VZ5000

Round head combination screw VQ7 ( ) M3 x 8 With spring washer EVS Blanking plate VZ5000-68-1A VZ5000-68-1A VFN Manifold gasket Applicable Plug Assembly (D-sub connector cable assembly) Cable length 1.5 m 3 m 5 m 8 m Assembly part no.

Manifold Specifications

Round head combination screw VQ7 ( ) M3 x 8 With spring washer EVS Blanking plate VZ5000-68-1A VZ5000-68-1A VFN Manifold gasket Applicable Plug Assembly (D-sub connector cable assembly) Cable length 1.5 m 3 m 5 m 8 m Assembly part no.

Electric Rotary Table

L 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 285.5 310.5 335.5 360.5 385.5 410.5 435.5 460.5 485.5 510.5 273 298 323 348 373 398 423 448 473 498 Trademark DeviceNet is a trademark of ODVA.

Standard Combinations

SUP 1/8 11 (0.60) 10 (0.54) VHS20 1/8 1/4 16 (0.87) 14 (0.76) 1/4 14 (0.76) 16 (0.87) VHS30 OUT IN 1/4 3/8 29 (1.57) 31 (1.68) 1/4 36 (1.95) 27 (1.46) B 3/8 VHS40 3/8 40 (2.17) 38 (2.06) 1/2 42 (2.28) 55 (2.98) Note) Use an air filter on the IN side for operating protection. EXH.

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And How To Order Aoolicable valves N\|z3120-OOO-M5 N\r23220-OOO-M5 N\r23320-OOO-M5 Nllz3{20-ooo-M5 N\1z3520-OOO-U5 Ootions Blank plate ass'y: DXTl92-13-1A EXH Relocation Spacer ass'y: DXr192-21-'1A Applicable valves N\rz3r40-ooo N\rel2'lO-OOO l{ }340-ooo Nv4ttt40-coo N\rz9540-OOO Options Blank plate ass'y: DXTl9213-1A EXH Relocation Spacer ass'y: DXT192-21 -1A SUP Relocation Spacer ass'y:

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

And How To Order Aoolicable valves N\|z3120-OOO-M5 N\r23220-OOO-M5 N\r23320-OOO-M5 Nllz3{20-ooo-M5 N\1z3520-OOO-U5 Ootions Blank plate ass'y: DXTl92-13-1A EXH Relocation Spacer ass'y: DXr192-21-'1A Applicable valves N\rz3r40-ooo N\rel2'lO-OOO l{ }340-ooo Nv4ttt40-coo N\rz9540-OOO Options Blank plate ass'y: DXTl9213-1A EXH Relocation Spacer ass'y: DXT192-21 -1A SUP Relocation Spacer ass'y:

XL-OMY0002

XLD50-2-9-1A XLD40-2-9-1A ** XLD50-2-9-1A ** AS568-009V AS568-016V AS568-016V AS468-009 ** AS568-016 ** AS568-016 ** 63 80 100 160 AS568-043V AS568-045V AS568-050V AS568-167V AS568-043 ** AS568-045 ** AS568-050 ** AS568-167 ** AS568-233V B2401-V85V AS568-349V B2401-G155V AS568-233 ** B2401-V85 ** AS568-349 ** B2401-G155 ** S XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A

High Vacuum L Type Valve

-2-9-1A ** XLD100-2-9-1A ** XLD160-2-9-1A ** Assy (4) Initial pumping Standard AS568-020V valve seal (5).

Multi-channel Digital Sensor Monitor ( compatible)

(Refer to page 38) Press the SET button to set. Move on to display unit setting. Display unit setting Press the UP or DOWN button to select the display unit. : The unit that can be displayed is different depending on the pressure range.

PFxx-OMX0002

Select display colour (Refer to select display colour of page 38.) -41No.PF-OMX0002-B Setting range of the accumulated flow output The accumulated output setting range is displayed by the set value of the 4 digits and the units. Set the value by key operation in the sub display. The upper 4 digits of the value is displayed by shifting of the digit.

Direct Solenoid

NotB that each sprlng cnlers ths spool by maans ol a NVS tto24 NVS4034 ws 4044 NVS 4054 114" Cv 1.47 38" Cv 2.39 'll2' 6t 3.78 3/,1'6.00 38' Cv 1.61 112' Cv 2.72 314' 6t 4.44 1'6.50 15 SERIES DIRECTIONALAIBVALVES DIRECT SOLENOI D OPERATED NVS NVS 4Osa 4a)54 HOWTO ORDER This model number is acoded numberwhich doscrlbs allavailable opiions. 4 .

Vacuum

734 78.5 8.7 1 9 7.5 ZPR168 1 8 20 29137.9 54 75 80 9.9 40 43 34 47.l5 U : 76.1 25 102 92 24.4 48 50 53 38 51 t 80.1 106 96 32.4 1 9 lP[ $enies Without Buflen luirensio Pad Diameters @2 . s4 . Q6 ' oB Pad Diameters @10. a13. @16 Flat type Flat type Flat with rib Deep typezPRloD . l6D only Flat type Applicable Tube Male Thrcad/Weight List (sr) Flat type .

Vacuum

734 78.5 8.7 1 9 7.5 ZPR168 1 8 20 29137.9 54 75 80 9.9 40 43 34 47.l5 U : 76.1 25 102 92 24.4 48 50 53 38 51 t 80.1 106 96 32.4 1 9 lP[ $enies Without Buflen luirens , Pad Diameters @2 . s4 . Q6 ' oB Pad Diameters @10. a13. @16 Flat type Flat type Flat with rib Deep typezPRloD . l6D only Flat type Applicable Tube Male Thrcad/Weight List (sr) Flat type .

OMS0020

OptionSeparately Sold Products . 38 7.1 Communication cable. 38 7.2 Branch communication cable . 39 8. Reference Information . 41 8. 1 Checksum Calculation Procedure . 41 8. 2. Checksum Calculation Examples . 41 8. 3 Communication Response Time Guides . 41 8. 4 ASCII Code List. 42 3 LATCA Series Controller 1.

V100

V114-5GZ VS VFN 2 1 3 2 Blank plate assembly V100-77-1A Manifold base (5 stations) VV100-S41-05-M5 VV100-S41-05-M5 1 set (Type S41, 5 station manifold base part no.) V100-77-1A 1 set (Blank plate assembly number) V114-5GZ 4 sets (Valve) To order valves and options mounted onto the manifold at the factory, list the valve/option with an asterisk () in front of each part number.

SJ3A6

Component Parts Note Filter guide Plug 11 PS port with plug M-5P 1 m White 12 Filter assembly SJ3000-110-1A After tightening the plug (M-5P) with a tightening torque of 1 Nm, or manually tightening, use the tightening tool and tighten it by 1/4 turn. 1 m White , 5 pcs. included 13 Filter SJ3000-107-1A !3!5 Filter (5 pcs. included) !2!

XMD/XYD Series

1A S Valve seal Assy (4) Specific XLD40-2-9-1A ** XLD50-2-9-1A ** XLD63-2-9-1A ** XLD80-2-9-1A ** Standard AS568-009V AS568-016V AS568-016V Initial pumping valve seal (5).

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(Valve) SYJ5000-21-1A 1 pc. (Blanking plate assembly) SS5YJ5-43-03-C4 1 pc. (Manifold base) SYJ5140-5LZ 1 pc. (Valve) SYJ5240-5LZ 1 pc. (Valve) SYJ5000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

SYJ700-9-1(-Q) SYJ700-9-2(-Q) V111(T)SYJ700-19-1A Material Aluminum die-casted Resin Aluminum die-casted Resin Stainless steel 7 Sub-plate Note) 1/8 1/4 Aluminum die-casted Pilot valve Bracket assembly 8 Note) Add suffix -Q for the CE-compliant product.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

(Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) SS5YJ7-41-03-01 1 pc. (Manifold base) SYJ7140-5LZ 1 pc. (Valve) SYJ7240-5LZ 1 pc. (Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.