Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

40 Work load: W [kg] Work load: W [kg] 20 Lead 16: LEKFS32EA 30 Lead 16: LEKFS32EA 20 Lead 24: LEKFS32EH 10 Lead 24: LEKFS32EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEKFS40/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEKFS40EB Lead 10: LEKFS40EB Work load: W [kg] Work load: W [kg] 50 40 20 Lead 20: LEKFS40EA 30 Lead 30: LEKFS40EH

CLS

Auto Switch Without rod boot With rod boot Bore size (mm) 125 140 160 180 200 250 Bore size (mm) Stroke range (mm) 125 140 160 180 200 250 Bore size (mm) Stroke range (mm) 125 140 160 180 200 l P S N RR T U V W Z ZZ f h Z1 ZZ1 S e MA MB MM Z 383 ZZ 412 Z1 406 ZZ1 435 35 35 39 39 39 49 1/2 1/2 3/4 3/4 3/4 1 29 32 36 44 44 55 5 5 5 35 40 45 50 50 65 98 30 30 30 383 412 40 40 40 45 45 55 30

MY2

Load weight Allowable moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load weight kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 3 3 3 3 MY2H16 2 2 2 2 0.2 MY2H16 MY2H16 MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300 400500 1000 1500 100

Compact Hydraulic Cylinder

Note) Applicable strokes are available in 5 mm increments. 249 Compact Hydraulic Cylinder Double Acting/Double Rod CHQWB Series 20, 32, 40, 50, 63, 80, 100 3.5 MPa How to Order B B 50 30 D CHQ CHDQ 50 30 M9BW D W W With Auto Switch With auto switch (built-in magnet) Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

RSH

RSH20, 32 Graphq Graphw 1.0 RSH32 RSH32 RSH32 Bore size 50, 63, 80/ m =0 Bore size 50, 63, 80/ m =0.1 RSH20 RSH20 RSH20 0.9 Operating pressure : P (MPa) 1300 1300 0.8 80 0.7 1200 1200 0.6 1100 1100 0.5 1000 1000 0.4 900 900 0.3 63 80 800 800 0.2 50 Weight : W (kg) Weight : W (kg) 700 700 0.1 600 600 100 200 300 400 500 0 63 500 500 Lateral load: W (N) 50 400 400 RSH50, 63, 80 300 300 1.0

Series VQ Metal Seal/Rubber Seal Body Ported

Coil voltage Configuration Note 2) VQ1000 VQ2000 1 2 3 4 5 6 VQ0 100V AC (50/60Hz) 2 position single 1 2 3 4 5 200V AC (50/60Hz) 2 position double (latching) 110V AC (50/60Hz) Electrical entry (2) (1) 3 position closed center 220V AC (50/60Hz) 24V DC 12V DC Grommet (Except for double (latching) and AC.)

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Because sizes 10, 20, 30 and 50 have the table press fit into an angular type bearing, they cannot be disassembled. 50 11-9-30

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

[mm/s2] The value of 50% or less is the same as duty ratio 50% Duty ratio: 50% 15000 15000 Duty ratio: 50% Duty ratio: 25% 10 10 Duty ratio: 100% 5000 5000 Duty ratio: 100% Duty ratio: 75% Duty ratio: 75% 0 0 0 10 20 30 0 10 20 30 40 Work load [kg] Work load [kg] LEJS40B LEJS63B 20 20 Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] The value of 50% or less is the same

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Function Coil voltage Symbol Specifications DC (1.0 W) AC 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other (3) Nil Standard type High pressure type (Metal seal only) (1.0 W) (1) K (0.5 W) Low wattage type Y External pilot type (2) R Note) Note 1) Option Note 2) For details about external pilot specifications, refer to page

HRX-OM-W038

HRS040--20-T/MT Note1) Applicable model Rated flow50/60HzNote 2) 3) 23(0.18MPa)/28(0.23MPa) Maximum flow rate (50/60 Hz) L/min 30/35 Pump Maximum pump head (50/60 Hz) m 50 Output W 550 Recommended earth leakage breaker capacity A 20 Cooling capacity Note 4) W The cooling capacity reduces about 300 W from the value in the catalog.

%silltr

E , W E , W M P Work Potential energy Kinetic energy Torque Power Joule = Newton meter Joule Joule Joule Watt J J t ' J w = kg . m2's-2 0.5-m-i = J's-l 3.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

"n" pcs. 90 Same side 120 75 (n 4) 2 (n 4) 2 (n 2) 2 120 + 50 15 + 50 90 + 50 Different sides n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 6, 8 D-B5, D-B6 (n 2) 2 (n 2) 2 90 + 50 120 + 50 75 + 50 (n 2) Same side n = 2, 3, 4 n = 2, 4, 6, 8 n = 2, 4, 6, 8 90 1 pc. 120 10 120 Different sides 20 90 2 pcs. "n" pcs.

MXF

(kg) Fig. (2) Overhang: Ln (mm), Correction Values for Moment Center Distance: An (mm) Pitch moment Yaw moment Roll moment W My Mr Mp W W W L3 A5 L1 A1 Adjusting bolt Static moment L2 A3 W MX Mp Mr My MTS W W W MY L1 A2 L3 A5 W L2 A4 CY Mey Note) No need to consider this load factor in the case of using perpendicularly in a vertical position.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

60 50 100V AC Hz 110V AC Hz 200V AC Hz 220V AC Hz Closed center Exhaust center Pressure center 60 50 60 M5 X 0.8: 1.8(0.1) 50 60 (1) AC Push-turnlocking slotted style With light and surge voltage suppressor SYJ5000 Rc(PT)1/8: 4.5(0.25) SYJ7000 Rc(PT)1/8, 1/4: 12.6(0.7) Note 1) All AC voltage models have built-in surge voltage suppressor. 1.2-2 Series SYJ3000/5000/7000 Manifold Variations

SMC Basic Pneumatics

E , W E , W M P Work Potential energy Kinetic energy Torque Power Joule = Newton meter Joule Joule Joule Watt J J t ' J w = kg . m2's-2 0.5-m-i = J's-l 3.

HRL

W: 13 [kW] w Derive the heat generation amount from the power supply output.

Vacuum Unit

Mount the ejector onto the DIN rail by pushing it down in direction (w). Push the filter case assembly in direction (e) until it is locked. 50 or longer e Holes for tightening q w e To hold the ejector onto the DIN rail, hold it from both sides using the stopper brackets. w q q Mounting bracket Vacuum Break Flow Adjusting Needle Caution Stopper bracket (1 pc.) Part number: TXE1-SMC 2.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Symbol Specifications DC (1.0 W) (1.0 W) (0.5 W) AC (3) Standard type Nil Coil voltage High pressure type K (1) 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Low wattage type Y External pilot type R (2) Note 1) Option Note 2) For details about external pilot specifications, refer to page 4-14-18.

Modular F.R.L. Unit

2.5 132 143 28 50 110 7 14 55 35 41 28.5 64 13 7 4 71 0 184 146 31 50 110 7 14 35 55 41 30.5 10 66 7 4 71 187 3.5 183 36 75 145 18 9 40 50 72.5 35 74 12 9 4 88 222 3.5 185 36 75 155 9 18 40 77.5 50 74 35 9 4.6 88 12 224 3 264 43 20 186 11 20 93 50 70 44.5 84 16 11 6.4 115 3.3 303 277 43 20 191 11 20 50 98 70 44.5 16 84 11 6.4 117.5 316 3.3 280 46 20 196 20 11 50 70 98 44.5 84 13 11

CLK1

Symbol Auto switch positioning and mounting 40 50 63 2 pcs. 1 pc. "n" pcs. Model A B Same side Same side 8 0 0 D-P7, D-P8 25 25 25 50 + 65(n-2) 50 50 D-P7, D-P8 D-P5 Approx. Hs 45 49 54.5 Approx. Ht 28 28 28 A B 3 4.5 4.5 26 27.5 27.5 D-P5 Approx. Hs 46 50 56 Approx.