at A when load is applied at F . Table displacement due to roll moment load Displacement at A when load is applied at F .

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

4/5 Port Air Operated Valve Series SYJA3000 1

fitting for 4 M5 x 0.8 C4 M5 With bracket F Nil Without bracket Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SYJA5 20 1 M5 Body ported SYJA5 40 2 Base mounted Port size Thread type Type of actuation Nil Rc G NPT NPTF Without sub-plate Nil 4 3 2 position double

AC Servo Motor Driver (Pulse input type/Positioning type ）

600 _ _ 1 F 290 7 9 7.

Fieldbus System

Linearity (77F) 0.15% F .S. Repeatability (77F) 0.6% F .S. 0.5% F .S.

VQ7-6/7-8

AXT632-45-1 AXT632-45-2 AXT632-45-4 AXT632-45-5 AXT632-45-6 AXT632-45-7 AXT632-45-8 AXT632-45-9 AXT632-45-10 AXT632-45-11 AXT632-45-12 AXT632-45-13 Mounting bolt Size M5 x 35 with SW M5 x 15 with SW M5 x 45 with SW M5 x 60 with SW M5 x 65 with SW M5 x 70 with SW M5 x 75 with SW M5 x 90 with SW M5 x 95 with SW M5 x 100 with SW M5 x 105 with SW M5 x 115 with SW VK Option mounting diagram SMC

VQ5000

(for F, L, S & T1 kits) VVQ5000 3A 1 VVQ5000 2A 1 Electrical entry Electrical entry T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) L F Note1) L F Note1) C C Option Option Nil W Note 2) Standard IP65 enclosure Exhaust cleaner mounting Rc1 Exhaust cleaner mounting Rc1 1/2 Direct exhaust with silencer box Standard

E-P HYREG ® Series VY1

F .S. 5% F .S.

Valve Single Unit

How to Order Valves 5 L N SX 5 1 20 01 Thread type Series A, B port size Nil Applicable series Rc Symbol Port size M5 x 0.8 3 SX3000 5 SX5000 G F M5 One-touch fitting for 4 C4 N 7 SX7000 NPT SX3000 One-touch fitting for 6 C6 NPTF T Type of actuation 1 8 01 1 2 position single One-touch fitting for 4 C4 Rated voltage SX5000 2 2 position double One-touch fitting for 6 C6 5 24 VDC 6 12 VDC 3

I

M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

CG5-S

8 8 5 28 23 5.5 14 2.5 33 25 42 M5 x 0.8 M12 x 1.0 12.5 9.5 47 6 9 75 4 Series CJ5-S Dimensions R V Front flange type (F)/CJ5FS CA Rod cover side Piping port 2-M5 x 0.8 Piping port M5 x 0.8 GB GA NN MM Cover surface BA CB D FY FB 2-FC With head cover port in axial position (R) Mounting hole NB A BB FX FZ NA F FT S + Stroke Z + Stroke H (mm) A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM