1 6 6 6 6 9 6 6 7 7 7 7 8 8 6 7 8.5 9 11 11 14 16 110 118 146 160 A E HT Bore size (mm) 80 100 Over 25 st to 50 st 140 157 Over 50 st to 200 st 170 190 Over 25 st to 50 st 33.5 31 Over 50 st to 200 st 63.5 64 25 st or less 119.5 131 Over 200 st 203 213 25 st or less 13 5 Over 200 st 96.5 87 201 238 Bypass port size for guide rod with bottom mounting Standard model no.
6 6 20 25 32 40 50 63 80 100 125 140 160 CD-P11 13 CDJ2, CDVJ CDQ2 OUT( ) Blue(Black) CD-P12 10 12 6 6 6 6 12 12 6 6 6 6 12 13 12 6 6 6 6 12 13 12 12 12 11 10 12 12 13 13 13 B P CDXW Note) qIn the case operation load is an inductive load. 6 6 6 wIn the case the wiring length to load is > 5m.
6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41 13-/22-MXS6-10 13-/22-MXS6-20 13-/22-MXS6-30 13-/22-MXS6-40 13-/22-MXS6-50 780 MXS 1322Air Slide Table Dimensions: MXS6 13221322Axial piping (6): MXS6-P 26.3 Max. 5.6 Operating port 2 x M3 x 0.5 12 5.5 11.5 8 Other dimensions are the same as those of basic type. 781 MXS 1322Air Slide Table Dimensions: MXS6L / Symmetric Type 1322Air
F 22 25 21 26 27 N 4 4 6 6 6 G 6 13 11 21 H 23 26 28 28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16 9 J 17 27 37 48 65 K 21.5 31.5 41.5 51.5 61.5 M 42 52 62 80 90 Z 41.5 51.5 61.5 79.5 89.5 ZZ 64 74 84 102 112 13-/22-MXQ6L-10 13-/22-MXQ6L-20 13-/22-MXQ6L-30 13-/22-MXQ6L-40 13-/22-MXQ6L-50 Note) Note) Note) Refer to the bottom view of MXQ6-30. 1322803 MXQ 1322Air Slide Table
13 13 16 H1 5 6 6 8 GL 6 9 9 11 B1 13 17 17 22 BN 80 90 90 BZ 57.5 69 69 76 I 28 BQ 1/8 1/8 1/8 1/8 GC 8 9 9 8 AL 15.5 19.5 19.5 21 H 41 45 45 50 GA A 18 22 22 24 GB 8 8 8 11 GR 4 7 7 7 GK 3.5 4 4 4 B2 26 32 32 41 H2 8 8 8 10 GD 55 D 8 10 12 14 Bore 20 25 32 40 Stroke range to 300 to 300 to 300 to 300 0.033 0 73.5 1/8 1/8 0.033 0 64.5 33.5 83.5 0.033 0 64.5 70 37.5 83.5 0.039 0 1/8 100.5
17 17 13 B1 41 32 32 26 B2 6 6 6 6 13 F Bore size H2 16 13 13 13 WC H H1 AL K MM NA NN GC N1 WA WB 31 26 26 26 GA 11 8 8 8 GB 0 50 45 45 41 6 6 5 8 8 8 14 12 10 8 20-0.033 21 19.5 19.5 15.5 24 22 22 18 40 32 25 20 15 11.5 10.5 8.5 36 31 31 31 174 140 138 134 1/8 7 5.5 5.5 5 46.5 37.5 33.5 28 108 82 80 80 42.5 34.5 30 24 41.5 35.5 35.5 35.5 21.5 17.5 17.5 17.5 M10 x 1.25 M8 x 1.25 M26 x 1.5
12 24 6 12 10 18 M6 x 1 31 16 GKM6-12 6 12 24 6 12 10 18 M6 x 1 31 20 GKM8-16 8 16 32 8 16 14 23 M8 x 1.25 42 25 GKM10-20 10 20 40 10 20 18 27 M10 x 1.25 52 Bore size Part no. b1 b3 dH7 d6 d7 h l l3 d3 a 8 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 10 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 12 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 16 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 20 KJ8D 12 9 8 24
10.4 4.5 24.5 M A L H 8 1/8 KQ2H08-01GS 14 12.4 13 22.5 19.4 14.2 26.1 18 6 11.9 1/4 KQ2H08-02GS 14 12.4 13 22 17.3 14.2 26.1 18 6 13.9 3/8 KQ2H08-03GS 17 17 13 18.1 13 14.2 26.1 18 6 21 Connection thread (With sealant) 1/8 KQ2H10-01GS 17 14.8 15.6 23.8 20.7 15.6 26.1 26.1 6 16.9 1/4 KQ2H10-02GS 17 14.8 15.6 27.3 22.6 15.6 41.5 29.5 7.5 22.1 3/8 KQ2H10-03GS 17 14.8 15.6 23.5 18.4 15.6
PA PAX PB Flow Characteristics Water Air Orifice size (mm ) Port size Av x 10-6 m2 12 (INN.C.) 13 (INN.O.) 12 (INN.C.) 13 (INN.O.) Model C [dm3/(sbar)] C [dm3/(sbar)] Av x 10-6 m2 Cv converted Cv converted b Cv b Cv N.O.
(7) 4 x M8 x 1.25 thread depth 13 (170) Motor cable (7) 106 60 Body mounting reference plane Note 1) 74 58 6H9 ( ) depth 7 7 +0.030 0 +0.030 0 6H9 ( ) depth 7 13 L (3.1) A (Table traveling distance: Stroke + 6) Note 2) 86 86 (223.5) (90) (88) Stroke 61 90 Encoder Z-phase detecting position Note 3) (4) 21 68 53.8 85.5 8 31 8 M4 x 0.7 thread depth 8 (F.G. terminal) +0.030 0 6H9 ( ) depth 6
WB 13 13 13 16 F 0 200.033 0 260.033 0 260.033 0 320.039 GC 13 13 13 16 I 6 6 6 6 K 28 33.5 37.5 46.5 NA M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 MM 5 5.5 5.5 7 NN 24 30 34.5 42.5 Bore size 13 17 17 22 26 32 32 41 5 6 6 8 41 45 45 50 8 8 8 10 134 138 140 174 26 26 26 31 703 Air Cylinder CM2-Z 2122CM2-Z/ 1011With rubber bumper Boss-cut, Basic (BZ): CM2BZ, CM2BZ 10112122Standard port Air
M2.5 x 0.45 x 82 4 For nozzle size 18, 20 M2.5 x 0.45 x 86 4 6 6 6 6 2 2 2 2 4 4 4 4 For nozzle size 10, 13, 15 For nozzle size 18, 20 Standard (without options) With individual spacer For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate For nozzle size 10, 13, 15 + with function plate For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle
(mm) Stroke range (mm) 32.5 32 6 12 8.5 22 17 1/8 30 10 46 45.5 54 97 Up to 500 12 13 83 13 13 19.5 D38 40 8 16 10 30 22 1/8 35 14 52 52.5 63 104 Up to 500 12 13 91 16.5 14 27 46.5 50 11 20 12.5 35 27 1/4 40 18 65 58.5 75 120.5 Up to 600 15 14 104.5 19 15.5 32 -X 56.5 63 11 20 17.5 35 27 1/4 45 18 75 68 90 134.5 Up to 600 12 14 119.5 23 16.5 32 72 80 13 25 22 40 32 1/4 45 22 95 81 102 169
1/4 189 20 Up to 750 55 26 37 22 89 114 16 116 170 19 96 40 41 60 30 20 30 25 37.5 Bore size (mm) T U V RR S GR GE GF J K MM N P Q H VA W ZZ L Z 32 154 47 224 6.5 13 6.5 10.5 1/8 M10 x 1.25 23 6 M6 x 1.0 18.3 234.5 13 34 27 4 88.5 37 40 161 51 235 9 16.5 8 11 1/4 M14 x 1.5 23 6 M6 x 1.0 19.5 246 13 39.5 27 4 96.5 41.5 50 183 58 271 10.5 20 9 15 1/4 M18 x 1.5 30 7 M8 x 1.25 22.4 286 17 47
Refer to Table (2) on page 13-2-5 for part number of lead wire with connector. Refer to page 13-2-32 for ordering the manifold. Refer to page 13-2-62 to 13-2-63 for ordering a unit for replacement. 13-2-4 4 Vacuum Module: Ejector System Series ZX Table (1) Valve Unit/Combination of Supply Valve and Release Valve (Refer to page 13-2-6 for detailed specifications.)
absorber stroke) T S F FC FB For MY1M50, 63 SMC EY EC FH W 58 58 70 88 104 128 152 TT 5.4 (max. 11) 5 (max. 11) 5 (max. 16.5) 8 (max. 20) 9 (max. 25) 13 (max. 33) 13 (max. 38) T 6 6 7 12 12 15 15 S 40.8 40.8 46.7 67.3 67.3 73.2 73.2 h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 FW 66 80 91 FH 13 16 17.5 FC 14 14 13 17 17 26 31 FB 54 67 78 F 4 4 6 6 6 6 6 EY 39.5 45.5 53.5 67 83 106 129 EC 5.8
C1 = C (mm) D1 = Q2 L2 max Y Size (mm) 10 D1 L1 max X Size 3 Y 1 2 to 8 C1 10 15 Y = 3 X 3 4 to 14 Y 1.5 3 to 9 3 to 4 C2 L1= L2 = 15 20 X 4 5 to 18 3 to 4 Y 1.5 3 to 10 3 to 5 X= 20 D2 = 30 X 4.5 6 to 20 3 to 5 Y 2 3 to 13 3 to 6 C2 = C 30 40 X 5 6 to 22 3 to 6 Y 4.5 6 to 15 3 to 8 Symbol: A7 Symbol: A8 The short shaft can be further shortened by machining it into a stepped round
C1 = C (mm) D1 = Q2 L2 max Y Size (mm) 10 D1 L1 max X Size 3 Y 1 2 to 8 C1 10 15 Y = 3 X 3 4 to 14 Y 1.5 3 to 9 3 to 4 C2 L1= L2 = 15 20 X 4 5 to 18 3 to 4 Y 1.5 3 to 10 3 to 5 X= 20 D2 = 30 X 4.5 6 to 20 3 to 5 Y 2 3 to 13 3 to 6 C2 = C 30 40 X 5 6 to 22 3 to 6 Y 4.5 6 to 15 3 to 8 Symbol: A7 Symbol: A8 The short shaft can be further shortened by machining it into a stepped round
C1 = C (mm) D1 = Q2 L2 max Y Size (mm) 10 D1 L1 max X Size 3 Y 1 2 to 8 C1 10 15 Y = 3 X 3 4 to 14 Y 1.5 3 to 9 3 to 4 C2 L1= L2 = 15 20 X 4 5 to 18 3 to 4 Y 1.5 3 to 10 3 to 5 X= 20 D2 = 30 X 4.5 6 to 20 3 to 5 Y 2 3 to 13 3 to 6 C2 = C 30 40 X 5 6 to 22 3 to 6 Y 4.5 6 to 15 3 to 8 Symbol: A7 Symbol: A8 The short shaft can be further shortened by machining it into a stepped round