ZP

Connection 2 x 4, 3.5 x 7, 4 x 10 10 to 16 (Thin section series) 2 to 8 10 to 16 20 to 32 40, 50 2 x 4, 3.5 x 7, 4 x 10 10 to 16 (Thin section series) 2 to 8 10 to 16 20 to 32 40 to 50 4, 6 Nylon tube, 4, 6 Urethane tube Vacuum entry Thread dia.

LG1H

LG1H/ Aluminum body LG1TH/ Stainless steel body LJ1 LG1 LC1 LX LC6D/LC6C Switches 50 10 10 50 Horizontal load 100% Horizontal load 50% 20 10 20 10 Horizontal load 100% Horizontal load 50% Amount of deflection m Amount of deflection m 500 1000 1000 500 200 100 200 100 50 20 50 20 10 10 5 5 Lateral load 100% Lateral load 100% 0.5 1 2 0.5 1 2 Lateral load 50% Lateral load 50% Horizontal empty

Single Axis Electric Actuator Series LJ1H

6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 3000 a = 2000 m Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 44

Metal Seal/Rubber Seal Series VQ Body Ported

For details, refer to page 2-4-69. Types with 10, 16, or 20 pin are also available. For details, refer to page 2-4-69.

Series AP500

) 5000 psig (34.5 MPa) 10 psig (69MPa) 40 to 160F (40 to 71 C) (No freezing)1) 0.09 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 3) Ra max 15 in. (0.4 m) Option: 10 in. (0.25 m), 7 in. (0.18 m), 5 in. (0.13 m) Face seal, Tube weld NPT 1/8 inch 4) 0.41 psig (0.0028 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Bottom mount (Option: panel mount) 0.51

MXS

ZZ 87 87 87 97 112 162 210 260 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 KA NA 2 2 2 2 2 4 4 4 G 16 16 16 16 21 26 39 19 HA 40 40 40 50 30 70 70 70 N 4 4 4 4 6 6 6 8 GA 16 16 16 16 51 61 109 159 MXS16-10 MXS16-20 MXS16-30 MXS16-40 MXS16-50 MXS16

C76

0.3 L (100) (100) 0.5 W W F W (100) (100) 0.7 (100) (100) 0.3 G 92 86 0.5 77 71 0.7 6-10-4 5 Cylinder: Standard/Non-rotating Type Double Acting, Single/Double Rod Series C76 32, 40 How to Order CJ1 C Double acting Single rod K R2 76 J D E C A 32 100 CJP CJ2 C Double acting Double rod W 76 D E 32 100 C JJ B CM2 Auto switch mounting type CG1 Rail mounting Band mounting A B Built-in magnet

C76

0.3 L (100) (100) 0.5 W W F W (100) (100) 0.7 (100) (100) 0.3 G 92 86 0.5 77 71 0.7 6-10-4 5 Cylinder: Standard/Non-rotating Type Double Acting, Single/Double Rod Series C76 32, 40 How to Order CJ1 C Double acting Single rod K R2 76 J D E C A 32 100 CJP CJ2 C Double acting Double rod W 76 D E 32 100 C JJ B CM2 Auto switch mounting type CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way

Slider Type Ball Screw Drive/11-LEFS Series

upper limit Suction flow rate: 0 L/min 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] LAT Suction flow rate: 20 L/min ISO Class 5 upper limit LZ 10 10 LC3F2 Suction flow rate: 40 L/min ISO Class 4 upper limit ISO Class 4 upper limit 1000 1000 Suction flow rate: 20 L/min Suction flow rate: 50 L/min 100 100 Suction flow rate: 30 L/min 10 10 1 1 0 0.1 0.6 0.5

NCQ8

150 175 200 250 300 350 400 NCQ8WB200-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQW8B250-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 #10-24UNC1-1/4 1-3/8 1-1/2 1-5/8 1-3/4 1-7/8 2 2-1/8 2-3/8 2-5/8 2-7/8 3-1/8 3-5/8 4-1/8 4-5/8 5-1/8 #10-24UNC1-3/8 1-1/2 1-5/8 1-3/4 1-7/8 2 2-1/8 2-1/4 2-1/2 2-3/4 3 3-1/4 3-3/4 4-1/4 4-3/4 5-1/4 1/4-20UNC1-5/8 1

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

220 230 AH 4 x AB AT E1 TR AO SA + Stroke AO Rod flange (F) 4 x FB [mm] Bore size [mm] R TF FB E2 UF W MF 32 32 64 7 50 79 16 10 40 36 72 9 55 90 20 10 50 45 90 9 70 110 25 12 63 50 100 9 80 120 25 12 80 63 126 12 100 153 30 16 100 75 150 14 120 178 35 16 R E2 W MF UF TF Head flange (G) [mm] Bore size [mm] MF ZF 32 10 130 40 10 145 50 12 155 63 12 170 80 16 190 100 16 205 ZF + Stroke MF Single

ITV

Out 0.5 0.5 0.5 Set pressure (MPa) 0.4 Return 0.0 0.3 0.0 0.2 0.5 0.5 0.1 0 2 6 4 8 1.0 0 25 50 75 1.0 0.0 10 0 25 50 75 100 100 Input signal (%F.S.) Repetition Input signal (%F.S.)

Air Slide Table Series MXS

50 35 55 65 N 4 4 4 4 6 6 6 G 15 15 15 17 15 25 35 H 40 40 40 25 36 36 38 NN 2 2 2 3 3 4 5 GA 15 15 15 42 51 61 111 I 10 10 10 10 22 43 52 J 40 40 40 52 60 85 130 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 KA 125.5 179.5 NA 2 2 2 2 2 4 4 M 71 71 71 83 103 149 203 Z 70 70 70 82 102 148 202 ZZ 80 80 80 92 112 158 212 MXS12L-10 MXS12L-20 MXS12L-30 MXS12L-40 MXS12L-50 MXS12L-75 MXS12L-100 Regarding

Free Mount Cylinder

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

Parallel Style Air Gripper Series MHZ

4 6 10 14 4 4 6 10 14 4 4 6 10 14 6 10 16 20 25 6 10 16 20 25 6 10 16 20 25 Double acting Single acting type, Normally closed Normally closed Normally open MHZ MHF Single acting 3.7 12 31 56 83 MHL Refer to pages 436 to 440 for the specifications with auto switch.

CY1

40 50 1 0 1 2 3 4 5 6 10 7 8 9 10 11 0 1 2 3 4 5 6 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY1R20 CY1R63 200 H 1000 100 Allowable driving force Fn (N) Allowable driving force Fn (N) 500 H 400 50 30 L 300 200 L 100 10 5 Useable range 20 30 40 50 Useable range 1 0 1 2 3 4 5 6 10 7 8 9 10 11 12 13 0 1 2 3 4 5 6 7 8 9 10 1112

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

10 C10 Option 10 10 stations M Mixed D side For bottom ported: Rc 1/4, 3/8 only.

VFR

10 stations For bottom ported: Rc 1/4, 3/8 only.

Solid State Auto Switches

Weight (g) Applicable bore size(mm) Weight Applicable bore size(mm) Weight Auto switch model Auto switch model D-A33C-4, A34C-4 D-A33C-5, A34C-5 D-A33C-6, A34C-6 D-A33C-8, A34C-8 D-A33C-10, A34C-10 D-A44C-4 D-A44C-5 D-A44C-6 D-A44C-8 D-A44C-10 162 166 184 210 232 160 164 182 208 230 40 50 63 80 100 40 50 63 80 100 Dimensions (mm) T Applicable bore size (mm) 40 50 63 80 100 C 44 52 64 78 92

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

LE-CSE-RA (Note 3) ETFE SVP 70/0.08 (AWG#22 or 2 to 10 AWG22 6 (3 pairs) 70/0.08 56 or less 1.2 7.1 0.3 equivalent)-3P Ban-gi-shi-16824 LE-CSE-RB LE-CSM-SA 2 to 10 LE-CSM-SB 2 to 10 (Note 5) AWG19 4 50/0.08 25.40 or less 1.8 5.7 0.3 (Note 4) UL Style 2103 AWG19 4 cores Motor cable LE-CSM-RA 2 to 10 LE-CSM-RB 2 to 10 LE-CSB-SA 2 to 10 LE-CSB-SB 2 to 10 (Note 5) AWG20 2 100/0.08 38.14 or less