5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Internal pilot manifold L: Dimensions n: Stations External pilot manifold L: Dimensions n: Stations L n 2 98 87.5 70 14 L n 2 110.5 100 80.5 15 3 110.5 100 80.5 15 4 123 112.5 91 16 5 135.5 125 101.5 17 6 135.5 125 112 12 7 148 137.5 122.5 13 8 160.5 150 133 14 9 173 162.5 143.5 15 10 185.5 175 154 16 3 123 112.5 91 16 4 135.5 125 101.5 17 5 135.5 125 112 12 6 148 137.5 122.5 13 7 160.5 150

Water-cooledThermo-chiller

15 0 0 0 2 4 6 8 10 12 14 16 18 20 0 5 10 15 20 25 30 35 40 45 50 55 60 Flow rate (L/min) Flow rate (L/min) If the circulating fluid flow drops below 0.53 gpm (2 L/min)., the shutdown alarm activates and operation stops.

Rotary Actuator/Vane Style Series CRB2

10 15 T99 L CDRB2 W F 180 S With auto switch Size: 10, 15 CDRB2 W B 180 S T79 L With auto switch Size: 20, 30, 40 Size Made to Order Refer to the table below for details.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

L dimension 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 L dimension No. 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 L dimension No. 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 L dimension No. 563 Series VQ1000/2000 1021Construction Directional Control Valves Air Grippers Modular F.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

L dimension 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 L dimension No. 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 L dimension No. 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 L dimension No. 563 Series VQ1000/2000 1021Construction Directional Control Valves Air Grippers Modular F.

HRX-OM-Q026

less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ionic silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Should not be Should not be Referential detected any detected any item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/L]

HRS100/150

Water 15% Ethylene Glycol Aqueous Solution Physical property value Temperature Density [kg/L] Specific heat C [J/(kgK)] Current unit system Physical property value Temperature Density [kg/L] Specific heat C [J/(kgK)] Current unit system Weight volume ratio [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.00 4.2 x 103 1.00 1 x 103 Weight volume ratio [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.02

HRX-OM-X084

70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/L] 4.0 or less 4.0 or less

Title not found

Cable length (L) A1 (17.7) (10.2) 1 2 5 6 (14) (18) 1 3 5 8 A B C 1.5 m 3 m 5 m 8 m A6 B1 B3 A1 A3 B6 (13.5) 1 2 5.7 15 16 Connector B Connector D (30.7) L (11) (14.7) (10) 10 m LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) 8 A B C 15 m Actuator side Controller side 20 m 5.5 6.3 5.7 (14.2) Connector C (Terminal no.)

HRX-OM-S004

[mg/L] 70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential Ammonium ion [mg/L] 0.1 or less 1.0 or less item Residual chlorine [mg/L] 0.3 or less 0.3 or less Separation carbonic acid [mg/L] 4.0 or less

Thermo-chiller

Water Density [kg/L] Specic heat C [J/(kgK)] Conventional unit system Physical property value Temperature Weight volume ratio [kgf/L] Specic heat C [cal/(kgfC)] 1.02 3.91 x 103 1.02 0.93 x 103 Density [kg/L] Specic heat C [J/(kgK)] Conventional unit system Physical property value Temperature 41F (5C) 50 (10) 59 (15) 68 (20) 77 (25) 86 (30) 95 (35) 104 (40) Weight volume ratio [kgf/L] Specic

Air Slide Table Series MXP

-25 MXP12-15 MXP12-25 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.05 0.04 0.08 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.04 0.03 0.06 0.03 0.04 0.02 0.02 0.01 0.02 0.01 0 50 100 150 Load (N) 0 50 100 150 Load (N) 0 50 100 150 Load (N) 200 16 16 16 L = 120 mm L = 120 mm L = 120 mm MXP16-20 MXP16-30 MXP16-20

HRX-OM-T002

[mg/L] 70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential Ammonium ion [mg/L] 0.1 or less 1.0 or less item Residual chlorine [mg/L] 0.3 or less 0.3 or less Separation carbonic acid [mg/L] 4.0 or less

Air Cylinder Series CS1

Stroke Z1 + l + Stroke (mm) Stroke range Type Bore size (mm) CX CDH10 A AL B C CT D E EA F FA G J K KA L MM N RR P (mm) 125 140 160 180 200 250 300 +0.084 0 0.1 0.3 1 2 1 2 3 4 3 4 3 4 50 47 17 36 90 59 43 14 16 15 31 65 35 29 25 32 M14 x 1.5 Up to 1000 145 115 M30 x 1.5 Lube Non-lube Air-hydro +0.084 0 0.1 0.3 50 47 17 36 90 59 43 14 16 15 31 75 35 32 28 36 M14 x 1.5 Up to 1000 161 128

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

7 9.5 10 15 15 7 19 11 18 18.5 23.5 15.5 9.5 12 12.5 17.5 17 11 21 15 22.5 23 28 20 9.5 12 12.5 17.5 21.5 11 25.5 15 30.5 31 36 28 3 5.5 6 11 29.5 4.5 33.5 8.5 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

7

For Air (Orifice diameter: 10 mm, 15 mm, 20 mm, 25 mm) How to read the graph The sonic range pressure to generate a flow rate of 6000 L/min (ANR) is as follows.

HRX-OM-I051

Approx.15 (4 [gal]) Sub Tank capacity *6 L Approx.16 (4.2 [gal]) Circulating fluid port Rc 3/4 Facility water C/MPa 10 to 30 / 0.3 to 0.7 (45 to 100 [PSIG]) Required flow of facility water*9 (50Hz/60Hz) L/min 15/15 (4.0/4.0[gal/min]) Facility water port Rc 1/2 Power supply 3-phase 50/60Hz AC200/200 to 208V10% Main breaker size A 30 Dimensions*7 mm W380D870H950 (W14.96xD34.25xH37.40[inch])

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.03 0.06 0.02 0.02 0.04 0.01 0.01 0.02 0 0 0 80 20 40 60 80 Load (N) 20 40 60 80 Load (N) 20 40 60 100 Load (N) 12 12 12 L = 100 mm L = 100 mm L = 100 mm MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.05 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.04 0.08 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12

KR

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-1-10 to 15-1-11 for Precautions on every series. Caution Grounded 1.

C95

B C D EN ER F E L M N P H Bore size (mm) 0.2 max 0.2 H7 0.1 max H11 H13 H13 0.5 0.5 32 22 10 14 15 30 5 32.5 10.5 6.6 45 10.5 5.5 40 25 12 16 18 35 5 38 12 6.6 55 11 5.5 50 27 16 21 20 40 5 51 46.5 15 9 65 15 6.5 63 32 16 21 23 45 5 56.5 15 9 75 15 6.5 80 36 20 25 27 45 5 72 18 11 95 18 10 100 89 18 41 20 25 30 55 11 115 18 10 5 6-12-9 Series C95 Dimensions: Cylinder Mounting Accessory